JPS5520086

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DESCRIPTION JPS5520086
I. A clear sheet of the specification (no change to the contents). A transducer device and method
of making the same. A transducer device using one that exhibits piezoelectric properties when
biased, comprising at least one transducer element formed by at least one thermoformed
protrusion formed on said film, and a strained portion of said protrusion A transducer device
disposed between the electrodes that are electrically polarized to form a capacitance.
Claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device using a
film of piezoelectric polymer with electrodes on both sides as transducer element. The
piezoelectric effect is generated by stretching the macromolecular chain of the polymer in a fixed
direction and treating it so as to place the strained film in a polarizing field. Many polymers are
known from which the above-mentioned types of piezoelectric effect can be obtained, and as
such polymers, for example, polyvinylidene fluoride (PVF) -polyvinyl full second id (pry) polyvinyl chloride (PF / C) and These mixtures are included. The above-described piezoelectric
transducer is usually made of a flat film of piezoelectric polymer whose major surface is
metallized. This pre-strained and then polarized film is used, for example, to make cylindrically
shaped inlays so as to produce transducer elements of deployable shape such as polyhedrons. If
the shape is configured to be deployable, means are needed to support the piezoelectric film.
Because it is relatively thin, the piezoelectric film has a tendency to squeeze by its own weight,
and thus into its non-rigid vibratory structure its surface without using suitable support members
It is difficult to convert the amount of expansion of the However, to support the piezoelectric
polymer film, the use of a support member to tension it may unnecessarily complicate the
structure of the transducer device. Also, this support member may degrade the radiation
EndPage: 3 performance of the piezoelectric polymer film, and the 0 piezoelectric polymer film is
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made flat from the beginning and incorporated uniformly depending on the applied voltage and
It is difficult to move linearly in a direction perpendicular to the surface. In order to eliminate
these difficulties, according to the present invention, the above-mentioned polymer fins are at
least locally subjected to a thermoforming process, which results in a non-deployable but
noticeable transducer element. The strain due to the above-mentioned thermoforming process
elongates the chain of macromolecules, which is essential for the generation of the piezoelectric
effect. Applying a biasing field to the thermoformed film and settling the electrode on its major
surface either results in a cumulative displacement effect or some A conversely limits the
displacement limit. According to the invention, a transducer device is provided which uses a film
made of a polymer which is distorted in its plane and which exhibits piezoelectric properties
when a deviating field is applied perpendicular to that plane.
The transducer device includes at least one transducer element formed by at least one protrusion
thermoformed into the film, the strained walls of the protrusion being electrically biased, 2 It is
interposed between two electrodes to form a capacitor. The invention also relates to a method of
manufacturing the above-mentioned transducer device, which method is characterized by the
following step 1. At least one projecting portion is formed by thermoforming in a film of a
polymer that exhibits piezoelectric properties when it is distorted and a biased charge buildup is
applied perpendicularly to the surface, which is strained by this thermoforming The wall of the
projecting portion is electrically biased and rests on this wall to deposit an electrode to form a
capacitor. Embodiments of the present invention will now be described in detail with reference to
the accompanying drawings. FIG. 1 shows a transducer device which radiates compression waves
into the fluid when an alternating voltage generated from generator r is applied. Such electromechanical transducers are usually found to operate in a reversible manner, i.e. to generate an
alternating voltage when mechanically excited by compression waves. The operation of this
transducer as a sound wave generator is through the following. The sound generator has the
shape of a dome-shaped projection and is fastened on the support 4 through an annular edge.
