Patent Translate Powered by EPO and Google Notice This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate, complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or financial decisions, should not be based on machine-translation output. DESCRIPTION JPH07308317 [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flaw detection or intracavity ultrasonic diagnostic apparatus for obtaining and diagnosing ultrasonic tomographic images, and more particularly, to the structure of the tip of a transmitting and receiving ultrasonic probe. [0002] 2. Description of the Related Art In recent years, in addition to nondestructive inspection devices, ultrasonic probes have been rapidly growing in demand as medical ultrasonic diagnostic devices. A probe such as an ultrasonic endoscope radiates high-frequency acoustic vibration from an ultrasonic transducer into a living body, reflects the reflected ultrasonic wave back by the ultrasonic transducer, and has a slight interface characteristic. By processing different information depending on the difference, a cross-sectional image of the inside of a living body can be obtained. [0003] The ultrasonic transducer is roughly divided into a piezoelectric element, an acoustic matching layer, and a backing material. The ultrasonic transducer applies a high frequency voltage pulse to the piezoelectric element using the electrode formed on the surface of the piezoelectric element 03-05-2019 1 to cause the piezoelectric element to resonate and cause deformation rapidly to generate an ultrasonic pulse. It is. However, if the ultrasonic probe for blood vessels needs high frequency and small size, the shape of the piezoelectric element becomes small and the thickness becomes very thin, and the mounting method and connection method of the ultrasonic transducer are Since it has become very difficult, various inventions have been proposed. The applicant of the present invention also proposes the invention described in JP-A-5-300593. [0004] Here, a conventional ultrasonic probe, in particular, an ultrasonic probe for an ultrasonic diagnostic apparatus will be specifically described with reference to FIGS. 1 and 2. The acoustic matching layer 4 is provided on the ultrasonic radiation surface of the piezoelectric element 5 provided with the surface electrodes 7 and 8, and the back damping material 3 is provided on the non-emission surface of the piezoelectric element 5. After bonding such an ultrasonic transducer unit 25 to the conductive housing 6, the housing 6 and the lead wire are respectively connected by the conductive member 9 in order to use the surface electrodes 7 and 8 as input / output electrodes. After that, sealing and insulation are performed with an insulating resin as necessary. [0005] The housing 6 is connected to the flexible shaft 24 by silver solder 14, which enables the ultrasonic probe to be driven back and forth and in the rotational direction with respect to the axial direction of the flexible shaft 24. The ultrasonic probe thus produced is inserted into a cover called a tubular sheath 29 made of polyethylene or the like, and is used as an acoustic medium in the sheath, liquid paraffin, water, saline or gel. It is inserted in the body cavity in the state which filled up the substance etc. [0006] In addition, silver solder, solder, a conductive adhesive, etc. are used for the conductive member 9, and it is common to seal the periphery with the epoxy resin which is an insulating resin. However, as described above, with the miniaturization of the ultrasonic probe, the conductive adhesive has recently been used to prevent the piezoelectric element from being damaged by heat and to be excellent in the workability of the minute part. Is increasingly used. As the 03-05-2019 2 conductive adhesive, for example, a material obtained by adding silver powder as a conductive filler in a proportion of 50 parts by weight or more to 100 parts by weight of an epoxy resin as described in JP-A-62-161300, etc. It is common. [0007] On the other hand, as a recent technology, for example, in order to obtain slip at the time of contact between an ultrasonic probe and a human body and to ensure the chemical resistance of an acoustic lens, for example, in JP-A-4-181896, PTFE particles are used. The invention of coating an acoustic lens with a paint in which is dispersed in an organic binder has been proposed. [0008] However, in the invention disclosed in the above-mentioned Japanese Patent Application LaidOpen No. 62-161300, the tip of the ultrasonic probe is immersed in a liquid or gel-like acoustic medium for acoustic matching. It will be In the above-mentioned structure, while the ultrasonic probe is used, the