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DESCRIPTION JPS62152299
[0001]
FIELD OF THE INVENTION The present invention relates to a method of manufacturing a speaker
diaphragm. [Prior Art] A material for a diaphragm for a speaker is a material having a large Vring ratio F and a small density 、, and when it is fortuned, the specific elastic modulus E / ρ
(combination velocity (τ-7b) is large) It is well known that the material is good, and in addition
to this ('M early, right 1'; Among these, the specific modulus E / ρ is large, N t'l, for diamond
28.551 and boron 19! There are i.G.5, 14.674 of beryllium, etc., but these + A $ 1 are used to
make thin plates by rolling, press, etc., like aluminum nicolum and titanium etc. which have been
conventionally used as diaphragm materials. Since it was impossible to form into a
predetermined diaphragm shape, it was not easy to use it for a diaphragm during a break.
Therefore, in recent years, on the surface of a substrate formed into a predetermined diaphragm
shape with aluminum nichoum, titanium or the like, the monthly evaporation of diamond, boron,
beryllium or the like with a large specific elastic modulus E / ρ is vacuum deposited, sputtered,
or ion plated. A multi-layered diaphragm in which a coating layer is formed by means of a
coating method or the like has been developed. [Problems to be Solved by the Invention]
However, in the diaphragm having a multilayer structure as described above, internal stress is
generated at the interface between the substrate and the coating layer due to the difference in
expansion coefficient between the substrate and the coating layer, which causes the diaphragm
to In addition, the substrate itself does not play an active role from the point of view of sound MI:
Fl, and conversely, increases the overall mass of IG. It was the cause of the decline in efficiency.
Since the present invention has been made in view of such a point, it is composed of diamond
with a large specific elastic modulus E / ρ, a carbon crystal close to diamond, etc. Let's
manufacture an 11-layer diamond speaker diaphragm or a multilayer speaker diaphragm with no
interface between the layers with a diamond diaphragm layer, that is, no seams between layers. It
is said that. [Means for Solving the Problems] In the method of manufacturing the speaker
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diaphragm according to the first aspect of the present invention, carbon C is ion-plated on the
surface of the mold 1 formed in a predetermined shape to form a diamond on the surface of the
mold 1 A quality carbon diaphragm layer 2 is formed, and then the mold material 1 is removed
chemically. In the method of manufacturing the speaker diaphragm of the second invention,
carbon C is ion-plated on the surface of the mold material 1 formed in a predetermined shape to
form a diamond-like carbon diaphragm layer 2a on the surface of the mold material 1. Then,
after ion-plating titanium 7-i while reducing the amount of carbon C to be ion-plated, the ion
plating of titanium only 1 is performed to form a diamond-like material on the surface of the
diamond-like carbon diaphragm layer 2a. The titanium diaphragm layer 5 is formed via carbon
[C] of carbon, titanium carbide TiC, and titanium T1 via intermediate Ji [4a, and then carbon C is
ion-plated while reducing M of butane 1 to be ion-plated. After that, ion plating of only carbon C
is performed to form titanium T1, titanium carbide TiC and diamond on the surface of the
titanium diaphragm layer 5. Via the intermediate 14b made of carbon C of command electrolyte,
to form a carbon diaphragm layer 2b diamond I seven command matter, then, - is to chemically
remove the Ri Symbol type material 1.
(Operation) According to the method of the first aspect of the invention, the speaker diaphragm 3
of the single-layer structure of the single-layer structure made of diamond or the like having a
large specific elastic modulus E / ρ can be 1 q. According to the method, Gui S7 T: Carbon
diaphragm layers 2a and 2b of ungstenous material, titanium diaphragm layer 5 at the center,
and between them, N7 carbon of carbon monde, titanium carbide TiC and titanium Ti Thus, it is
possible to obtain a loudspeaker diaphragm 6 having a multilayer structure in which the
interface between the layers seamlessly connected by the intermediate layers 4a and 4b is not
clear. Embodiment A method of manufacturing a speaker diaphragm of the first invention will be
described. First, as shown in FIG. 1, prepare a mold 1 in which a foil of 20 to 60 μm such as
copper or aluminum chemically soluble in an acidic or alkaline solution is formed into a
predetermined dome-shaped diaphragm shape. By ion plating carbon C on the surface of the
mold material 1 to form diamond or a carbon crystal close to the diamond on the surface of the
mold material 1 and waiting for the ion plating for a predetermined time, ili shown in FIG. Thus, a
diamond-like carbon plate layer 2 of a predetermined thickness is formed on the surface of the
mold material 1 and then an aqueous solution of ferric chloride (in the case where the crucible 1
is copper) or an aqueous solution of sodium hydroxide (material 1 In the case where aluminum is
aluminum), the above-mentioned mold material 1 is dissolved and removed chemically, as shown
in FIG. 3, leaving only the diamond-like carbon diaphragm layer 2 as shown in FIG. Producing
speaker diaphragm 3 of diamond single layer 描造. Here, an apparatus for performing ion plating
will be described with reference to FIG. 11 is a base plate provided with an exhaust pipe 12, and
13 is a bell jar mounted airtight on the base plate 11, and a cooling water pipe (not shown) is
disposed. 14 is a mount for supporting the object to be processed, ie, the above-described mold 1
in J5 in the bell jar 13, 15 is an energizing power source for applying a voltage to the mold 1 via
the mount 14, 16 is rotating the mount 14 A rotary drive mechanism for forming a uniform film
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on the mold material 1 and a crucible 17 for evaporating a film material, that is, carbon C in the
bell jar 13 are provided with an electron beam device or a resistance heating device (not shown)
for heating. 18, a gas introducing device for constantly introducing argon or other gas into the
bell jar 13, 19 a thermionic emission power source for exciting the gas and the evaporant in the
bell jar 13, 20: an evaporative substance in the bell jar 13. It is an ionization power source that
promotes ionization.
