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BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing an example of
applying the present invention to a microphone, FIG. 2 is a perspective view showing an
embodiment of the present invention, and FIG. 3 is an embodiment of FIG. FIG. 4 is a connection
diagram showing an electric circuit, and FIG. 4 is a perspective view showing another
embodiment of the present invention. 4 · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · ·
· · · · · · · · · · · · · · · · · · · semiconductor active element. fil 1 .... 51 1 開 51-51 723 (2) 3 F 32 囚 ffi 4
[X] 1 52-
DETAILED DESCRIPTION OF THE INVENTION The present invention is applied to, for example,
microphones, and is a suitable mechanical-electrical conversion device ai1: lIa. In general, a
mechanical-electrical conversion device used for microphones and the like is roughly classified
into an electromagnetic replacement type and an electrostatic type also called an electret
sotomicrophone. In either of these types of mechanical-electrical converter values, the movable
part and the fixed part are provided, alignment between them and alignment of the facing gap
are required, and assembly is troublesome. Also, in practical use (: If the positional relationship
between the movable part and the fixed part is upset, the characteristics will change and become
worse, Il + and J may become unusable, and mechanical operation-has a weak point is there. The
object of this invention is to obtain an electronic signal by means of the movable part alone, and
therefore do not require the adjustment of the mechanical parts of the movable part and the
fixed part. Therefore, it is easy to manufacture and mechanically 1i @ (m is also strong
mechanical-electric exchange! There is 4: offering a bribe. In this invention, the movable portion,
that is, the diaphragm itself is formed of a piezoelectric body, a semiconductor active element of
9 FIET straightness is deposited and formed on the surface of this piezoelectric body, and the
warpage signal generated by the diaphragm is obtained by this active element. It has the
advantage of amplifying and transmitting its gain to the amplifier C, so that the exit line can be
made to have a low impedance and stray capacitance I: has the advantage of being able to reduce
the influence by the diaphragm, and the diaphragm Since there is no need to provide a fixed part
opposite to the above, there is no need for its alignment, and it has an advantage of being easy to
manufacture. An embodiment of the present invention will be described in detail with reference
to the drawings. FIG. 1 shows the case (2) 1-1 applied to this invention microphone, and l is a
case constituting a microphone body. In this case] is the upper half 1a and the lower middle 1b
and (:: illusion l! At the screw portion 2, each other is integrated and integrated. 3 is a guard plate
in which a large number of holes are formed so that sound waves can be applied, 4 is a
diaphragm, 5 is a diaphragm 4C to give a suitable damping, for example, a damping material
such as urethane foam, 6 is a damping material 5 is a holding plate for holding the vibrating
plate 5 and the vibrating plate 4; In this invention, a flexible sheet such as polyvinylidene fluoride
(pvy) is used as the diaphragm 4. In this polyvinylidene fluoride (pvF), its crystal structure is
appropriately subjected to CjI: from the stretching force in the plane direction of the sheet-like
body to jIL: Direction I: Voltage is generated. Therefore, when a positive voltage is generated in
one direction, a negative voltage is generated on the back side O1 of the one in the tensile
direction (and a negative voltage is generated on the one side in the opposite direction for the
compressive force in the surface direction). A positive voltage is generated on the other side.
Therefore, when the imaging plate 4 vibrates due to a crack, a tensile force and a compressive
force in the surface direction are also generated, and eventually the front and back of the
imaging plate 4 It (: box! (A light signal of a frequency equal to the frequency of the 3I known
sound wave is generated. On the other hand, the peristaltic plate 41: is formed by depositing a
semiconductor active element such as FIT. How does its structure show IIE2 @ C? First, metal
layers 4a and 4b are deposited, for example, by vapor deposition C on both sides of a
piezoelectric plate 40 composed of a piezoelectric material, and a metal layer formed on one side
thereof, for example, a semiconductor layer on four sides in the example shown. 7 is to be
attached. In the illustrated example, FIT is attached, 8 indicates a semiconductor sea urchin, 9
indicates a source region, 10 indicates a drain region, 11 indicates a source electrode, 12
indicates a drain electrode, 13 indicates a gate insulating layer, 14 indicates a gate electrode It is.
The gate electrode & 4 is connected to the metal on the back side via gold through hole 315
from the gold plate 16 @ 4 bs: The drain electrode 12 is continued to the printed wiring
conductor 21 through the thin metal wire 17 and the source electrode & IX is formed on the wire
@ 4 Connect to the ship 118 with gold 119. Thin film resistor or thick film resistor for printed
wiring conductor 18! ! One end of 20 is contacted and connected to metal @ 4a through a
resistor h20. By continuing (4) in this manner, a connection source WtL is formed in the ground
source follower amplifier circuit shown in the third WJ. That is, if the negative electrode voltage
terminal of current # 1 is maintained on the metal II 4 formed on the slow-moving plate by
connecting the printed wiring conductor 21C [flow power source, for example, the positive
electrode voltage-terminal is connected to the source electrode 18 of 'IPm' 1'7 The printed wiring
conductor 186 lasting to: The signal generated by the moving plate 4 is amplified and
impedance-transformed by F! LTT and run. The printed wiring conductors 18 and 2] and the
metal layer 4a are formed in the lower half 1b of the case main body 1b; , Jl are connected to the
external-child T1 * TarT @ respectively. In this manner, the signal generated from the
piezoelectric element is amplified by the medium conductor active element 7 once and
impedance converted to transmit the signal from the microphone to the amplifier etc. Affected
1m <<, can amplify & send high quality signal. Moreover, according to this invention, since the
piezoelectric body itself acts as a slow moving plate, it can be assembled without performing the
operation of -9 ° 毅 (6), which is not easy to align the position with other fixed parts. It is
possible to provide a large amount of microphones at low cost.
$ 1411 shows another embodiment of the present invention. In this example, the semiconductor
seed 8 is directly attached to one surface of a piezoelectric moving plate 4 made of
polyvinylidene fluoride or the like, and the voltage generated on this surface is 81o. The source
electrode 11 and the drain electrode 12 are deposited on the front side of the semiconductor
wafer 8 by applying to the surface of the semiconductor wafer 8 via the gate insulator 111118
'consisting of Indicates In this way (in the case of two constitutions, the gate electrode is omitted:
蟇 6 蟇 & E'lJ5'-) 11mlilbm4 ° 1J1 The metal wire connecting the metal layer and the sulfonyl
can be omitted and compared with the structure of FIG. You can make it cheaper ■ I can. Also, it
has the advantage of improving confidence. As apparent from the five or more explanations,
according to this invention, the assembly is easy, and since there is no relationship with the fixed
part facing it and the peristaltic plate, a somewhat strong ms is added Also, there is no risk of
damage, and a mechanically strong microphone can be provided. Also, since the direct
impedance conversion is performed on the diaphragm, the influence of the stray capacitance can
be reduced as much as possible. Gang 5: In the machine of this invention-IIg! Although the case
where the four-digitation device is applied to the microphone has been described, it can be easily
understood that other sound input devices such as a bi-sfa-tub can be applied. Also, it is possible
to use acoustic equipment (: not limited to non-contact squeezable as well.