acoustic medium directly or permeates the sealing layer of the epoxy resin, and the phenomenon of swelling the conductive adhesive occurs. [0009] In the conductive adhesive, conductive fillers (silver powder, copper powder, etc.) added to the adhesive come into contact with each other by the cure shrinkage of the adhesive made of an organic resin such as epoxy, so that the conductivity is developed. When the agent swells, the contact between the conductive fillers is cut off, the conductivity is lost, or the resistance increases and the characteristics deteriorate. In addition to the degradation of the conductive adhesive, the penetration of the acoustic medium also causes degradation of the back load material and the acoustic matching layer itself, for example, degradation such as peeling and swelling. [0010] On the other hand, among the acoustic media, physiological saline and ultrasonic gel generally 03-05-2019 3 used contain alkali ions, and therefore, the sealing layer of epoxy resin is transmitted, and ceramics such as alumina provided as an acoustic matching layer and piezoelectric are provided. There is also a problem of attacking ceramics such as PZT, lead titanate, PLZT, lead meta niobate and the like, which are elements, and electrodes, which may become a problem even when using, for example, solder which does not use a conductive adhesive. [0011] In the invention described in JP-A-4-181896, although a fluorine resin is coated on an acoustic lens, the acoustic medium penetrates also from a portion other than the coated acoustic lens, for example, an adhesive layer or the like. It will cause deterioration. Further, since the fluorocarbon resin in the above invention is composed of PTFE particles, a thermoplastic or thermosetting resin and a curing agent, it is practically possible if the remaining thermoplastic or thermosetting resin is hydrophilic even if the PTFE is hydrophobic. Also, the acoustic medium intrudes into the interior from this coat layer to cause characteristic deterioration. In addition, although the specific component of a fluorine resin is not described by the said gazette, the coating material currently distribute ¦ circulating as a commercial item does not solve this problem in all. [0012] An object of the present invention is to provide an ultrasonic probe for preventing the occurrence of characteristic deterioration due to the penetration of a liquid or gel acoustic medium into at least the exposed organic polymer material at the tip of the ultrasonic probe. It is to provide a tentacle. [0013] The object of claim 2 is to prevent the occurrence of characteristic deterioration due to the penetration of liquid or gel acoustic medium into the conductive adhesive connecting the piezoelectric element at the tip of the ultrasonic probe and the input / output electrode. Providing an ultrasound probe. [0014] The object of claim 3 is to provide an ultrasonic probe which prevents the characteristic deterioration of the ultrasonic probe due to high temperature curing exceeding the heat resistant 03-05-2019 4 tolerance of the ultrasonic probe. [0015] The present invention provides a piezoelectric element having ± electrodes on its surface, an acoustic matching layer in contact with the ultrasonic radiation surface of the piezoelectric element, and a back damping material in contact with the opposite emission surface of the piezoelectric element. And an input / output electrode for inputting / outputting current to / from the piezoelectric element, a conductive member connecting the piezoelectric element and the input / output electrode, an insulating resin for covering the conductive member, and a housing for housing the respective members. In the ultrasonic probe, an ultrasonic probe characterized in that at least the exposed portion of the tip of the ultrasonic probe is covered with a film of a hydrophobic organic inorganic material containing silicon oxide or a metal oxide. It is a tentacle. [0016] In addition, a piezoelectric element having ± electrodes on the surface, an acoustic matching layer in contact with the ultrasonic radiation surface of the piezoelectric element, a back damping material in contact with the opposite emission surface of the piezoelectric element, and an input / output electrode for inputting / outputting current to the piezoelectric element An ultrasonic probe comprising: a conductive adhesive for connecting the piezoelectric element and the input / output electrode; an insulating resin covering the conductive adhesive; and a housing for containing the respective members. The ultrasonic probe is characterized in that the piezoelectric element at the tip of the stylus, the input / output electrode and the conductive adhesive are coated with a film of a hydrophobic organic inorganic material containing silicon oxide or metal oxide. [0017] Furthermore, the hydrophobic organic inorganic material is an ultrasonic probe characterized by containing silicon oxide or a metal oxide and curing at a low temperature of 150 ° C. or less. [0018] The function of claim 1 is that the hydrophobic organic inorganic material covering the exposed organic polymer material at the tip of the ultrasonic probe protects the organic polymer material and does not transmit the acoustic medium or very much. Since it is difficult to transmit, it prevents deterioration of each part of the ultrasonic probe. 03-05-2019 5 [0019] Note that the hydrophobic organic inorganic material is not necessarily required to cover the entire tip in the form of a film, and a film is selectively formed on a portion that the acoustic medium does not want to touch directly or a portion that the acoustic medium easily intrudes. You may cover it. Therefore, it is effective to cover the exposed electrodes, the acoustic matching layer and the ceramic element made of ceramics, and the epoxy resin portion for sealing and acoustic matching. [0020] Also, the film thickness of the hydrophobic organic polymer material needs to be thick enough to prevent transmission of the acoustic medium sufficiently, and must be thin enough not to degrade the acoustic characteristics. Specifically, 0.5 μm or more is desirable to prevent transmission of the acoustic medium, and 1 μm or less is desirable to prevent deterioration of the acoustic characteristics. [0021] According to the second aspect of the present invention, in the case of using an acoustic medium having no corrosiveness to ceramics etc., a hydrophobic organic system covered with a conductive adhesive connecting the piezoelectric element at the tip of the ultrasonic probe and the input / output electrode The inorganic material protects the conductive adhesive itself and prevents or very hardly transmits the acoustic medium, thereby preventing a decrease in the conductivity due to swelling in the acoustic medium. In addition, since the membrane made of the hydrophobic organic polymer material is not rubbed with other members, such as a sheath, and the detachment or destruction due to peeling or friction does not occur, stable performance can be ensured. 03-05-2019 6 Furthermore, the film need not necessarily be covered, and instead of the sealing epoxy resin, it may be filled for the purpose of sealing. [0022] According to the function of claim 3, the low temperature curing hydrophobic organic inorganic material cures at a low temperature within the heat tolerance of the ultrasound probe, and the ultrasound probe functions normally. The hydrophobic organic inorganic material is at least an organosilicon compound (for example, a silyl isocyanate compound, a chlorosilane compound, a perhydropolysilazane etc.) or an organic metal compound excluding silicon (for example an aluminum alcoholate compound, an aluminum chelate compound and a cyclic compound An aluminum compound such as an aluminum oligomer, an alumina sol, a titanate compound, a Zr alcoholate compound, etc. can be obtained. [0023] However, in the solvent-soluble organic-based inorganic material, it is necessary that the solventsoluble organic inorganic material is soluble in the solvent for dilution and insoluble in the liquid or gel-like acoustic medium, and specifically water, physiology It must be insoluble in aqueous solutions such as saline and alcoholic solutions. When such conditions are satisfied, it is a liquid substance that is easy to form a film, and a hardened film is insoluble in the acoustic medium, and a highly durable film is obtained to prevent deterioration of the ultrasonic probe. become. [0024] Furthermore, it is desirable that the boiling point of the solvent is not too high, and it is desirable that drying be possible at 150 ° C. or less. 03-05-2019 7 Particularly desirable is that it can be dried at 100 ° C. or less. Also, the hydrophobic organic inorganic material has high moisture and water proof properties, but it can not always be difficult to transmit all acoustic media other than water, so it is transparent to acoustic media other than water. By using a hard-to-use material, it is possible to prevent the deterioration of the ultrasonic probe even if a desired acoustic medium other than water is used. The transmission amount of the acoustic medium of the hydrophobic organic inorganic material is preferably "0.05 g / cm 2 · 24 hours" or less under 20 ° C. environment, and particularly preferably "0.002 g / cm 2 · 24 hours" Or