Then, while supporting the above-mentioned mold material 1 on the mounting base 14, the high
purity of graphite C which is one of the allotrope of carbon C is put in the crucible 17 like the
diamond, and the bell jar 13 is mounted on the base plate 11, Exhaust the bell jar 13 through the
exhaust pipe 12 to 1 × 10′′5 torr or less. Next, the mold 1 is heated to 100 to 300 by a
heater (not shown), and in this state, the crucible 17 is heated to evaporate the graphic C. On the
other hand, argon and other activating gases are introduced into the bell jar 13 by the gas
introducing device 18 to make the thermo-prone IJ! The carbon C of the evaporated graphite C is
brought into the excited state by the i radiation power supply 19 and ionized by the argon and
the ionization power supply 20 in the excited state, and is applied to the negative electrode 1
negatively applied by the energizing power supply 15 . As described above, it is generally known
that a pure metal film can be formed by ion plating of a metal using an inert gas such as argon as
the introduced gas, but in this case, it is possible to use diamond or diamond. Near carbon
crystals are formed, and a diamond-like film can be formed on the surface of the mold 1, which
becomes the diamond-like carbon diaphragm layer 2. Next, a method of manufacturing the
speaker diaphragm of the second invention will be described. First, a mold 1 similar to that of the
first invention is prepared, and carbon C is ion-plated on the surface of the mold 1 as shown in
FIG. A carbon crystal is formed, and ion plating is performed for a predetermined time tj to form
a diamond-made carbon diaphragm layer 2a on the surface of the mold 1. Then, a diamond-like
carbon, a-diaphragm layer 2a Once the predetermined thickness is reached, the ion plating of
titanium T1 is started to increase the fil of titanium Ti to be ion-plated while reducing the
hanging of the carbon to be ion-plated, and the carbon of guiya 7 Intermediate composed of
titanium carbide TiC and titanium Ti by reactive ion plating of diamond carbon C and carbon c
and titanium Ti on the surface of the diaphragm layer 2a 4a is formed, then only titanium Ti by
ion plating, to form titanium diaphragm layer 5 on the surface of the intermediate layer 4a. In the
intermediate layer 4a, a diamond-like carbon C composed of diamond, a carbon crystal close to
diamond, etc., a crystal of titanium carbide TiC by reactive ion plating of carbon C and titanium
Ti, and metallic titanium T1 exist. By controlling the ion plating of carbon C and titanium Ti as
described above, carbon C of diamond quality on the side of the carbon diaphragm layer 2a of
the diamond 7'I, titanium T1 on the side of the titanium diaphragm layer 5 and the center In the
part, carbonized butane TiC is large, C is mainly at the beginning from the carbon diaphragm
layer 2a side of the diamond purchase to the titanium moving plate layer 5 side, and this C
gradually decreases and the IC gradually increases. Among them, TiC will be the main
constituent, and then TiC will gradually decrease, and T1 will gradually add 111 and Ti will
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become the main constituent. The layer 4a seamlessly connects the diamond-shaped carbon
diaphragm layer 2a and the titanium diaphragm layer 5 and disperses the internal one core force
between the diamond-shaped carbon diaphragm layer 2a and the titanium diaphragm layer 5 .
