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ISSN 2079-1704.
,
. 2014. . 5.
1. . 89-93
______________________________________________________________________________________________
546.284-31
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, E-mail: [email protected]
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Gwyddion [4].
90
ISSN 2079-1704.
2014. . 5.
1
SiO2
______________________________________________________________________________________________
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ISSN 2079-1704.
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92
ISSN 2079-1704.
2014. . 5.
1
SiO2
______________________________________________________________________________________________
SiO2
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, 246019,
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«
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AFM and SEM study on the morphology of SiO2 nanoparticles in polishing slurries
Ya.A. Kosenok, V.E. Gaishun, O.I. Tyulenkova, V.G. Denisman, T.A. Gerasimenya, O.A. Matyushonok
EE "Francisk Skorina Gomel State University"
104 Sovetskaya Str., Gomel, 246019, Belarus, [email protected]
A method is described of obtaining and investigation of the morphology of nanoparticles in concentrated
aqueous slurries based on pyrogenic silica and silica sol obtained by the ion exchange technology. These
results are useful for development of polishing compositions and also to establish the formation regularities of
structural, chemical and electrical properties of the surface as well as for the explanation of the mechanism of
chemical-mechanical polishing of semiconductor materials.
Keywords: polishing slurry, silica nanoparticles, AFM study, SEM study, silica sol
1.
.,
.–
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3.
:
:
2.
.,
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, 2009. – 220 .
.,
–
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:
12.06.2013,
ISSN 2079-1704.
2014. . 5.
1
, 2009. – . 27–50.
.,
.
. –
:
, 2009. – 694 c.
4. Gwyddion – Free SPM (AFM, SNOM/NSOM,
STM, MFM, …) data analysis software
[Electronic resource] / David Ne as – Petr
Klapetek, 2008. –
ode of access:
http://gwyddion.net. – Data of access:
20.03.2012.
5.
.
. –
2- .–
:
, 1982.–1128 .
)
//
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.,
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15.01.2014
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