The dome wall is a thermoformed polymer film t and electrodes deposited on both sides of this
film ridge! It is formed of 7 steps. This dome! , 4-7 are made of a film of a polymer which is
strained in its plane and which exhibits piezoelectric properties when a biasing field is applied to
its surface. Films of the above polymers are initially flat and do not exhibit any piezoelectric
properties. By means of the thermoforming process, which will be described in detail later, it is
molded into a conically shaped projecting part. After appropriate electrical biasing, the
thermoformed film 6 is conductively coated on its two surfaces! And 7 are applied. The assembly
thus seen becomes a vibrator 1 when it is excited by the generator t, and the dome is alternately
expanded and contracted. dome! The air 10 trapped between 7 and 7 and the support is simply
compressed, but the outer surface of the dome jA, 7 is an acoustic wave equal to the frequency of
the voltage applied by the generator l Cause The operation of the device shown in FIG. 1 as a
vibrating dome is best understood by considering one of the distorted elements AECD. This
element AECD is shown enlarged in FIG.
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In the first figure-the original volume 12 before this element ABCD is strained into the
thermoforming process is shown in dotted lines. For a volume 12 containing helical
macromolecular chains oriented in all directions, with coordinate axes -2,3. Plane 1. The strain
forces T and T2 were exerted in the cavity. As a result, the element ABCD lacks isotropy, and the
macromolecular chain is distracted in the strain direction corresponding to the mechanical strain
T, T. 1) mer t becomes anisotropic as described above. When the bias voltage Vp from the
generator ll becomes the electrode! And added to 7. An electric field is added to Ekabolimer 6 to
this, and the charge in the macromolecular chain is rearranged. EndPage: 4 After completing the
two treatments described above, the Vc'-polymeric element 6 gains piezoelectric properties. In
particular, the piezoelectric constants d111, d31, and d have non-zero values, so this! ! The edge
of the element ABCD is moved by the excitation voltage applied to and 7 in the direction of
increasing or decreasing the volume 10 contained inside the dome of FIG. The thermoforming of
the polymer fibers forms a projecting portion whose envelope forms a freestanding outer shell
which, when appropriately biased, responds to the excitation voltage in a thermoforming step.
This produces an overall displacement that tries to reproduce the final stage of the deformation
that has occurred. The application of an alternating excitation voltage "breathes" the dome, which
vibrates in all its parts. There are a number of polymeric materials suitable for the production of
piezoelectric transducers. Among these, polyvinyl chloride (prc) polyvinylidene fluoride (pry) 'and
polyvinyl fluoride (pry) are particularly included. As will be apparent later, the piezoelectric effect
is not a single effect that often occurs in the thermal dusting process and the voltage deviation
process. Materials treated to exhibit the piezoelectric effect are also found to be used as infrared
detectors. FIG. 3 shows an apparatus for thermal growth of the piezoelectric dome shown in FIG.
The device comprises a funnel-shaped mold / l, the base of which is connected via valve 17 to the
vacuum pump r leading to a vacuum pump r. An annular flange is provided at the top of the mold
/ Il. The valve 17 is closed 1 and a flat film 16 of a polymer, for example polyvinyl chloride, is
placed on this flange. A ring 19 cooperating with the flange phantom securely grasps the film 16
and at the same time fluidly seals the cavity formed by the conical portion of the mold / lI and
the film 16.
The heater is softens the material forming the film 16. The valve 17 is opened, the air in the
fluid-sealed cavity is gradually exhausted, and the film 6 is deformed downward by the action of
atmospheric pressure. During this thermoforming operation, the film 16 is stretched
considerably and its surface area is several times its original value. At the end of the run, the film
14 contacts the m / da conical wall. Because the mold / l is equal to ambient temperature, the
thermoformed film solidifies in the shape of a dome ridge as shown by the dotted line. The device
shown in FIG. 1 is used to electrically bias a thermoformed dome. This device has a conductive
support 21 on which the preformed dome t can be fitted exactly. Electrodes are deposited on the
outer surface of the dome t. The dome is placed on the support 2 / and its edge is held by the
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conductive ring 2. The ring n and the support 21 are connected by means of a switch 13 to a DC
voltage source //. The dome is heated by the heat source 20 and closing the switch 13 applies a
bias voltage to the dome for a predetermined period of time. The support prevents the dome
from softening and crumbling or turning back. Support 2 / is also! very! In conjunction with this,
it generates a biased electric field Ep dependent on the thickness of the dome wall. The electric
field should be strong enough to destroy the thermoset polymer to form a thermoformed dome.