Then, the titanium diaphragm layer 5 reaches a predetermined thickness, and ion plating of
carbon C is started to increase ion suspension of carbon C while reducing な が ら of butane Ti to
be ion-plated. An intermediate fi 4 b consisting of titanium carbide TiC and diamond-like carbon
C by reactive ion plating of titanium Ti, titanium T 1 and carbon C is formed on the surface of the
titanium 1 general moving plate layer 5, and then only carbon C Is ion-plated to form a diamondlike carbon diaphragm layer 2b on the surface of the intermediate 194b. In the intermediate
layer 4b, diamond carbon C composed of titanium titanium metal, a crystal of titanium carbide
TiC by reactive ion plating of titanium T1 and carbon C, diamond, a carbon crystal close to
diamond, etc. is present However, by controlling the ion plating suspension of titanium Ti and
carbon C as described above, titanium Ti on the titanium diaphragm layer 5 side and diamond
carbon C1 center on the diamond-like carbon diaphragm layer 2 side. In the part, titanium
carbide TiC is abundant, and from the titanium diaphragm layer 5 side to the diamond-like
carbon diaphragm layer 2b side, the main component is Ti at the beginning, and this Ti gradually
decreases and TiC gradually increases This intermediate layer is such that TiC is the main
constituent, and then this TiC gradually decreases, and C gradually increases and C becomes the
main constituent. b is a carbon diaphragm layer 2b of the titanium diaphragm layer 5 and the
diamond seamless connected to disperse the internal stress between the carbon diaphragm layer
2b of the titanium diaphragm Vi5 and diamond. Next, as shown in FIG. 6, the mold material 1 is
chemically dissolved and removed with a ferric chloride aqueous solution (when the mold
material 1 is copper) or a sodium hydroxide aqueous solution (when the mold material 1 is
aluminum). The diamond diaphragms 2a and 2b on both sides, the titanium diaphragm layer 5 in
the center, and the intermediate FfJ 4a and 4b consisting of diamond-like carbon C, titanium
carbide TiC and titanium T1 seamlessly connecting them This produces a multilayer diaphragm
speaker diaphragm 6 in which the interface between each layer is not clear. Here, the apparatus
for performing ion plating is basically the same as the apparatus shown in FIG. 4, and as shown
in FIG. 7, two crucibles 17 are provided. The two-gun type 6 is provided with a gas 59-person
apparatus 18, a power supply 19 for releasing the thermo-rpion and an ionization power supply
20, respectively. Then, put high purity Graph eye l-C in one rafter 17 and put 13 pure 1 good
titanium Ti in the other roop 17 to control the suspension of Graphite C and Tikun king i The
end-to-end carbon diaphragm layer 2a, the diamond M 1 carbon C, the intermediate layer 4a
consisting of titanium carbide TiC and titanium Ti, the butane diaphragm layer 5, the titanium Ti
titanium carbide TiC and the die F t An intermediate layer 4b made of carbon C from carbon, a
carbon diaphragm of Guihera Sendt T1), and '/ i2b are sequentially formed.
In the case of J3 and titanium carbide Tic coating, instead of evaporating the graphite C,
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acetylene 02 Hz gas or methane gas CH4 may be introduced. (Effect of the Invention) As
described above, according to the first invention, a loudspeaker diaphragm of a single-layer
structure of only a diamond material without a substrate can be manufactured. Therefore, high
Young's modulus E, high specific elasticity It is possible to provide a high-efficiency loudspeaker
diaphragm with a rate E / ρ (sound velocity fE / ρ) and without any unnecessary increase in
quality. Further, according to the second aspect of the present invention, carbon and titanium
carbide of a die% y carbon having a diamond-like carbon diaphragm layer on both sides and a
titanium diaphragm layer at the center and the ratio sequentially changing between them. It is
possible to manufacture a speaker diaphragm of a multilayer structure in which the interface
between the layers seamlessly connected by the intermediate layer consisting of titanium and
titanium is not clear, and therefore distortion due to internal stress and distortion in sound
quality compared to conventional multilayer 5i immersion Thus, it is possible to provide a
speaker diaphragm having a high A7 sounding ratio E, a high specific gravity 1 ratio E / ρ (3d7E
/ ρ), and a 1g1l property.
[0002]
Brief description of the drawings
[0003]
1 to 3 are longitudinal sectional views showing the steps of the method for manufacturing a
speaker diaphragm according to the first invention, and FIG. 4 is an explanatory view of a device
for performing the ion plating, and FIG. 6 and 7 are longitudinal sectional views showing the
steps of the method of manufacturing the speaker diaphragm of the second invention, and FIG. 7
is an explanatory view of the apparatus for performing the ion plating.
1 ... type material, 2.2a, 2b ... Gui eight 7 Mondo quality carbon diaphragm diagram, 3 ... speaker
diaphragm, 4a, an intermediate layer composed of carbon and titanium carbide and titanium 4b
... diamond, 5 ·· Titanium diaphragm layer, 6 ··· Loudspeaker diaphragm, C ·· Carbon, Ti ···
Titanium 朱 ■ 濫
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