less. [0025] Embodiment 1 FIGS. 3 to 8 show the present embodiment, and FIGS. 3 and 4 are perspective views showing a method of producing the transducer portion of the ultrasonic probe, and FIGS. 5 and 6 show the produced vibration. FIGS. 7 and 8 are cross-sectional views of the ultrasonic probe. [0026] An acoustic matching layer 4 made of epoxy resin is applied to the side of the GND electrode 7 as shown in FIG. 3 to the piezoelectric element 5 having the GND electrode 7 and the + side electrode 8 formed on the surface. The back load material 1 is formed on the side of the positive electrode 8 to produce a laminate. Next, it is cut by a precision cutting machine as shown by the arrow 40 in FIG. 4 to produce one small transducer portion 25 as shown in FIG. In FIG. 5, only the back load material 1 made of an epoxy resin containing tungsten filler is used as the back damping material 3. In FIG. 6, the backing material 3 made of an epoxy resin containing tungsten filler and the backing material 2 made of an epoxy resin not containing tungsten for insulation are used as the backing braking material 3. [0027] As shown in FIG. 7, the vibrator 25 (hereinafter referred to as a transducer) is adhesively fixed on the insulating plate 19 fixed by an adhesive to the housing 6 in which the metal pipe is processed, and the thickness exposed on the side of the transducer 25 Wire connection is made from the meat electrode portion through the conductive resin 9. At this time, the GND electrode 7 03-05-2019 8 on the acoustic radiation surface side is once connected to the housing 6 with the conductive resin 9a, and the housing 6 pipe portion is connected to the peripheral wire 11 of the coaxial cable 13 passing through the flexible shaft 24 by the conductive resin 9b. It is done. On the other hand, the connection of the positive electrode 8 is connected to the coaxial cable signal line 10 by the conductive resin 9c on the back load material 1 in order to ensure the insulation with the housing 6, and the ultra-compact ultrasonic wave with the above configuration. The probe 18 was produced. [0028] The conductive resin portion 9 is sealed and protected by an epoxy resin 12. The housing 6 and the flexible shaft 24 are brazed with silver solder 14, and the housing 6 is made of corrosionresistant stainless steel electrolessly plated with nickel. The ultrasonic probe 18 thus produced is dipped (dipped) in a 3% ethanol diluted solution of an organosilicon compound, here, a silane coupling agent KBM-503 (Shin-Etsu Chemical Co., Ltd.) and pulled up. After that, heat treatment was performed at 100 ° C. for 1 hour to complete an ultrasonic probe 18 protected by a film 30 containing silicon oxide (see FIG. 8). [0029] Hereinafter, the operation of the present embodiment will be described. By applying the hydrophobic organic inorganic material film 30 to the entire surface of the ultrasonic probe 18, the acoustic medium is prevented from intruding into the ultrasonic probe 18. Therefore, the acoustic medium does not swell the conductive resins 9a to 9c, and the conductivity does not deteriorate. In addition, an ultrasonic gel in the acoustic medium, such as saline or a commonly used alkali ion, passes through the sealing layer of the epoxy resin to form a ceramic, such as alumina, which is the acoustic matching layer, or a piezoelectric element. There is no risk of attacking certain ceramics such as PZT, lead titanate, PLZT and lead metaniobate and electrodes. In addition, silicon oxide is chemically stable, and the acoustic characteristics of the coating material are low in acoustic impedance, so that the acoustic characteristics are not degraded. [0030] According to this example, it is possible to obtain a compact, durable, high-performance ultrasonic probe without deterioration of characteristics and materials due to an acoustic 03-05-2019 9 medium. In particular, since the entire ultrasonic probe is covered with a film of a hydrophobic organic inorganic material, as a result, it is more durable than the conventional one against sterilization by gas or vapor. [0031] The coating agent is not limited to the silane coupling agent used in this example, and may be a hydrophobic organic inorganic material, and an organic silicon compound such as a dilute solution of tetraisocyanate silane (Si (NCO) 4) in ethanol, Alkoxysilane (Si (OR) 4), and organic metal compounds: NT-L 2003 (Nissan Chemical Industries, Ltd.), Tonen Polysilazane PHP-2 (Tonen Co., Ltd.), Advanced Hard Coat (Tonen Co., Ltd.) ) Are also effective. In addition to the immersion method, spray spraying is also effective. [0032] Embodiment 2 FIG. 9 is a cross-sectional view of an ultrasonic probe showing this