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Chief of Patent Office 1. Patent specification 1 patent, drawing 1 design 3 and applicant
application copy 1 patent 5 Inventors other than the above specifications ■ Japan Patent Office
■ Japanese Patent Publication 52-34762 Title of invention
Method of manufacturing ultrasonic transducer
3. Detailed Description of the Invention In the present invention, the resonant frequency f of the
matrix vibrator. r high and low. By providing a radiation tool in the image frequency band. An
object of the present invention is to produce an ultrasonic wave transmission tool t ′ ′ having
a wide band by causing resonance. Conventionally, as having a wide band characteristic, an
aluminum plate 22 is sandwiched between two piezoelectric ceramics 21 (hereinafter simply
referred to as ceramic) as disclosed in JP-A-49-77664 or National TechniCal Report Vol 2143
Junθ1975 pages 400-410. It is known as an ultrasonic wave transmitting and receiving tool
having a characteristic shown in FIG. 2 (a) and a longitudinal sectional view as shown in FIG. 2
(a). However, when the ultrasonic transmitting and receiving tool is manufactured by the method
of the present invention, when the center frequency currently most frequently used is relatively
low at 40 KH2, a defect of the ninth order occurs. 1. The ceramic is extremely fragile and can not
match the center frequency determined by the mechanical dimensions unless it is finished with a
thin thickness of 0.2%. For this reason, there is a high risk of breakage in the processing step,
and even extremely small pinholes (the problem does not occur if the thickness is 0.3% or more
even in the polarization processing step for activating the ceramic). In many cases, dielectric
breakdown occurs and the yield of the product is extremely reduced. 2. Even if the thickness of
the aluminum plate is made sufficiently thin, for example, to 0.1 or so, the diameter becomes
large at 15.0%, so handling in the manufacturing process is difficult and problems such as
deformation of the plate occur. Do. EndPage: To solve the problem of 此 <Conventional
research has been conducted by the present inventors (for example, page 93 to page 96 in
November 1977, ············ Electronic ceramic) The structure of the wide-band sensitivity
characteristics As a result of repeating examination of the ultrasonic wave transmitting and
receiving tool provided, the present invention has been provided. The details will be described
below. The impedance characteristics of the matrix vibrator in which the ceramic and the metal
plate are joined as shown in FIG. 1A as one embodiment of the present invention has resonance
points in the vicinity of 35KH and 176KH as shown by broken lines in FIG. The sensitivity
characteristic of the sound wave transmitting and receiving tool is extremely inferior as shown
by the broken line in FIG. C and is not practical. However, according to the method of
manufacturing the ultrasonic wave transmitting and receiving tool according to the present
invention, that is, a broad band can be obtained by providing the radiating member 13 in the
shape of a dotted line on the matrix vibrator consisting of the joined body of the ceramic 11 and
the metal plate 12. In order to obtain the sensitivity characteristics of Conventionally, there has
been one that conforms in appearance to such a shape, but the electrical characteristics of the
conventional one are all singles even after the radiation tool is placed near the resonant
frequency band of the matrix vibrator. None of the resonators having one resonance point and
one generating resonance on both sides of the high and low resonance frequencies of the mother
vibrator according to the present invention were none.
The sensitivity characteristic of the impedance characteristic difference of the integrated body in
which the trumpet shaped radiation tool 13 is mounted at a predetermined position on the
mother vibrator is as shown by a solid line in FIG. Specific examples of the present invention will
be described numerically. First, as a ceramic vibrator, one having a main component of pbo (Zro,
47 + T1o, h-701 +) was subjected to finish polarization treatment on a disc having a diameter of
9.5% and a thickness of 0.3% according to a predetermined method. On the other hand, as a
metal plate, aluminum hardness H grade is selected to form a disk having a diameter of 12.0%
and a thickness of 0.3%, and they are superposed and joined with a polymer resin to form a
matrix vibrator. Finally, an aluminum foil 4 was processed to a maximum diameter of 8.0% of the
radiator-like radiation tool (γ angle was 168 ° as much as possible, and it was joined to the
position where the amplitude of the above-mentioned mother vibrator is maximum). As a result,
the resonance characteristics in the effective frequency band of 40 ± 10 KHz targeted by the
ultrasonic wave transmitting and receiving device were as follows. "for" "resonance frequency of
the mother oscillator foa = anti-resonance frequency of the mother oscillator ftri = effective first
resonance frequency of the total oscillator ftart" "effective first resonance frequency of the total
oscillator ftr2 = effective first of the total oscillator The characteristics of the integrated oscillator
and the resonance of the integrated oscillator are as indicated by a dashed line and a solid line in
FIG. It is clear from this result that it is possible to obtain high sensitivity and wide band
characteristics as the sensitivity characteristics of the integrated transducer as an ultrasonic
transducer. According to the present invention, it is possible to make the metal plate 150% thick
and 300 * thicker than the conventional thickness in the same manner as the Miku disk. As a
result, the ceramic yield is high, and the handling of the metal plate has the effect of stabilizing
and improving the manufacture of the sea-ultrasonic transducer which is safe. In this description,
a disk is used as a mother disk for describing a ceramic as a matrix vibrator, but the positional
relationship between the metal plate 32 and the ceramic 31 is as shown in FIG. 3 in a polygon
plate other than a disk. On the contrary, as shown in the same figure, two ceramic plates 31 and
a ceramic plate or an alumina ceramic 4! The manufacturing method of the present invention is
included in the manufacturing method of the present invention, in which the mother vibrator is
used to form the mother vibrator, but the resonance points are generated on both sides of the
resonance frequency of the mother vibrator depending on the bonding of the radiation tool. The
ultrasonic transmitting and receiving tool manufactured by the present invention is industrially
valuable for use in the broad fields of related industries that require multiple channels.
4. Brief description of the drawings FIG. 1a shows an example of the ultrasonic transducer
according to the present invention in a longitudinal sectional view, 11 shows a ceramic 12 a
metal plate 13 is a radiation tool, c shows impedance characteristics and sensitivity
characteristics, respectively. Show. FIG. 2 shows an example of the prior art as described above,
and 21 is a ceramic plate 21 made of metal. FIG. 3 is a longitudinal sectional view showing
another example of the matrix vibrator of the present invention. Patent applicant 94 # Iea & 11
axis \ b 萼 1.11 in 7 a # # σ-· C 21st! 2I 穿 Ra EndPage: 3