Ho The thermoformed dome after the above electric biasing step is a conductive material to form
the electrode 7 It is applied. It is advantageous that the remaining steps have conductivity for
conducting them with the electrode 7. It is only attached to An inner electrode may be deposited
prior to application of the voltage. Fixation of these electrodes on the polymer film is promoted
by treating the film surface with corona discharge. As one non-limiting example, a toita for
reproducing sound waves with a frequency of about zxgz or higher was made according to
Section 1.3 and factors. The starting material was a PVC film of about micron thickness. The film
was thermoformed at 10 ° C. by suction in a 7 mm cone diameter base diameter tas. The
rounded tip of the heat-moulded dome was then transitioned to the pyramidal portion at a
circumferential radius of zam diameter. The dome was metallized cold by silvering its outer
surface with b. The dome was then placed at a temperature of 2 /, which is indicated in the first
factor, of which a DC voltage of about 3000 V was applied and electrically biased at ixo ° C.
The voltage was seen for one hour, EndPage: 5, and the dome was left to cool before this voltage
was shut off. The inner surface of the dome was then painted with a layer of silver. The assembly
was then mounted on a rectangular baffle 26 (WX, and a circular opening was provided. The
dome was fixed to this opening at its edge. electrode! By applying an alternating voltage with a
peak-to-peak ratio of 1 oor between 7 and 7, the acoustic level was switched back to a level
sufficient to be used as a high frequency radiator in a conventional acoustic enclosure. Such a
polymer speaker has a response curve 9 with a maximum at a frequency around 10 KH1. This
maximum value originates from the resonance of the dome. Such resonances can be eliminated
by providing a cone cut of foamed polyurethane inside the dome. No noticeable anomalies are
found in the response curve corrected in this way. Because the dome acts as a simple flat piston
and rather as an oscillating sphere, the radiation from it is only very slightly directional. From the
above example, it has become clear that the thermoforming gives rise to a structure in which it
can be vibrated as a whole and so all its parts are propelled. This structure is seen as selfsupporting because it is conical. The features of this transducer can also be reproduced and seen
since its shape is completely reproducible. Furthermore, since this speaker has neither a magnet
nor a movable coil, it can be manufactured inexpensively. From the above, it has been clarified
that the conical projections which can form an excellent electroacoustic transducer from the
polymer film are formed by thermoforming and electrical deflection. Transducers of this type
radiate sound waves into the air or are perfectly adapted to the detection of sound waves in the
air. It shows that the transmission and reception of ultrasonic waves in water is as good as the
conventional b. In the latter case, since the material of construction also has a mechanical
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impedance which is about the same as that of the liquid through which the sound waves are
transmitted, it presents the least impediment to the propagation of the waves, which is a
significant noise It is one of the advantages. FIG. 5 shows an apparatus for providing a projection
in the form of a spherical cap by thermoforming. This device has a tank 2 for containing the
liquid J. A seat with a raised edge is provided in the central part of the tank 2-on which the film 6
of the polymer to be thermoformed is placed.
A circular opening formed in the central portion of the seat of tank 2 q defines the portion of film
16 to be thermoformed. A bell-shaped bottle clamp fixed on the film 16 grips the edge of the film
/ 6. The bell-shaped bottle contains a liquid 27 which acts as a liquid plunger for thermoforming
the portion of the film / 6 depending from the circular opening formed in the seat of the tank 2.