embodiment. The ultrasonic probe main body of this embodiment is manufactured in the same manner as in Embodiment 1 except that the acoustic matching layer 4 is made of an alumina flat plate and adhesively laminated on the GND electrode 7 with an epoxy resin (see FIG. 7) . In order to cover the epoxy-based sealing resin 12 of the ultrasonic probe 18 manufactured in this manner, 3 of the organosilicon compound here, silane coupling agent KBM-503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Apply a% ethanol diluted solvent with a brush. At this time, brush coating is performed with the acoustic matching layer 4 removed. Thereafter, the film is dried at 100 ° C. for 1 hour to form a film 30 of a hydrophobic organic inorganic material, and the ultrasonic probe 18 is completed. [0033] Hereinafter, the operation of the present embodiment will be described. The ultrasonic probe which is not coated with the hydrophobic organic inorganic material passes through the epoxy resin to which the acoustic medium is exposed and penetrates into the inside. However, in the present embodiment, the portion of the ultrasonic probe 18 where the epoxy-based encapsulation resin 12 is exposed is coated with a coating agent that constitutes a film containing silicon oxide with extremely low moisture permeability, thereby making it possible to manufacture an acoustic medium. Is prevented from invading the inside of the ultrasonic probe 03-05-2019 10 18. [0034] Therefore, in the case of using an acoustic medium other than saline and an ultrasonic gel, such as fluid paraffin, water, and other alcohol-based solutions, among the acoustic media, the acoustic medium can be used as the conductive resin 9a to c does not swell and the conductivity does not deteriorate. In addition, since the acoustic matching layer 4 which is an ultrasonic radiation surface is not coated, it is possible to form a thick film without considering the acoustic characteristics, and in particular, the long-term durability becomes high. In addition, the amount of the expensive coating agent can be reduced as compared to the case where the entire surface is coated. [0035] According to this embodiment, the same effect as that of the first embodiment can be obtained. Furthermore, higher durability can be obtained. It is also possible to reduce the price. [0036] As a matter of course, the hydrophobic organic inorganic material is not limited to the material used in the present embodiment, but the material used in the first embodiment can be applied, and the inherent action of each material is also the same. To be present. As the application method, in addition to brushing, application using a dispenser is also effective. [0037] [Embodiment 3] FIG. 10 is a cross-sectional view of an ultrasonic probe showing the present embodiment. In this embodiment, in the same ultrasonic probe as that of the first embodiment, the above-described embodiment is performed except that connection is made by solders 9'a to c instead of the conductive resins 9a to c and sealing by an epoxy resin is not performed. Example 1 Prepared in the same manner. The acoustic matching layer 4, the solders 9 ′ a to c, and the exposed surfaces of the surface electrodes 7 and 8 of the ultrasonic probe 18 manufactured in 03-05-2019 11 this manner and the input connected to the surface electrodes A 3% ethanol diluted solution of a silane coupling agent KBM-503 (Shin-Etsu Chemical Co., Ltd.) is dropped here so as to cover the exposed surface of the output electrode 10, in this case an organosilicon compound placed in a syringe. The coating is followed by drying at 100 ° C. for 1 hour to form a film 31 of a hydrophobic organic inorganic material, and the ultrasonic probe 18 is completed. [0038] Hereinafter, the operation of the present embodiment will be described. The acoustic medium contacts the electrode and the acoustic matching layer by coating the input / output electrode 10 or the acoustic matching layer 4 portion of the ultrasonic probe with the coating agent constituting the film containing silicon oxide with extremely low moisture permeability. To prevent that. Therefore, even when using an acoustic medium such as a saline solution or an ultrasonic gel that contains alkali ions, which are particularly excellent in acoustic characteristics, among the acoustic media, deterioration of the ultrasonic probe 18 is prevented without attacking each member. It will prevent. [0039] According to this example, it is possible to obtain a high-performance ultrasonic probe which is small in size, durable, and free from deterioration of properties and materials due to the acoustic medium. [0040] [Embodiment 4] FIG. 11 is a cross-sectional