JP2005294614

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DESCRIPTION JP2005294614
The present invention provides an apparatus for improving safety and work efficiency by
allowing a warning sound and a notification sound to be heard only at the work place in a clean
transport work place. In a clean room for manufacturing semiconductor integrated circuits and
the like, mobile equipment such as an unmanned transfer carriage 5 and a worker 6 are closely
mixed, and the worker 6 is limited to a specific space area where there is a risk of contact with
the mobile equipment. By emitting an alarm sound or a notification sound using an ultrasonic
speaker, superdirective speaker 10 or the like, only a person who needs such information is
notified of the alarm and the notification by voice. As a result, there is no leakage of voice to the
worker 6 outside the specific space area, unnecessary confusion caused by confusion of alarm
and notification sound can be prevented, and moreover, contribution to elimination of noise
cause can be contributed. [Selected figure] Figure 1
Alarm and notification device
[0001]
The present invention relates to securing safety of an operator for a movable device such as an
unmanned transfer carriage used in a manufacturing plant of a semiconductor integrated circuit,
a liquid crystal display panel, a plasma display and the like and improving work efficiency.
[0002]
Wafers in the process of being manufactured in a semiconductor manufacturing plant are stored
in a wafer carrier, FOUP (Front Opening Unified Pod), and OHT (Over head Hoist Transport)
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transport carriage that holds the FOUP in a suspended state from a track laid on a ceiling It is
transported between manufacturing apparatuses by a transport means such as an AGV
(Automatic Guided Vehicle) transport carriage which transports on the floor and OHS (Over Head
Shuttle) which travels on a track laid on a ceiling.
Among the three conveying means, recently, an OHT conveying carriage, particularly a branched
OHT having a branch track, greatly contributes to the improvement of the conveying efficiency,
and has been widely used as the mainstream of the conveying device.
[0003]
In the example of the OHT transfer system in a semiconductor production line using a 300 mm
wafer, the wafer is stored in the FOUP and transferred between manufacturing apparatuses. The
loading port for this FOUP and the unloading port are provided on the front of each
manufacturing device, and the OHT transport carriage supplies the loading port of the
manufacturing device with the FOUP in which the wafer before processing is stored, and after
processing The FOUP in which the wafers are stored is collected from the unloading port, and
transported to the manufacturing apparatus or stocker of the next process. Generally, since the
cost of maintaining a clean environment is high in a clean room, the apparatus and equipment
are stored and disposed at a high density as compared with a general factory. However, the
safety of the workers working in this environment needs to be sufficiently ensured, and special
safety measures are required for devices that are likely to move close to the workers, such as
unmanned transport carriages. It is assumed. In addition, even if the semiconductor production
line is automated, there are many parts in which an operator intervenes in confirmation of
automation, maintenance of manufacturing equipment, etc., and improvement in work efficiency
is also a major issue.
[0004]
The current safety measures will be described with reference to FIG. FIG. 7 shows a
manufacturing line of a semiconductor manufacturing plant adopting an OHT transfer system.
Four manufacturing devices 22-a, 22-b, 22-c, 22-d are installed, and each manufacturing device
has a port IN port 7 for taking in and taking out the FOUP 18 and an OUT port 8. Further, an
OHT traveling rail 17 is installed on the ceiling, and the OHT transport carriages 5-a and 5-b
travel in a manner of being suspended from the rail 17. FIG. 7 shows a situation in which the
OHT transport carriage 5-a takes out the FOUP from the OUT port 8-a, and shows a situation in
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which the transport carriage 5-b unloads the FOUP from the IN port 7-c. ing.
[0005]
Speakers and a buzzer are attached to the transport carriages 5-a and 5-b, and when the
transport carriage approaches the OUT port 8-a or the IN port 7-c, or when the FOUP is taken
out and unloaded. At times, a warning is issued from a speaker or a buzzer to notify a worker of a
danger and ensure safety. However, because the distance between the manufacturing equipment
installed in the clean room is short and the alarm from this speaker or buzzer can be heard from
all directions, the worker of OUT port 8-a can use IN port 7-c An alarm can be heard, and
conversely, an operator at the IN port 7-c can also hear an alarm at the OUT port 8-a. In this way,
the warning which is heard from all directions is often not only the difference between the
workers, but also the warning may be missed, and the present situation is that the warning is not
an accurate warning from the viewpoint of safety. In addition, alarms that can be heard from
many directions are loud and cause a decrease in work efficiency and an operator's erroneous
operation.
