JP2004179944

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DESCRIPTION JP2004179944
An ultrasonic vibration radiator having a large vibration emission surface is provided. SOLUTION:
A plurality of resonance body members 1 having the same shape are provided, and mutually
adjacent resonance body members are coupled with a predetermined gap by a coupling member
2 provided at a node position. It was a sonic vibration radiator. In the mutually adjacent
resonator members, when one of the resonator members extends, the other member is
contracted so as to resonate in a so-called reverse phase, so in the resonator members adjacent
to each other, they have the same displacement and If ultrasonic vibration is applied to the
vibration input surface 8 of each of the resonator members so as to resonate in the opposite
phase, the vibration emission surfaces 7 of the respective resonator members vibrate at the same
displacement. As a result, it is possible to provide an ultrasonic vibration radiator having a large
vibration emission surface 7 composed of a plurality of resonator members 1. [Selected figure]
Figure 1
Ultrasonic vibration radiator
TECHNICAL FIELD [0001] The present invention relates to an ultrasonic vibration radiator used
in an apparatus utilizing ultrasonic vibration such as vibration table, horn type washing,
ultrasonic dispersion, etc. The present invention relates to an ultrasonic vibration radiator having
a vibration emission surface larger than 1⁄4 wavelength of the inputted ultrasonic vibration.
[0002] Conventionally, using an ultrasonic transducer and a resonator member (horn) connected
to the ultrasonic transducer, a work or vibration placed on the vibration radiation surface of the
resonator member There is known an ultrasonic processing apparatus that vibrates a tool
connected to a radiation surface, thereby performing ultrasonic processing. It is well known that
when the transverse dimension of a resonator member resonating at 1⁄2 wavelength in the
longitudinal direction becomes larger than 1⁄4 wavelength of longitudinal vibration, the vibration
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amplitude distribution on the vibrating radiation surface becomes uneven. Here, the transverse
dimension of the resonator member means the dimension of a cross section parallel to the
vibration radiation surface in the resonator member, and for example, when the cross section is a
square, the length of one side thereof. However, in ultrasonic application processing and highintensity ultrasonic application fields in liquid, etc., a liquid-tight structure is used to protect the
ultrasonic transducer, having a vibration emission surface whose transverse dimension is larger
than 1/4 wavelength of longitudinal vibration. There is a case where an ultrasonic vibration
radiator (a structure composed of a plurality of resonator members) is required. Further,
depending on the application, high precision dimensions and high rigidity, large vibration
amplitude, and uniformity of the amplitude distribution of the vibration radiation surface may be
required. For example, in plastic welding, welding is performed using a vibration radiator that
has a transverse dimension, that is, a dimension of one side of a square vibration radiation
surface, which is larger than a quarter wavelength of longitudinal vibration. When the transverse
dimension is larger than 1⁄4 wavelength of the longitudinal vibration, the speed of sound
propagating through the vibrating radiator disperses, and the section of the cross section where
the speed of sound is faster and slower appears. The problem arises that it will not be uniform.
Therefore, in the case of using a vibrating radiator whose crosswise dimension is larger than a
quarter wavelength of longitudinal vibration in plastic welding, it is disclosed, for example, in
Patent Document 1 in order to equalize the vibration amplitude of the vibration radiation surface.
Vibration radiation having a longitudinally slotted structure so that a resonator member having a
transverse dimension of 1⁄4 wavelength or less is connected at both ends of the longitudinal
vibration input end and the radiation end. I have a body. With such a configuration, this vibrating
radiator is considered to satisfy the above-mentioned requirements such as high-precision size
and rigidity, large vibration amplitude, and uniformity of the amplitude distribution of the
vibration radiation surface.