The bell-shaped bottle communicates with a pipe 29 carrying a high pressure P gas through a
valve U. The liquid J, 27 is forced to a temperature suitable for the thermoforming operation by
the heating element (not shown) K. These liquids J-27 are also made conductive using
appropriate ions. The tank 2'l and the ball-jar 24 are made of a conductive material and are
electrically isolated from each other as in the film 16. This Fill A / 61 d sealing action is also
performed. A direct current voltage source / l is connected to the tank 2'l which generates a
voltage for biasing the film, the other terminal of which is connected via a switch 13 to the
pelger. When the switch 13 is closed, bias voltages are applied directly to both sides of the film
160. When the thermoforming temperature is obtained for the entire film / 6, the valve U is
opened, the pressure P is transmitted to the film 16 via the liquid 27, and the film 16 stretches
downwards to a projection like a spherical cap. This shape is obtained without using a mold
because the pressure applied to the liquid 27 is hydrostatic pressure. Electrical biasing takes
place during thermal formation (although its action continues even after the desired shape has
been obtained as shown by the dotted lines in FIG. 3). The heat forming method illustrated in FIG.
5 is limited only to the formation of a spherical cap-like protrusion, and if an element capable of
removing zero is used to form a sheet portion for tank evaluation, as illustrated in FIG. The
projections with the central spherical cap, surrounded by an annular corrugation S-, can be
thermoformed. The heat forming process of this sphere EndPage: 6 cap may be continued until it
becomes more than hemispherical, and the edge is placed on the cell including the opening
under the sheet portion of the tank review. Small secondary projections can also be formed on
the main spherical cap. In this case, the secondary projection acts as a reinforcement frame. In
the case of removing the formed projections having the film 16 attached, it is necessary to
transfer the liquid j, 27. This liquid transfer action is carried out using the attached storage tank
(first factor J / C 51 J not shown). You can do it.
Also, the tank 2 and the bell jar may be interconnected to balance the pressure exerted on both
sides of the thermoforming structure. Although the heat forming apparatus described above
stretches a polymer film using the pressure of gas or liquid, the heat forming apparatus
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illustrated in FIG. 6 performs stamping. The device comprises a stamp X, a die 31 and a ring 32,
and a cylindrical projection t is obtained by moving the stamp X in the direction of the phantom.
In this case, strain remains but is fixed to the cylindrical wall of the protrusion. Japanese Patent
Application Laid-Open No. 55-20086 (7) The reason is that the base of the protrusion is
prevented from sliding on the stamp head due to the frictional force, so that it is natural to heat
to perform 0 heat formation- However, it is preferable to use a stamp heated to a temperature at
which the polymer film is softened また Also, according to the present invention, the heat
forming method by hot stamping is processed into a complicated shape as shown in FIG. And
stamps can be used. FIG. 7 shows an electrical biasing device, the device of which is particularly
suitable for forming thermoformed films which withstand large displacements. The shape of the
thermoformed film in this case is a spherical cap-like protrusion at the center, and a corrugated
annular protrusion at its periphery. In such a case, it is advantageous if the direction of the
pneumatic bias is reversed when moving from one side of one waveform section to the next
waveform section. Thus, the thermoformed film is placed on the insulating support 3 'LJ, and the
upper surface of the support 3 is exactly adhered to the side of the film. The central protrusion of
the support 3 is metal-plated to its base and electrically connected to the multi-terminal 37. The
outside of the annular corrugation of the support 0 is also metal-plated, these metals The plated
portion is connected to the terminal 37. The inside of the annular corrugation of the support 3 is
also plated with metal, a portion of which is connected to the terminals 36. There is a conductive
ring easily. This keeps the thermoformed film correctly on its support 34c. A neutral point
terminal O is connected to the bias voltage source 3s, and this terminal 0 is connected to the ring
easily. This voltage source covers the upper surface of the illuminant t), which forms a positive
voltage at terminal 37, which is equal to this, but which supplies a negative voltage at terminal
36, respectively. In this way, the bias electric field is alternately obtained as the electric field
moves from the outside to the inside of the waveform portion. A portion of the thermoformed
film weir described and shown, which is an electrode! , 7 are formed on both sides of the film
film.