[0006]
The above problems can be solved by using a superdirective speaker that can only hear a limited
specific range by preventing the speaker from being heard from all directions. An example using
this superdirective speaker is shown in FIG. In this example, super-directional speakers are
installed at the entrance of the public restroom to distinguish between men's restrooms and
women's restrooms. Also, although not shown in the drawings, there are also cases where
superdirective speakers are installed at the level crossing to emit an alarm sound only to the
crossing person, and the residents around the level crossing can not hear the alarm sound.
[0007]
JP, 2002-354572, A JP, 2003-47096, A
[0008]
As described above, in the clean room, manufacturing equipment is arranged at high density
because of high construction cost and maintenance cost of the building.
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Therefore, when an ordinary speaker or buzzer is used to warn or notify the worker, the alert or
notification to a specific work place for the worker also leaks to the adjacent work place because
the directivity of the speaker is wide. It will Therefore, due to the extra warning and notification
that leaks, there is a safety problem due to the omission of the original danger signal or the
occasion where the signal sound is turned off because of loudness, and the work efficiency is also
reduced. .
[0009]
The present invention has been made in view of the above problems, and it is a superdirective
speaker or directivity having extremely sharp directivity in a specific work place for carrying in
and out of FOUP etc. of a production site by clean transportation. By installing a narrow, narrowdirectional speaker so that you do not hear any alarms or reports from the work area next to it,
and by listening to only the alarms and reports of the area where the workers are, Avoid dangers
due to contact between the equipment and workers due to descent etc. and improve safety, and
at the same time, noise leaking from an adjacent work place (In this case, warnings and
notifications from places other than where the workers are It aims at the improvement of work
efficiency by eliminating noise).
[0010]
In order to achieve the above object, the present invention proposes the following means.
That is, according to the first aspect of the present invention, in the semiconductor and liquid
crystal display device production factory, the movable unit such as a ceiling transfer unit
traveling on the track and the movable unit in the work place where the operator coexists An
ultrasonic speaker, a superdirective speaker with sharp acoustic directivity, a narrow directional
speaker with narrow acoustic directivity, or a workplace with a limited specific space area where
there is a possibility of interference with a device. Further, it is characterized in that the alarm
and notification device emits an audible sound in such a combination so that only a worker at a
specific work place can hear the audible sound from the speaker. As a result, it is possible to
prevent noise leaking from the adjacent work place adjacent thereto, and to ensure safety and
improve work efficiency by allowing the worker to hear only a warning or a notification for a
specific work place.
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[0011]
The invention described in claim 2 is the above-mentioned ultrasonic speaker, a superdirective
speaker with sharp directivity of sound, a speaker device using a narrow directional speaker with
narrow directivity of sound, or a combination thereof. To emit an audible sound by detecting the
presence of the worker in a limited specific space area where the worker and the movable device
may interfere with an optical or ultrasonic sensor. Alarm and notification device.
[0012]
As a result, the voice of the alarm or notification from the speaker for a specific work place of the
manufacturing apparatus that carries in and out the FOUP etc. detects the worker and operates.
Therefore, when there are no workers, there are no safety problems, and no warning such as a
warning for safety or a notification of work instruction is required, so no useless warning or
notification is emitted, and the voice of the speaker However, there is no problem of leakage next
to even a little, and efficient operation can be achieved.
[0013]
The invention described in claim 3 is the speaker device according to claim 1, wherein the timbre
or sound of the audible sound radiated to a certain specific space area where the worker and the
movable device may interfere with each other is Because it is different from the tone or sound of
other audible sound radiating to another specific space area, even if the sound leaks to an
adjacent specific work place, the tone or sound of the leaked audible sound causes the other area
to There is no confusion as it is identified as speech.
[0014]
As a result, even with the same instruction, the voice such as timbre is changed, such as adjacent
work place and, for example, male voice and female voice or continuous bell sound and
intermittent bell sound. Even if the sound of the speaker leaks a little from the next work place, it
is possible to prevent the worker from making a false hearing and performing an erroneous
work.
[0015]
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The invention described in claim 4 is the speaker device according to claim 1, which relates to
the type of safety in the limited specific space area where the worker and the movable device
may interfere, and the work content. It emits an audible sound of the adapted specific tone or
sound.