[Patent Document 1] Japanese Patent Application Laid-Open No. 10-315334 Problem to be
Solved by the Invention In the case disclosed in Patent Document 1, the respective resonator
members (unit horns) are separated from each other. Therefore, there is no interaction between
the resonator members, but rather, the resonator members are arranged in parallel by devising
the support mechanism by isolating the vibrations of the resonator members with each other by
means of an isolator. Has become a vibrating radiator. However, the vibration radiator disclosed
in this patent document 1 is not a full circumferential support because the flanges are attached
to both sides, and a slot-like window is additionally provided, so that liquid leaks from this
window, etc. as a vibration radiator Does not correspond to the liquid tight structure. The present
invention has been made to solve the problems of the prior art described above, and it is an
object of the present invention to provide an ultrasonic vibration radiator having a large
vibration emission surface. Another object of the present invention is to provide an ultrasonic
vibration emitter that is applicable to applications requiring liquid tightness. Another object of
the present invention is to provide a highly accurate and highly rigid ultrasonic vibration
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radiator. Another object of the present invention is to provide an ultrasonic vibration radiator
which has a uniform vibration amplitude distribution on the vibration radiation surface and is
capable of high amplitude vibration. In the resonator member resonating at a half wavelength in
the longitudinal direction, when the resonator member extends in the longitudinal direction by
vibration, the node position at the center in the longitudinal direction of the resonator member is
horizontal. When the resonator member is contracted in the longitudinal direction, the node
positions are in the relationship of extending in the lateral direction. The applicant has found that
when two resonator members resonating at the same half wavelength in the longitudinal
direction are coupled at the node position, the other resonator member shrinks when one of the
resonator members extends. We came to find resonance in antiphase. Then, based on this
knowledge, in this invention, in order to achieve the objective mentioned above, it decided to
provide the ultrasonic vibration radiator which has the following structures. That is, according to
the first aspect of the present invention, the plurality of resonator members having the same
shape are coupled, and the adjacent resonator members are coupled with a predetermined gap
by the coupling member provided at the node position. The present invention provides an
ultrasonic vibration radiator characterized by Here, the node position is a position of λ / 4 from
the vibration input surface, where λ is the wavelength of ultrasonic vibration input to the
vibration input surface of the resonator member. In other words, in a resonator member that
resonates at a half wavelength in the longitudinal direction, the intermediate position between
the vibration input surface and the vibration emission surface is the node position.
In addition, the predetermined gap means a gap that is not larger than the extent that adjacent
resonator members do not cause galling due to contact even when the respective resonator
members generate vibration due to ultrasonic vibration. With the configuration according to the
first aspect of the invention, in the mutually adjacent resonator members, when one of the
resonator members extends, the other resonator member is contracted, ie, resonates in a socalled reverse phase. Therefore, if ultrasonic vibration is applied to the vibration input surface of
each resonator member so as to resonate in the same displacement and in opposite phase with
each other in the resonator members adjacent to each other, the vibration radiation surface of
each resonator member is It vibrates at the same displacement while in opposite phase to each
other. Therefore, it is possible to provide an ultrasonic vibration radiator having a large vibration
emission surface composed of a plurality of resonator members. According to the second aspect
of the present invention, the resonator members having a plurality of resonator members of the
same shape, which are adjacent to each other, are coupled with a predetermined gap by a
coupling member provided at the node position, An ultrasonic vibration radiator is provided
having a flange around the node position of the entire coupled resonator members. As described
above, by providing the flange around the node position of the entire coupled resonator
members, it is possible to apply the ultrasonic vibration radiator to applications requiring liquid
tightness. In the invention according to claim 3, in the invention according to claim 2, the
coupling member and the flange are made of the same material as the resonator member. With
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such a configuration, the resonator member, the coupling member, and the flange can be
integrally formed, so that the ultrasonic vibration radiator including these can be easily
processed by the existing machining method. become. Therefore, it becomes a highly accurate
and highly rigid ultrasonic vibration radiator. In the invention according to claim 4, in the
invention according to any one of claims 1 to 3, the transverse dimension of the vibration
radiation surface of each of the resonator members is one of ultrasonic vibration input to the
vibration input surface. / 4 wavelength or less. Here, the transverse dimension of the vibration
radiation surface of each resonator member is the length of one side of the square when the
shape of the vibration radiation surface of each resonator member is a square. As described
above, when the transverse dimension of the vibrating radiator becomes larger than 1⁄4
wavelength of the longitudinal vibration, the speed of sound propagating through the vibrating
radiator is dispersed, and the section of the cross section has high and slow speeds of sound.