The end of this film t- is a support-two conductive rings 3K1. ? It is held between 90s. Excitation
voltage is supplied from a generator connected to this ring 3L 39, the sides of the undulations in
one direction are elongated and the sides inclined in the other direction are contracted. It will
move and the displacement will increase in the vertical direction. This displacement is
accumulated and becomes as shown by a point taU. 0 With this bias technology, it is possible to
obtain a vibrating piston which extends considerably ◇ This is a wide, narrowly spaced large
height wave EndPage: 7, this f / s shaped part of a large number of film wedges Need to form
around the periphery. Thermoforming Film, Inc., illustrated in FIG. 7, which is suitable for
forming a self-acting diaphragm having a high degree of mechanical compliance 0 The
application of a thermoforming transducer, using such a diaphragm Furthermore, it can be
applied to a speaker that reproduces the mid and low range with appropriate sound output. The
spherical ball 7 in the center is particularly effective in omnidirectional radiation of high
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frequency acoustic spectrum. There are various methods for forming the 0 electrode j, 7 on both
sides of the thermoformed film, especially conductive coating, Electroplating. Chemical silver
plating, vacuum lidding, chi-ying, cathode sputtering, etc. may be used. In some cases, the range
of the electrode is limited to a specific area of the thermoformed film to be used as a transducer.
To determine the effect of Thus, in this case, since the transformer effect, 0 simultaneously
obtained in the oppositely polarized electrode, obtained only in the electrically biased and coated
region, is in this way broken into three, so piezoelectric The effect can be measured by acting on
one of the three components JP [jlH55-20088 (8) O so thermoforming, electrical biasing 2 and
formation of the electrodes take place separately or in combination in the area concerned In
particular, the application of the electric field Ep is a means among many means, that is, electric
bias of the thermoformed film by corona discharge or ion implantation. The above-mentioned
transducer, which can be used as a standard method of electrification technology, is used as a
transmitter or detector for vibrational waves, acoustic pressure or ultrasound In the case of
receiving or sending out an AC voltage corresponding to the formation or detection of force, the
transducer device shown in the diagram is operated by being controlled by the pulse voltage
applied to the terminal aZ The forming film t is, for example, an O electrode 5.7 in the form of a
cylindrical protrusion formed by the apparatus of FIG. 6, a cylindrical wall held between λ
conductive rings w and sq. There is an O flexible thin film Hiroko that extends to the edge of the
part), and this closes the opening of the cylinder j, t.
Between the polymer wedge film j, t, 7 and the thin film 0, fluid is filled. The 0 hole IIA covering
the thin film 2 by the cover 3 having a hole 3 is in communication with the capillary stop to
communicate with the capillary stop, and the liquid is contained in the 7. The membrane width is
adapted to apply pressure. This pressure causes the cylinder j, A, 7 to be excited by the voltage
applied to the terminal Hiroki! , 乙, 収縮して発生発生このこの加圧メニスカスメニス
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メニスカスメニスカスはは: Menicus moves towards the free end of the capillary cup when
pressurized in this manner. As shown in Fig. 1, the end of one capillary tube is opened in the
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insulating carrier 7-port Qj and the bottom of the insulating cap 7-c 4cS has an electric contact 7
and the liquid in the same tube. When the conductive liquid is discharged from the capillary by
the control voltage applied to the terminals, the terminals connected to the conductive cover and
the contacts are closed. In this case, the conductive liquid is advantageous if it is mercury. If the
control voltage is lost, the thin film returns to the left, so that the space between the terminals 9
is opened. Thus, a device can be used to generate a jet of liquid instead of activating the device
by means of a line of O-electromechanical relays, where films of thermoforming polymers are
very suitable for displacement control. In this case, if a nozzle is provided at the end of one
capillary and a pulse is applied to the 0 terminal valve 5 connecting the supply pipe connected
between the nozzle and the thin film to the liquid storage tank, the liquid jet is discharged from
the nozzle Between the two subsequent pulses, the same amount of liquid is supplied from the
liquid reservoir and tank corresponding to the liquid that has been delivered 0 In this variant, the
film attachment may be omitted. The reason is that the liquid coming from the liquid reservoir is
a capillary cup, force / <-4! J, the thermoformed cylinder j, because it safely occupies the entire
volume defined by 4.7, if using an ink having appropriate fluidity as the O-filling liquid, the
apparatus can print on the support As described above, the piezoelectric effect is added to, for
example, the pyroelectric effect used for infrared detection, and a detector using this is shown in
FIG. Io. This device has a casing Ω, casing! At the bottom of the-there is a concave mirror S0through the incident infrared @ 5 sld polymer additive film EndPage: 8t, it is reflected at the
center F of the mirror S0. The center of the film is thermoformed and has a conical projection at
the point of the center F. Electrodes on the two faces of this projection! , 7, these electrodes
extend radially towards the periphery of the film 6.
