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Fields for industrial use in IJ Each anthropochromic device to the present invention '? , And Fr
are related to a manufacturing method of a speaker diaphragm used for a speaker. The structure
of the conventional example and its problems Conventionally, as a filler of the diaphragm for a
speaker, a natural fiber such as pulp is formed into a paper and formed and processed, a polymer
film, a foam, a metal foil or the like is used. Each was not satisfactory. That is, although the
speaker diaphragm using pulp fiber has a large internal loss and does not cause sharp resonance,
it has a small specific elastic modulus, is easily affected by humidity, and has a defect that causes
a change in sound quality. Met. In addition, since the speaker diaphragm made of a polymer film
or a foam is also inferior in terms of the specific bullet 1 gl ratio, it can not be used as a speaker
diaphragm, and it is not possible. Although the specific modulus of the metal π1 is relatively
high, the internal loss is small, and there is a disadvantage that the nonlinear motion at the time
of large amplitude causes distortion, etc. It has been used as a diaphragm of a speaker for use in
acupuncture. チタン2? 1 or aluminum foil, these alloy foils are mechanically strong (l 、
strong, have relatively high specific modulus, or are not sufficiently satisfactory, and require a
speaker diaphragm of a filler having a higher specific bullet rL ratio It is done. Although coating
of ceramic layer on the surface of metal foil such as aluminum is also considered from the above
reasons, q adhesion between metal foil and ceramic is poor, and it is difficult to obtain sufficient
elastic modulus even in physical properties, The problem was left behind. The purpose of the
invention is not to invent (rJ is to improve such conventional problems, and titanium foil and
titanium alloy foil are used as materials, and a titanium nitride layer is formed on the surface of
titanium foil and titanium alloy 2 ^. A highly reliable speaker diaphragm with excellent specific
elasticity obtained by high temperature, high pressure treatment in an inert gas atmosphere after
forming a titanium nitride layer on a layer of titanium carbide and its soil The purpose is to In
order to achieve f in accordance with the invention, titanium nitride, titanium carbide and
titanium nitride are physically deposited on the surface of titanium foil, titanium alloy 2βj, which
has been formed into a diaphragm shape in advance. Titanium and titanium alloys comprising a
layer having a high specific elastic modulus on the surface, by forming a titanium compound
layer having a high 9jl I property and treating at high temperature and high pressure. The
speaker diaphragm of this invention is obtained. DESCRIPTION OF THE PREFERRED
EMBODIMENTS The following is a description with reference to the drawings of FIGS. 1 to 4
showing one embodiment of the invention.
This speaker diaphragm uses titanium foil as the metal foil 1 and is formed in advance into a
diaphragm shape, and a titanium nitride layer which is a titanium compound having a high
elastic modulus on the surface of this titanium 2 pH by physical vapor deposition. Finally, a
titanium nitride layer 4 is formed thereon, and finally, high pressure treatment is carried out in
an inert gas atmosphere (such as nitrogen gas). It may be titanium foil 1 (t: titanium alloy foil).
The titanium nitride layer 2 is laminated 5 μm on the soil of 20 / I titanium foil 1 by the Spacklink method. Similarly, the titanium carbide layer 3 is laminated to 4 to 5 / I, d, and so on, and all
the titanium nitride layers 4 to 1 to 21 are laminated. By laminating a titanium compound in this
manner, a titanium foil 1. Good adhesion to (may be titanium alloy foil). Furthermore, in order to
further improve the adhesion between the titanium compound and the titanium foil 1 and the
physical strength, 9 f / cr 4 to 1000-1600 at a high temperature of 600-800 ° C. in an inert gas
(nitrogen gas) atmosphere. By performing heating and pressure treatment at a high pressure for
about 1 to 2 hours, it is possible to obtain a highly reliable speaker diaphragm having high
elasticity. The titanium carbide layer 3 has a very high hardness, and the specific bullet + '+-ratio
is also good 21ζ When the film thickness is large, there is a gap between the titanium foil 1 and
the adhesion 1' Lvc. There is a risk of causing a peeling phenomenon at 1 ', and the thickness is
preferably 10 .mu.m or less. It is desirable to form the titanium nitride layer 4 completely on the
titanium carbide layer 3 in order to improve the problem of titanium carbide. The titanium
nitride layer 4 has a lower hardness at finger temperature than the titanium carbide layer 3VC,
or a good adhesion to the titanium foil 1 and is stable against speaker vibration. The speaker
diaphragm having these configurations can improve reliability and improve physical strength by
high-temperature, high-pressure processing. When the titanium foil 1 is treated at a temperature
of 830 ° C. or higher, it reacts with oxygen, which is an impurity in the inert gas, and therefore,
it should be carried out at a high temperature, high pressure treatment n 800 ° C. or less 75:
Desirable. The high-temperature, high-pressure processing conditions will be described in detail
VC, explaining the speaker diaphragm in which the titanium nitride layer 2 is formed on the
surface of the titanium foil 10, or the titanium carbide layer 3 and the titanium nitride layer 4
completely formed on the surface of the titanium foil 1 Close the lid of the speaker diaphragm in
a high temperature, high pressure processing device, evacuate the inside of the device, replace
the inside of the device with nitrogen gas (10 kgf / crI), and then nitrogen gas 100 kJf /
(shoulder filling The pressure was increased by the external temperature and the compressor.
After holding at 650 ° C. and 1500 kyf 7.4 for 60 minutes, the vessel was depressurized and
depressurized to take out the object to be treated. In addition, the physical properties of those
subjected to this high temperature and high pressure treatment and those not subjected to such
treatment are shown in the following table (f. The high temperature and pressure treatment
makes the titanium compound more compact, and the density is slightly increased, and at the
same time, the elastic modulus is also improved. Effects of the Invention As described below,
according to the manufacturing method of the speaker diaphragm of the present invention, the
high frequency and high pressure treatment not only improves the frequency four o'clock of the
speaker but also increases the reliability. Become a dog of industrial value.
Brief description of the drawings
1 and 2 are enlarged cross-sectional views of the flange portion in the embodiment of the
speaker diaphragm of the non-invention, and FIGS. 3 and 4 are 1 () 1-1 by the manufacturing
method of the speaker diaphragm of the non-invention 2 is a cross-sectional view of a diaphragm
for a loudspeaker.
1・°′°°チタン? C1 (titanium alloy foil), 2 ° titanium nitride layer, 3 ° titanium carbide
layer, 4 ° titanium nitride layer. Name of agent Attorney Nakao Toshio and 1 other person
Figure 1 \ Figure 2 Figure 3 Figure 4