Therefore, there arises a problem that the vibration amplitude on the vibration radiation surface
is not uniform. In the present invention, by adopting the configuration according to the fourth
aspect, the transverse dimension of the entire vibration radiation surface as the ultrasonic
vibration radiator temporarily exceeds a quarter wavelength of the ultrasonic vibration input to
the vibration input surface. Even if this is the case, the transverse dimensions of the vibration
emission surface of each of the resonator members constituting the ultrasonic vibration radiator
are equal to or less than 1⁄4 wavelength of the ultrasonic vibration. The vibration amplitude is
uniform, so that the vibration amplitude of the entire vibration radiation surface as an ultrasonic
vibration radiator is also uniform.
Therefore, there is provided an ultrasonic vibration radiator capable of high-amplitude vibration
during ultrasonic vibration while having a vibration emission surface having a transverse
dimension larger than 1/4 wavelength of ultrasonic vibration input to the vibration input surface.
It can be done. In the present invention, as described above, in one of the mutually adjacent
resonator members, when one of the resonator members extends, the other resonator member is
shrunk, ie, it resonates in a so-called reverse phase. If ultrasonic vibration is applied to the
vibration input surface of each of the resonator members so as to resonate in the same
displacement and in opposite phase with each other in the resonator members adjacent to each
other, the vibration emission surfaces of the respective resonator members are mutually
different. It vibrates at the same displacement while in reverse phase. Therefore, in the invention
according to claim 5, the ultrasonic transducers are connected to all the vibration input surfaces
of the plurality of resonator members, and the resonator members having the same displacement
and adjacent to each other vibrate in opposite phases. The ultrasonic transducer was driven. On
the other hand, in the invention according to claim 6, the ultrasonic transducer is connected to
the vibration input surface only to the resonator member capable of vibrating in the same phase,
and all the connected ultrasonic transducers are in the same displacement and in the same phase.
It was made to drive. DETAILED DESCRIPTION OF THE INVENTION Embodiments of the present
invention will be described below with reference to the drawings. FIG. 1 is a plan view of an
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ultrasonic vibration radiator according to a first embodiment of the present invention and a
sectional view taken along the line A-A. The present embodiment, as shown in FIG. 1, has four
resonator members 1a, 1b, 1c, 1d of the same shape and dimensions having square vibration
radiation surfaces 7a, 7b, 7c, 7d at the upper ends. . At the lower end of each of the resonator
members 1a, 1b, 1c and 1d, there are square vibration input surfaces 8a, 8b, 8c and 8d opposite
to the vibration radiation surfaces 7a, 7b, 7c and 7d. Thus, the shape of each of the resonator
members 1a, 1b, 1c and 1d is a rectangular parallelepiped having the vibration radiation surfaces
7a, 7b, 7c and 7d as the upper surface and the vibration input surfaces 8a, 8b, 8c and 8d as the
bottom surface. It has a shape. Therefore, the transverse dimension of each resonator member,
which is the dimension of the cross section parallel to the vibration radiation surface, is equal to
the length of one side of each of the square vibration radiation surfaces 7a, 7b, 7c, 7d. In order to
prevent the inhomogeneity of the vibration amplitude of the vibration radiation surface due to
the dispersion of the speed of sound propagating through the vibration radiator, the transverse
dimensions of the respective resonator members are inputted to the vibration input surfaces 8a,
8b, 8c, 8d. Or less than one-quarter wavelength of ultrasonic vibration. Ultrasonic transducers
5a, 5b, 5c and 5d are attached to the vibration input surfaces 8a, 8b, 8c and 8d, respectively.