electrode! The extension of 0 is in contact with the ring 1/0, the other electrode 7 is in contact
with the conductive casing j2 0 casing S2 and the ring si respectively the output terminal S4! Is
connected. The outer surface of the central projection is black so that it can effectively absorb
infrared rays collected by the mirror go. Local heating of the pre-biased central protrusion
provides voltage for terminal evaluation. Most of the 0 film 6 does not absorb incident infrared
radiation and the film t has very low thermal conductivity, so thermal conduction by heat
conduction In the absence of losses, the central projection is heated. The detector constructed in
this way has high sensitivity, low thermal inertia and also a good pointing. Also, the cost of
making this device is low, and the mirrors are well protected so as to avoid clouding. Small
projections can be analyzed more precisely in the infrared, as in the IJ'l Jx configuration. in this
case. Each projection may be associated with a pair of terminals respectively, and a signal may be
sent out by the mirror SO to transmit an element of an infrared image on which the film is
formed. Fig. 1/1 shows an infrared source displayed on a screen by barb analysis. Fig. 1/1 shows
an earphone with a thermoformed cap t, and electrodes on both sides of the cap! 0 Earpiece S6
with 7 = 7 is a perforated grid corresponding to the outer side of the cover 7t. If this is attached
to the ear j9, the air between the cover 1t and the tympanic membrane 6o The arrangement is
such that the quantity is reduced. The earphone further comprises a casing, whose flange is
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adapted to hold the case 7 ≦≦. Accordingly, the air between the cap t and the casing acts as
aeroelasticity to increase the suspension property of the cap t. However, this small hole t9 does
not adversely affect the sound 11JII of the earphone in the frequency range to be reproduced.
The electrodes j and 7 are displaced by applying a voltage to the terminal of the 0 line 57
connected to the line S7, and the ear canal volume is compressed. The frequency characteristics
of this earphone are relatively flat up to very high natural resonance frequencies. If the base Sε
is filled with glass wool, the resonance frequency will be lower and the response curve will be
improved. 場合 In the case of a mini-ch, a fist earphone, a thin film can be inserted into the ear
canal using a heat-formed protrusion as a thin film. In this case, the earpiece can be in the form
of a mouthpiece. Q The earphone thus configured has the advantages of being extremely
lightweight, easy to wear, and beautiful in appearance.