Therefore, even if the sound of a specific work area adjacent to the specific space area work
place is leaked, the operator can unambiguously understand the work content from the timbre or
the sound, so that confusion does not occur.
[0016]
As a result, for example, when the loading platform of an unmanned transfer vehicle of OHT falls
or when the loading platform rises, the loudness and loud voice are emitted from the speaker and
the timbre is also adjacent because the risk is high. By changing the place of work, it is possible
to draw special attention for particularly high risk cases, and to secure safety depending on the
grade of the risk.
At the same time. It is also possible to reduce the influence of voice leakage with a specific work
place adjacent to it, which enables safer work. In addition, since the sound which should be
leaked from the adjacent work place which becomes noise is also different from the sound of the
timbre of the work place, it becomes possible to improve the work efficiency without concern. At
the same time, the notification from the speaker can be instructed even by the work instruction
by voice unlike the buzzer and the like, so that the work efficiency can be improved.
[0017]
The invention described in claim 5 is the speaker device according to claim 1, which comprises at
least one of an ultrasonic speaker, a superdirective speaker, and a narrow directional speaker,
and an optical display, and an audible sound Radiation and light display are performed
simultaneously or separately.
[0018]
Thereby, not only the sound from the speaker coming from the ear but also the sound from the
eye can improve the safety by the signal coming from the eye.
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Depending on the degree of danger and importance of the light indication, for example, red may
be used or blinking may be used if the degree of danger is high, or green may be used if the
degree of danger is low. There is also a method of indicating a danger by displaying a light such
as the approach of the transport truck prior to the sound of the speaker.
[0019]
The invention described in claim 6 is characterized in that a speaker arrangement system that
produces directivity effect is adopted by arranging a plurality of identical speakers
concentrically. By configuring the speakers with a plurality of speakers, a sharp directional voice
is emitted to a limited work place while obtaining superdirectivity equivalent to that of a largeaperture speaker. Thus, while narrowing down the range of audio, the speaker's audio can only
reach a specific work place.
[0020]
The invention described in claim 7 is the alarm and notification device according to any one of
claims 1 to 6, and when a mobile such as an unmanned transport carriage is present at a work
site, a speaker is installed on the mobile If there is a device fixedly installed at the work site,
install a speaker on this fixed device. That is, depending on the situation, the installation location
of the speaker device may be either the mobile unit or the fixed device, and may be installed on
both.
[0021]
As a result, the speaker can be attached to both the mobile unit side and the manufacturing
apparatus side, or to both the mobile unit side and the manufacturing apparatus side, and the
degree of freedom in mounting is enhanced. For example, an alarm from the manufacturing
apparatus before approaching the OHT transport carriage While knowing the approach of the
transport carriage, it is possible to secure higher security and at the same time improve working
efficiency.
[0022]
According to the present invention, it is safe to eliminate the influence of voice leakage from the
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adjacent work place at the loading and unloading work place to the manufacturing apparatus,
such as transfer of FOUP in clean transportation using OHT etc. At the same time, it is possible to
eliminate the noise from the adjacent work place and to improve the work efficiency by the work
instruction by the sound from the speaker.
[0023]
Hereinafter, the best mode for carrying out the present invention will be described based on
FIGS. 1 to 6 with reference to the drawings.
FIG. 1 is a perspective view showing an OHT transfer system and a worker 6, which is an OHT
transfer system using an unmanned transfer carriage applied to a semiconductor integrated
circuit and a liquid crystal display panel manufacturing plant.
The OHT transport carriage 5 travels by suspending a load on a rail 17 attached to a ceiling. The
OHT truck 5 travels to the target work place in response to a command from the system
controller, but in the middle of a branch site, OHT transports either one of the left and right
branch guides (not shown) laid on the rail 17 The route is selected by the method of selecting by
the branch roller of the carriage 5.
[0024]
The OHT transport carriage 5 is composed of a positioning machine 12, an elevator 13, a
suspension belt 14, a gripping machine 15, and a gripper 16. The OHT transport carriage 5 is
aligned by the positioning machine 12, and the gripper 13 raises or lowers the gripping machine
15 with or without gripping the FOUP with the gripper 16 by raising or lowering the suspension
belt 14 with the elevator 13 . The OHT transport system is provided with the in-port 7 and the
out-port 8 of the FOUP. The in-port 7 and the out-port 8 are used as relay points to take in and
take out the substrate in the manufacturing process inside the semiconductor manufacturing
apparatus. Is done.