By driving the ultrasonic transducers 5a, 5b, 5c, 5d, vibration energy from the ultrasonic
transducers 5a, 5b, 5c, 5d is transmitted through the vibration input surfaces 8a, 8b, 8c, 8d.
Workpieces (not shown) which are transmitted to the respective resonator members 1a, 1b, 1c
and 1d and further mounted on the vibration radiation surfaces 7a, 7b, 7c and 7d via the
vibration radiation surfaces 7a, 7b, 7c and 7d. And so on. The dimension L between the vibration
radiation surfaces 7a, 7b, 7c and 7d of the resonator members 1a, 1b, 1c and 1d and the
vibration input surfaces 8a, 8b, 8c and 8d is the vibration input surface 8a, The wavelength is set
to approximately λ / 2 with respect to the wavelength λ of the ultrasonic vibration input to 8b,
8c, 8d. In the first embodiment, as shown in the plan view of FIG. 1, the resonator members 1a,
1b, 1c, and 1c are arranged such that the entire shape of the vibration radiation surface 7 when
arranged is square. 1d is arranged. The transverse dimension of the entire vibration radiation
surface 7 at this time, that is, the length of one side of the square of the vibration radiation
surface 7 disposed so that the entire shape is a square is 1/1 of the ultrasonic vibration input to
the vibration input surface 8. It is larger than 4 wavelengths. With respect to each of the
resonator members 1a, 1b, 1c and 1d, the coupling members 2 made of the same material as the
resonator members are provided with gaps 3a, 3b and 3c and 3d (not shown) between the
adjacent resonator members. It is combined. The coupling member 2 is provided at a node
position of ultrasonic vibration input to the vibration input surface 8. Specifically, assuming that
the wavelength of the ultrasonic vibration input to the vibration input surface 8 is λ, the
coupling member 2 is provided at a position of λ / 4 from the vibration input surface 8.
Furthermore, a flange 4 made of the same material as that of the resonator member is provided
on the outer periphery of the resonator members 1a, 1b, 1c, and 1d at the aforementioned node
position. That is, each of the resonator members 1a, 1b, 1c and 1d is connected to the coupling
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member 2 for coupling adjacent resonator members to the node position of the ultrasonic
vibration input to the vibration input surface 8 of the ultrasonic transducer 5. It has the flange 4.
As described above, by providing the flange 4 on the outer periphery of the node position of the
entire connected resonator members, it becomes possible to apply the ultrasonic vibration
radiator to applications requiring liquid tightness. . Further, by forming the coupling member 2
and the flange 4 of the same material as the resonator member to form an integral structure, the
ultrasonic vibration radiator including these can be easily processed by the existing machining
method. Become.
The flange 4 is fixed to the base 6 with a bolt or the like, and the base 6 is coupled to a device
(not shown) or the like on which the ultrasonic vibration radiator is mounted. Further, the sizes
of the gaps 3a, 3b, 3c and 3d described above are due to the contact between adjacent resonator
members even when the respective resonator members 1a, 1b, 1c and 1d generate vibrations
due to ultrasonic vibration. It may be set to a level that causes no galling. As described above, in
the ultrasonic vibration radiator according to the present invention, resonator members adjacent
to each other are coupled with a predetermined gap by a coupling member provided with a
plurality of resonator members at the node position. Further, a flange is provided on the outer
periphery of the node position of the connected resonator members. Next, with reference to FIG.