Fig. Is shows a microphone in which the diaphragm t is formed of a thermoformed film. The
diaphragm t has a small hole for balance held between the protective grease 41 and the casing
62, thereby maintaining the balance between the pressure inside and outside. In the casing 7A,
there is a separation wall portion t3, and in the center of the wall portion 43, there is an air vent
6. There is a first air at the end of the diala A wall 63 and a second air between the bottom of the
casing 62 and the wall 63. The electrodes j and 7 are connected to the output terminals ts on
both sides of the diaphragm t, respectively. The diaphragm t is vibrated by the incident sound
pressure formed between the diaphragm and the grid t /, and when the frequency is high, only
the first air is compressed because the sound pressure is not transmitted by the inertia of the
vent. Also, when the frequency is lowered, the vent tS vibrates and it is necessary to add its
inertia to the inertia of the diaphragm. In this case, of course, the air of the cylinder 2 is slightly
compressed. When the frequency is further lowered, the inertia of the vent t3 is negligible, the
first and second air 67.6 are mutually added, and the diaphragm is not excessively tightened and
not suddenly. The response curve of the microphone is expanded according to 67.65% of these
acoustic elements. If a friction material is used at the site of 1 vent Aj and the glass wool is filled
in the space t4I-, the resonance is lowered and the response is extremely good. Curve i line is
obtained. Figure 73 is a projectile? If the volume of O7m ′ ′ fi &, which is the inner surface of
tiger heat formation EndPage: 9 polymer t, is embedded in oQ Yop, it rapidly collapses the
volume of plasticized / denaturated polyvinylidene, energy of about 1 z This electrical energy is
sufficient to detonate the explosive including the electrical phase 72. The dome t is held between
the cap wall of the projectile 70 and the floating object 7 /. The cap and the floating object are
connected to the hood 72. When the projectile reaches the target, it is decelerated rapidly, so the
dome collapses and the gunpowder explodes. FIG. 744 shows a conventional type of
electroacoustic transducer, which uses a heat modified piezoelectric transducer according to the
present invention. 0 This transducer is configured for a dynamic speaker, This dynamic speaker
comprises a moving magnet 7 j having an annular air gap, a moving coil 7 j inserted in the air
gap, and a cone having a peripheral suspension fixed to a frame 76, 0 moving coil 7,!
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If an alternating current is applied to t (7) II, moving coil 75 moves in the direction of its axis,
and cone 77 で moves at its tip ◇ In the case of Japanese Unexamined Patent Publication 5520086 (10), It is necessary to arrange a moving coil at the center of the air gap using a filling
cloth-like spider to form a dipram having a wavelike portion at the center, but in the present
invention, a radiation cap is used instead of this spider. The corrugations and cap of the 0
diaphragm 6 using the film j of thermoformed polymer provided in the center are electrically
biased after the thermoforming process as shown in FIG. The 0 cap 7 connected to both sides of
the electrode and to the multiple output terminal m is connected to a large sword terminal (not
shown) and has electrodes on both sides. If a suspension formed of a thermoformed piezoelectric
transducer Φ diapar is used, the cap 71 acts as a toe ator integrated with the cone 77 so that
high frequency sound can be transmitted, while via the spider t, Since the frame 76 is in contact
with the moving coil, the movement of the moving coil can be applied as a corresponding voltage
between the terminals 10, so that the moving coil 7S is connected to the member feedback
amplifier Km and the voltage of the terminal to It can be used for vibration control of the cone
77. Therefore, a very uniform response curve can be obtained at low frequencies, and the nonlinearity that can be reduced when the displacement of the cone is large can be greatly reduced.
The embodiment of the first figure is an electromechanical transducer. -It is very easy to
fabricate a thermoforming piezoelectric transducer, which is advantageous if it is mechanically
combined with a sensor, so that it can be used to remove the electroluminescent motor 4c, 75. it
can. In this case, two thermoformed piezoelectric diaphragms are mechanically or pneumatically
or hydraulically connected to form an electrical signal transmission element having two pairs of
terminals. Such transfer elements can be used in the fabrication of filters and also for
transferring control voltages between the circuit points of the electrical circuit which have very
different potentials. This device is a very lightweight transfer system, and has the advantage of
being able to transfer the DC component of the signal, with a single thermoformed diaphragm
with 02 pairs of electrodes, making this type of transfer element fully formed. can do. FIG. 75 (a)
shows a transfer element having two pairs of electrodes 101.10iA. , 7 are provided with a
thermoforming polymer film t comprising λ adjacent protrusions.