[0025]
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Specifically, the OHT transport carriage 5 transfers the FOUP after arriving at the destination. For
example, when the OHT transport carriage 5, which has been traveling by gripping the FOUP
flange by the gripper 16, lowers the mounted FOUP to the IN port 7 at the destination, the OHT
transport carriage 5 first stops arriving at the transfer position. Then, positioning is accurately
performed by the positioning machine 12, and then the suspension belt 14 wound up to the top
is sequentially taken down and the FOUP is lowered to the IN port 7. When the bottom of the
FOUP contacts the port surface, a limit switch (not shown) attached to the port base is actuated.
After the FOUP landing is detected by the limit switch of the port stand, the gripper 15 releases
the gripper 16 and places the FOUP on the IN port 7. After completion of the FOUP unloading
operation, the OHT transport carriage 5 rolls up the suspension belt 14, and when the gripper 15
reaches the top, it moves to the next destination according to the next command. The OHT
transport carriage 5 operates in the same manner when FOUP is taken out from the OUT port 8.
[0026]
The outline of the FOUP transfer operation by the OHT transfer system has been described
above. Next, the alarm and notification device according to the present invention will be
described. FIG. 1 shows a first embodiment of the present invention. A superdirective speaker 10,
an operator detection sensor 11, and an optical indicator 19 are attached to an elevator 13 of the
OHT transport carriage 5 in the OHT transport carriage 5. The worker detection sensor 11
detects the worker 6, and issues an alarm or a notification from the superdirective speaker.
Therefore, when there is no worker, no useless warning or notification is given, and the problem
of an invalid speaker sound leaking to the next work place does not occur, and efficient operation
can be achieved.
[0027]
Also, the timbre of the voice from the superdirective speaker is different from that of the other
work places, and is made the timbre of the voice specific to this work place. For example, a male
voice and a female voice, or a continuous sound and an intermittent sound in the case of a buzzer
sound, even if the same work, the timbre of the voice of the superdirective speaker at each work
place Has changed. Therefore, even if the sound of the superdirective speaker leaks from the
next work place, there is no fear that the operator may make a mistake and it is possible to surely
prevent an erroneous work.
[0028]
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In addition, the timbre of the voice from the superdirective speaker is also changed depending on
the type of safety and the work content. Specifically, when the gripping machine 15 of the OHT
transport carriage 5 is lowered or when the gripping machine 15 is elevated, the dangerous
degree is high, so a loud sound is generated and the timbre is adjacent to the adjacent one. The
place of work is changing. In the case of the normal work instruction, the work instruction is
given by the normal voice so as not to be noisy to the worker. In this way, the work efficiency can
be improved by being able to concentrate on the work while enabling safer work without
worrying about unnecessary alarms and reports from the work place adjacent to the adjacent
work place. Do.
[0029]
An optical indicator 19 is attached to the gripper 15 of the OHT transport carriage so that an
alarm can be issued together with a superdirective speaker. For example, when the risk of
lowering or rising the gripper 15 is high, the red light blinks, and when the OHT transport
carriage is in a stopped state, the green light comes on when the gripper 16 does not grip
anything. .
[0030]
FIG. 3 shows a second embodiment. The main difference from the first embodiment is the
mounting position of the superdirective speaker, in which the superdirective speaker is mounted
on the elevator cab 13 in the first embodiment, while the rail in the second embodiment.
Mounted on top. That is, the superdirective speaker of the second embodiment is attached to the
position of the rail which is located above the work place where the FOUP is transferred, and the
worker detection sensor 11 is attached to the OHT transport carriage. As a result, an alarm can
be issued before the OHT transport carriage 5 approaches, and it is also possible to issue a work
instruction when the OHT transport carriage 5 is not at the work place, so that the working
efficiency can be improved. As an example of this application, a superdirective speaker can be
attached to the IN port 7 or the OUT port 8 of the work place (not shown) and can be used for
the same purpose as described above.
[0031]
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FIG. 4 shows a third embodiment. The main differences from the first and second embodiments
are the mounting position of the superdirective speaker and the number of speakers, and in the
third embodiment, four superdirective speakers 20-a, 20-b and 20-c. , 20-c are attached to the
four corners of the elevator assembly 13. Further, four superdirective speakers are arranged at
concentric positions as shown in FIG. 6, and a directivity effect is produced by arranging a
plurality of identical speakers concentrically. That is, by configuring the directivity, which can not
be obtained with a single small-sized speaker, with a plurality of small-sized speakers, it is
possible to obtain superdirectivity equivalent to that of a large-aperture speaker while limiting
the specific working place. While securing the necessary volume, the speaker radiation is
prevented from leaking to other adjacent work places by throttling and radiating the sound
radiation range.