2, the principle of the ultrasonic vibration radiator according to the first embodiment described
above will be described. FIG. 2 is an explanatory view showing displacement due to vibration of
the resonator members 1a and 1b and the ultrasonic transducer 5 in the cross section taken
along the line AA in FIG. In the first embodiment, the ultrasonic vibration in which the position
where the coupling member 2 and the flange 4 are provided to couple the adjacent resonator
members becomes the node position is the vibration of the ultrasonic transducer 5. When input
to the input surface 8, displacement as shown in FIG. 2 occurs in the resonator members 1 a and
1 b and the ultrasonic transducer 5. That is, with respect to the resonator member 1a, if there is
a displacement in which the distance between both end surfaces, ie, between the vibration input
surface 8a and the vibration radiation surface 7a, extends in the longitudinal direction, the
transverse dimension 9a in the vicinity of the node position of the resonator member 1a is It
becomes a displacement which shrinks by Poisson's ratio. On the other hand, as the transverse
dimension 9a in the vicinity of the node position of the resonator member 1a is contracted as
described above, the resonator member 1b adjacent to the resonator member 1a is in the vicinity
of the node position via the coupling member 2. Since the transverse dimension 9b is acted in the
extending direction, a longitudinally contracting displacement occurs between the end faces, that
is, between the vibration input surface 8b and the vibration emission surface 7b. Further, as in
the case of the resonator member 1b, also in the resonator member 1c adjacent to the resonator
member 1a, a displacement occurs in which the contraction between the both end surfaces, that
is, between the vibration input surface 8c and the vibration emission surface 7c occurs in the
longitudinal direction. . Furthermore, when the principle of action of vibration displacement is
applied to the resonator member 1d, the operation of the resonator member 1d is opposite to
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that of the resonator members 1b and 1c adjacent thereto, and the same displacement as the
resonator member 1a is obtained. . Naturally, if the action principle of vibrational displacement
described above is applied, contrary to the case described above, between the end faces of the
resonance member 1a, that is, between the vibration input face 8a and the vibration radiation
face 7a When the displacement in the longitudinal direction is made, the displacement extending
in the longitudinal direction between the end faces of the resonator members 1b and 1c adjacent
to the resonator member 1a, that is, between the vibration input surfaces 8b and 8c and the
vibration radiation surfaces 7b and 7c On the other hand, a longitudinally contracting
displacement occurs between both end faces of the resonance member 1d which are diagonally
opposite to each other, that is, between the vibration input surface 8d and the vibration radiation
surface 7d.
From the above, in the ultrasonic vibration radiator according to the present embodiment, the
vibration displacements of the resonating members arranged diagonally to each other are in the
same phase, and are arranged adjacent to each other. The vibration displacements of the
resonator members become opposite to each other. Furthermore, since the dimensions of the
respective resonator members 1a, 1b, 1c, 1d are the same, the vibration displacements of the
respective vibration radiation surfaces 7a, 7b, 7c, 7d are also the same. Therefore, the ultrasonic
transducers 5 that apply ultrasonic vibration to the respective resonator members 1a, 1b, 1c, and
1d give ultrasonic vibrations in the same phase to one another for the resonator members
arranged diagonally to one another, On the other hand, with respect to the resonator members
disposed adjacent to each other, it is sufficient to apply ultrasonic vibrations in opposite phases
to each other. By applying such ultrasonic vibration, the vibration radiation surfaces 7a, 7b, 7c
and 7d of the respective resonator members 1a, 1b, 1c and 1d vibrate with the same
displacement while being in reverse phase with each other. The ultrasonic vibration radiator
according to the first embodiment has the following effects. That is, as described above, since the
resonator members 1a, 1b, 1c, 1d, the coupling member 2 and the flange 4 have an integral
structure and can be easily processed by the existing machining method, the rigidity is high and
the dimensions are high. Accuracy can be made with high accuracy. Moreover, since it has a
flange structure, it is applicable also to the application in which liquid tightness is required.