electrode! , 7 is connected to terminal 103.10 IL 0 In this case, mechanical connection is made
through the lever 101 passed between the top of the λ thermoformed caps and the pivot. The
conversion ratio can be adjusted by moving Vivo y t / Q2 along the lever 10 /. FIG. 1j (b) shows a
transfer element with two input channels lOr, one 109 'output' channel / 10, in the casing lO #
three thermoformed projections 10! There are 0. 106.107 these projections, but the passage! It
defines a coupling volume r1 and other volumes r2, rl interconnected via evaluation. This
transducer is a linear combination of the voltage applied to the channel / (X, 109) at the output
channel. If the electrical bias is changed, the sum or difference of the λ voltages in this device
can be determined. it can. Fig. 1S Ca) aλ one heat formed cap ////// 12 for a low-pass filter with
a river EndPage: 10, electrode 7 pad ////, electrode ll has terminal / 14 = 117 Each is connected.
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キヤ・７プはそれぞれカバー１１４Ｌ、ｌｌ！ They are acoustically coupled to each other via
the main body 13. The alternate vents and cavities within the body provide a low pass function.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partial perspective view of a piezoelectric
transducer device according to the present invention, FIG. 2 is an explanatory view thereof, and
FIG. 3 shows a seventh step of the manufacturing method according to the present invention. A
cross sectional view, a first factor is a cross sectional view showing a step following FIG. 3 of the
manufacturing method according to the present invention, FIG. 3 is a cross sectional view
showing a modified example of the manufacturing method according to the present invention,
and FIG. FIG. 7 is a cross-sectional view showing another modification, and FIG. 7 is a nine
transformer with an annular corrugation caustic. 1 is a cross-sectional view showing a part of the
transducer element shown in FIG. 7 and its displacement due to the excitation voltage, and FIG.
Fig. Io is a cross-sectional view showing a transducer device that can be used as an infrared
detector, and Fig. 1/1 is a cross-sectional view showing a transducer device that can be used as
an earphone. Fig. 1J is a cross-sectional view showing a transducer device that can be used as a
microphone; Fig. 73 is a cross-sectional view showing a transducer / swafer device attached to an
ejection object for the purpose of ignition; FIG. 1a is a cross-sectional view showing a transformer
device attached to a dynamic speaker, and FIGS. 15 (a), (6) and (C) are cross-sectional views
showing various signal transmission elements. 7 ··· Electrode, t, / A · · · · Lum (projecting
member). // ... DC voltage source, 13 ... switch, 14A ... fJl-/! ; · · · · · / / 9. Lie-+) tongue, J ... heat
source, S ... Tanmuco ... bell jar, U ... valve 1. Ｊ（７・・・スタンプ、３１・・・。 Die, 32: ring
34c: insulating support 3S: bias voltage source 36. 37: terminal 31; ,? ? ・・・ Conductive
phosphor Hisauka ・・・ Fluid, Hiro 2. ・・・ Thin film, 4c3 ・・・ Cover, cup ... capillary.
Hiro 5 ... Cap, l! 4 ... hole ,? 7 · · · Contact point, l 1 · · · terminal, 50 · · · concave mirror, S 、, j5 · · ·
casing, S3 · · · infrared. S-Tearpiece 57: Cable 60: Ear canal 4 /: Protective grease 7; 6: Casing 63:
Wall portion 6s: Vent: 66 ... Small hole for balance, j? ... Small hole-70 ... Projectile, 7 / ... Floating
object, 73 ... Explosive, 7 waves ... Permanent magnet, 7 ... Moving coil, 76 ... Frame +77 ... Cone,
71 r: cap, 10: lever, 102: 7 7 10, 109: input channel, 10: output channel, / II, II λ: heat Forming
cap% // J ... main body.
Applicant's agent End 猪 EndPage: 11 浄浄変更ない t Page Page End End End 手続: tEndPage:
12 procedure amendment (formula) ■, display of the case Showa S patent application No.
142145 2 iln name N6t: tiger · The Hessian device and its manufacturing method 3 and the case
of the person making corrections Patent application Thomson-Seisef A clear document (no
change in the contents) of the specification. Clean drawings of drawings (no change in content)
EndPage: 15 Warning: Page Discontinuities
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