[0032]
FIG. 5 shows a fourth embodiment. Although the concept of the number of superdirective
speakers installed and the method of arrangement are the same as in the third embodiment, the
installation position of the superdirective speaker is different from that of the fourth
embodiment. That is, in the fourth embodiment, four superdirective speakers 20-a, 20-b, 20-c
and 20-c are concentrically mounted on the side surface of the grip 15. Also in this case,
directivity is obtained by arranging a plurality of identical speakers concentrically as in the third
embodiment. That is, by configuring the directivity, which can not be obtained with a single
small-sized speaker, with a plurality of small-sized speakers, it is possible to obtain
superdirectivity equivalent to that of a large-aperture speaker while limiting the specific working
place. By radiating the sound while securing the necessary volume, the sound radiation range is
narrowed to prevent the sound of the speaker from leaking to other adjacent work places. Also,
by attaching the super-directional speaker to the holding machine 15 that moves up and down,
as the holding machine 15 that is the movable part of the transport carriage gets closer to the
operator, the volume is perceived as louder for the operator It also has the effect of reducing the
leakage of voice to the surroundings.
[0033]
Although the four embodiments have been described above, in each embodiment, a narrow
directivity speaker having a narrow directivity, which is a substitute for the superdirective
speaker or the superdirective speaker shown in FIG. 2, is used. The horn speaker 40 is a narrow
directivity speaker instead of a superdirective speaker, which narrows down the sound emitted
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from the sound source 29 with a horn shape although there is a slight sound leakage. The
superdirective speaker 41 is a superdirective speaker that reflects the sound emitted from the
sound source 29 to the back surface and narrows the sound wave. The narrow directivity
speaker 42 is a narrow directivity speaker using two sound sources and utilizing superposition
and cancellation of the phase of the sound wave, and in the range where the phase of the sound
wave is superimposed, the sound is strong and in the range where the phase of the sound wave is
cancelled. It uses the nature of sound muting. Also, although not shown here, an ultrasonic
speaker that exhibits high directivity by modulating sound with ultrasonic waves is also used.
Others In the present invention, any type of loudspeaker having directivity other than the above
can be used, and an optimal loudspeaker system is selected from the degree of directivity, sound
quality, volume, loudspeaker size, cost and the like.
[0034]
Alarm sound and work instruction voice in a work area where there are multiple work places
where there are multiple work places in a single work area where workers and movable
equipments are mixed and workers come into contact with the movable equipment to cause an
accident. If you want to ensure the safety of workers using
[0035]
It is a perspective view which shows the OHT conveyance trolley and working port concerning
the example of the present invention.
It is a figure which shows the principle of the super directivity speaker based on the Example of
this invention, and a narrow directivity speaker. It is a figure which installed the super-directional
speaker which concerns on the Example of this invention in the rail of OHT conveyance system.
It is the perspective view which attached four super-directional speakers based on the Example of
this invention to the elevator of the OHT conveyance trolley. It is the perspective view which
attached four super-directional speakers which concern on the Example of this invention to the
holding machine of OHT conveyance trolley. It is a figure which shows the mode from the lower
surface which attached four super-directional speakers which concern on the Example of this
invention to the holding machine of an OHT conveyance trolley. It is a figure which shows the
mode of the OHT conveyance trolley of a clean conveyance system concerning an example of the
present invention, a manufacture device, and a work place. It is a figure which shows the example
which used the super-directional speaker for the entrance of the toilet.
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Explanation of sign
[0036]
DESCRIPTION OF SYMBOLS 5 OHT conveyance trolley 6 Worker 7 IN port 8 OUT port 9 Sound
wave audible area 10 Super directivity speaker 10 11 Worker detection sensor 13 Lifting
machine 15 Gripping machine 16 Gripper 17 Rail 18 FOUP 20 Directional speaker 20 21
Speaker 21 22 Semiconductor manufacturing equipment 29 Sound source 40 Horn speaker 41
Super directivity speaker 41 42 Narrow directivity speaker
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