Moreover, the transverse dimension of the whole of the vibration radiation surface 7 is made
larger than the 1⁄4 wavelength of the ultrasonic vibration, but the transverse dimensions of the
vibration radiation surfaces 7a, 7b, 7c, 7d of the individual resonator members are of ultrasonic
vibration. Since the wavelength is 1⁄4 wavelength or less, the vibration amplitudes of the
vibration radiation surfaces 7a, 7b, 7c, 7d become uniform, and hence the vibration amplitudes
of the entire vibration radiation surface 7 of the ultrasonic vibration radiator also become
uniform. Therefore, high-amplitude vibration is also possible during ultrasonic vibration. In the
first embodiment described above, the resonator member is arranged in the same number in the
longitudinal and lateral directions in plan view to form a square-shaped vibration emission
surface as a whole. In the second embodiment described above, the resonator member is
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arranged in different numbers in the vertical direction and in the horizontal direction in plan
view so as to constitute a generally rectangular vibration emission surface. That is, FIG. 3 shows a
plan view of an ultrasonic vibration radiator according to a second embodiment of the present
invention and a sectional view taken along the line A-A. The ultrasonic vibration radiator in the
second embodiment has the same shape and size as the above-described resonator members 1a,
1b, 1c, and 1d with respect to the ultrasonic vibration radiator in the above-described first
embodiment. The resonator members 1e and 1f are additionally provided.
In the second embodiment, the ultrasonic vibration radiator is provided by arranging the
resonator members 1a, 1b, 1c, 1d, 1e and 1f in different numbers in the vertical and horizontal
directions in the plan view of FIG. The entire shape of the vibration radiation surface 7 is
rectangular. At this time, the transverse dimension of the whole of the vibration radiation surface
7, that is, the length of the long side of the rectangle of the vibration radiation surface 7 disposed
so that the entire shape is rectangular is one of ultrasonic vibration input to the vibration input
surface 8. It is larger than / 4 wavelength. In addition, about the structure of those other than
these structures, since it is the same as that of the ultrasonic vibration radiator in the abovementioned 1st Embodiment, detailed description is abbreviate ¦ omitted. In the second
embodiment, when the action principle of the vibration displacement in the first embodiment
described above is extended and applied, the vibration displacements of the resonator members
1a, 1d, 1e arranged diagonally to each other are the same. The vibration displacements of the
resonator members (for example, 1a and 1c or 1d and 1f) arranged in the same phase are
opposite to each other. In other words, the groups of the resonator members 1a, 1d, 1e
oscillating in the same phase and the groups of the resonator members 1b, 1c, 1f respectively
vibrate in the opposite phase to each other, and each resonator member 1a, 1b, 1c, The vibration
displacement of the vibration radiation surface 7 of 1 d, 1 e, 1 f becomes uniform. Therefore, the
ultrasonic transducers 5 for giving ultrasonic vibration to the respective resonator members 1a,
1b, 1c, 1d, 1e, 1f are arranged diagonally to each other as in the first embodiment described
above. The ultrasonic vibration of the same phase may be given to the resonator members, while
the ultrasonic vibration of the opposite phase may be given to the resonator members arranged
adjacent to each other. The effects of the ultrasonic vibration radiator according to the second
embodiment are the same as the effects of the ultrasonic vibration radiator according to the first
embodiment described above. Up to this point, the two embodiments according to the present
invention have been described. According to the present invention, by arranging the required
number of resonator members, it is possible to construct an ultrasonic vibration radiator having
vibration radiation surfaces of various sizes. In both of the two embodiments described above,
ultrasonic transducers are connected to all the resonator members constituting the ultrasonic
vibration radiator, and in consideration of the relationship between the same phase and the
opposite phase, Ultrasonic vibration was applied to all the resonator members. However,
according to the present invention, among the resonator members constituting the ultrasonic
vibration radiator, the ultrasonic vibrator is connected only to the resonator member group
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vibrating in the same phase to perform the same phase driving, and the other phase is reversed.
It is also possible to excite the vibration of the resonator member group.