view of an ultrasonic probe showing this embodiment. This embodiment will be described using FIGS. 3 to 7 together. As shown in FIG. 3, the acoustic matching layer 4 made of epoxy resin is applied to the piezoelectric element 5, and the back load material 1 made of the epoxy resin containing tungsten filler is formed, and a laminate is manufactured. Then, the solid line portion 40 of FIG. 4 is cut with a precision cutting machine to produce one small transducer 25 as shown in FIGS. 5 and 6. [0041] 03-05-2019 12 Then, as shown in FIG. 7, the transducer 25 is adhesively fixed on the insulating plate 19 fixed with an adhesive to the housing 6 in which the metal pipe is processed, and the thick electrode portion exposed on the side surface portion of the transducer 25 is conductive. Wire connection via resin 9. At this time, the GND electrode 7 on the acoustic radiation surface side is once connected to the housing 6 with the conductive resin 9a, and is connected by the conductive resin 9b to the circumferential wire 11 of the coaxial cable 13 passing through the flexible shaft 24 in the housing 6 pipe part. It is done. On the other hand, the connection of the positive electrode 8 is connected to the coaxial cable signal line 10 by the conductive resin 9c on the back load material 1 in order to ensure insulation with the housing 6, and an ultra-compact The acoustic probe 18 was produced. [0042] After masking the housing 6 and the acoustic matching layer 4 with a masking tape, the ultrasonic probe 18 produced in this manner is masked with an organosilicon compound, here the silane coupling agent KBM-503 (Shin-Etsu Chemical Co., Ltd.) (Dipping) in a 3% ethanol diluted solution (made in Japan), and after pulling up, heat treatment is performed at 100 ° C. for 1 hour to complete an ultrasonic probe 18 protected by a film 30 containing silicon oxide. Thereafter, the masking tape was peeled off, and the remaining gap of the housing 6 was sealed and protected by the epoxy resin 12 (see FIG. 11). The housing 6 and the flexible shaft 24 are previously brazed with silver solder 14, and the housing 6 is made of corrosion-resistant stainless steel and subjected to electroless nickel plating. [0043] Hereinafter, the operation of the present embodiment will be described. The ultrasonic probe 18 is coated with a coating agent that constitutes a film containing silicon oxide with extremely low moisture permeability, thereby preventing the acoustic medium from intruding into the ultrasonic probe 18. Therefore, the acoustic medium does not swell the conductive resins 9a to 9c, and the conductivity does not deteriorate. Further, in the acoustic medium, a saline solution or an ultrasonic gel containing an alkali ion penetrates the sealing layer of the epoxy resin and corrodes ceramics such as PZT and PLZT which are piezoelectric elements, and an electrode. There is no need to lose it. In addition, since the upper surface of the coating film 30 is sealed with the epoxy resin 12, defects such as the coating hitting the sheath and falling off are prevented, and the durability is further improved. 03-05-2019 13 [0044] According to this embodiment, it is possible to obtain a high-performance ultrasonic probe which is small in size, particularly durable, without deterioration of characteristics and materials due to the acoustic medium. [0045] The coating film may be formed directly on a member that is not desired to be in contact with the acoustic medium, and for example, in the case of protecting the conductive resins 9a to 9c and the piezoelectric element 5, assembly without providing the acoustic matching layer 4; It is also possible to coat further and then to provide the acoustic matching layer 4. [0046] According to the first aspect of the present invention, at least the exposed organic polymer material at the tip of the ultrasonic probe is infiltrated / transmitted with a liquid or gel acoustic medium to cause characteristic deterioration. It was possible to provide an ultrasound probe to prevent. According to the second aspect of the present invention, the liquid or gel acoustic medium is prevented from penetrating and transmitting to the conductive adhesive connecting the piezoelectric element at the tip of the ultrasonic probe and the input / output electrodes, thereby preventing the characteristic deterioration. Provided an ultrasonic probe. The effect of Claim 3 was able to provide the ultrasound probe which prevents the characteristic degradation of the ultrasound probe by high temperature hardening exceeding the heat-resistant tolerance ¦ permissible̲range of an ultrasound probe. 03-05-2019 14
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