Specifically, in the ultrasonic vibration radiator according to the second embodiment described
above, as shown in FIG. 4, the ultrasonic vibrators are connected only to the resonating member
member groups 1a, 1d and 1e that vibrate in the same phase. If the same phase drive is
performed, the vibration of the resonator member group 1b, 1c, 1f of the other antiphase is
excited, and all the resonator members constituting the ultrasonic vibration radiator are The
same function as in the case of connecting a sound transducer can be obtained. Further, by
expanding the embodiment described above according to the present invention, it is possible to
adopt a configuration in which no flange is provided on the outer periphery of the node position
as shown in FIG. Such a configuration can be applied to use as an ultrasonic vibration radiator for
applications that do not require liquid tightness and for use as a vibration phase converter. When
a processing apparatus including the ultrasonic vibration radiator according to the present
invention is manufactured, the vibration radiation surface of the ultrasonic vibration radiator has
a vibration amplitude of approximately 30 μm at a vibration frequency of approximately 27
kHz. It was confirmed that the variation of the amplitude amount was only 2 μm, and it was a
highly accurate ultrasonic vibration radiator with uniform vibration amplitude on the vibration
radiation surface. According to the present invention, resonator members having a plurality of
identically shaped resonator members are connected to each other with a predetermined gap by
a coupling member provided at a node position. The ultrasonic vibration radiator is characterized
in that, in the resonance member adjacent to each other, when one resonance member extends,
the other resonance member shrinks, so as to resonate in a so-called reverse phase. Become.
Therefore, if ultrasonic vibration is applied to the vibration input surface of each resonator
member so as to resonate in the same displacement and in opposite phase with each other in the
resonator members adjacent to each other, the vibration radiation surface of each resonator
member is It vibrates at the same displacement while in opposite phase to each other, and as a
result, it becomes possible to make an ultrasonic vibration radiator having a large vibration
radiation surface. Further, according to the present invention, the flange is provided on the outer
periphery of the node position of the entire connected resonator members, so that the ultrasonic
vibration radiator can be applied to applications requiring liquid tightness. It became possible.
Further, according to the present invention, since the coupling member and the flange are made
of the same material as the resonator member, the resonator member, the coupling member and
the flange can be integrally formed. Therefore, since the ultrasonic vibration radiator including
the resonator member, the coupling member and the flange can be easily processed by the
existing machining method, it becomes an ultrasonic vibration radiator with high accuracy and
high rigidity. The
Furthermore, according to the present invention, since the transverse dimension of the vibration
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emission surface of each of the resonator members is set to 1/4 wavelength or less of the
ultrasonic vibration input to the vibration input surface, the ultrasonic vibration radiator may be
temporarily Even if the transverse dimension of the entire vibration emission surface of the
resonator exceeds 1⁄4 wavelength of the ultrasonic vibration input to the vibration input surface,
the vibration amplitudes of the vibration emission surfaces of the individual resonator members
become uniform, and The vibration amplitude of the whole vibration radiation surface as a sonic
vibration radiator was also uniform. Therefore, there is provided an ultrasonic vibration radiator
capable of high-amplitude vibration during ultrasonic vibration while having a vibration emission
surface having a transverse dimension larger than 1/4 wavelength of ultrasonic vibration input
to the vibration input surface. It became possible to do. BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a plan view of an ultrasonic vibration radiator according to a first embodiment of the
present invention and a sectional view taken along the line A-A. FIG. 2 is a cross-sectional view
for explaining the principle of operation of the ultrasonic vibration radiator according to the first
embodiment of the present invention. FIG. 3 is a plan view of an ultrasonic vibration radiator
according to a second embodiment of the present invention and a sectional view taken along the
line A-A. FIG. 4 is a cross-sectional view showing a configuration in a case where an ultrasonic
transducer is connected only to a group of resonating body members vibrating in the same phase
according to a second embodiment of the present invention. FIG. 5 is a cross-sectional view of the
ultrasonic vibration radiator according to the first embodiment of the present invention in which
no flange is provided on the outer periphery of the node position. [Description of the code] 1a,
1b, 1c, 1d, 1e, 1f Resonant member 2 Coupling member 3a, 3b, 3c, 3d Gap 4 Flange 5, 5a, 5b
Ultrasonic transducer 6 Base 7, 7a, 7b, 7c , 7d vibration radiation surface 8, 8a, 8b vibration
input surface
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