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JPS63166471

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DESCRIPTION JPS63166471
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic transducer used for ultrasonic cleaning or ultrasonic viscosity measurement. [Prior
Art] A conventionally known Langevin type ultrasonic transducer of multi-frequency excitation
has a corresponding vibration by bonding a plurality of Langeban type ultrasonic transducers
having different resonance frequencies to a single diaphragm and sweeping one frequency. The
parallel drive system in which the elements are respectively excited and the Langevin type
ultrasonic transducers are cascaded as in the front element-electrostrictive element 1-back
element 1-electrostrictive element 2-back element 2, It is roughly divided into a cascade drive
system in which the distortion elements 1 and 2 are alternately excited at different frequencies.
These are all joined to a diaphragm and applied to an ultrasonic cleaning machine or the like.
[Problems to be Solved by the Invention] In the above-mentioned parallel drive system, since a
plurality of ultrasonic transducers having different resonance frequencies are required, the total
cost of the ultrasonic transducers becomes expensive. There is a disadvantage of requiring
multiple types of bonding jigs for bonding ultrasonic transducers of different lengths (the length
of the ultrasonic transducer is approximately inversely proportional to the frequency) to the
diaphragm. On the other hand, in the cascade drive system, the electrostrictive element 2. In
addition to the need for the back surface element 2 and an increase in the cost thereof, there is a
drawback that the entire ultrasonic cleaning tank in which the ultrasonic transducer penetrates is
enlarged because the length is long. Furthermore, in the above technology, the diaphragm
corresponds to the "antinode" of the vibration, and there is no single "node" common to each
frequency. Therefore, by exciting the common electrostrictive element with a single front
element (horn) fixed at the common node, it is impossible to radiate ultrasonic waves of a
plurality of frequencies directly to the target such as the cleaning liquid and the measurement
liquid. For this reason, the strength of a specific part by the ultrasonic wave whose amplitude is
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expanded by the horn, a plurality of ultrasonic cleaning machines are required when precision
cleaning is required, and the radiation resistance is offset to calculate the signal corresponding to
the viscosity resistance. In the case of an ultrasonic viscometer, two types of vibrators having
different characteristics and their drive and control circuits were required. The present invention
provides a Langevin-type ultrasonic transducer which has a single flange structure fixed at a
common node and which can eliminate the above-mentioned drawbacks and which can be
excited in a fundamental wave, triple frequency mode or its combined mode. To aim. [Means for
Solving the Problems] The present invention relates to a Langevin type ultrasonic transducer
comprising a front element, an electrostrictive element and a rear element, wherein the length of
each element is a cylindrical surface of fundamental wave and triple frequency. Are configured to
be common. "Operation" The operation of the present invention will be described with reference
to the drawings.
FIG. 1 is an explanatory view of the present invention and shows the configuration and vibration
mode of a Langevin ultrasonic transducer. In the figure, 1 is a front element, 2 is an
electrostrictive element, 3 is a back element, 1 and 2.3 form a Langevin type ultrasonic
transducer, and its fundamental vibration mode is 5 times the 4.3 frequency vibration mode. It is
expressed by The acoustic impedance, wavelength constant and length corresponding to each
element, l and 2.3 are respectively Zl, Zl, Z3, kl, kl, k3 and Ω1, Q2 and Q3, and the crosssectional area is 80. For convenience of explanation, let us consider an ideal model with a very
small S. Now, assuming that the nodal point (face) N of the vibration is on the front element 1,
the distance between N and the junction face of the 1.2 picture element is Q ˜, and the force and
speed of the N face and the back element end face FN, F3 and VN respectively Assuming # V3,
the relational expression by transmission line theory holds. Here, Mi is a basic transmission
matrix ignoring attenuation, represented by oZi, n = 1 corresponds to the fundamental vibration
mode, and n = 3 corresponds to the triple frequency vibration mode. From the (1) and (3) both
methods, the position of the nodal point is D = O, ,,,,,,,,, (4) according to (1), (2) because the end
face of the back element 3 is free. ) From both formulas D =-(CNA2 + DNC2) B3 + (-CNB, 2 +
DND2) D3 = O ,,,,,,,,, (S) +-tan n kl Q N tan nk 2 Q 2 ,,,,, (6) ) = 1-tan nk, (12 tan nk 3 Q 3, ...) (7).
Now, if X1 = Zi tan kH1iYi = Zi tan 3kin, 1... 凋, the length JINC of the common node can be
obtained from. An example of each component of the Langevin-type ultrasonic transducer when
the resonance frequency of the longitudinal fundamental wave vibration mode is 15 kHz is
shown in Table-Table. The Langevin-type ultrasonic transducer is constituted by the elements of
Table 1 and the position of the common node can be obtained by applying the equation (9). The
relationship of the equation (9) when the length Q2 of the used electrostrictive element is 1c 鵬
is shown in FIGS. In the figure, the solid line indicates the fundamental wave vibration mode, the
chain line indicates the triple harmonic vibration mode, and the vertical axis corresponding to the
intersection of the two curves is the ANC to be obtained. FIG. 2 shows an example of the nodal
characteristics of the Langevin type ultrasonic transducer in the case of high carbon aluminum
alloy-zircon-lead titanate based porcelain-high strength aluminum alloy. In the figure, 6 is a
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fundamental wave vibration mode, 7 is a node characteristic corresponding to a 3rd harmonic
vibration mode, and QNc: 3.3 cm, Q3 = 3.4 c ++.
FIG. 3 shows an example of nodal characteristics of a Langevin type ultrasonic transducer in the
case of high carbon aluminum alloy-zircon-lead titanate-based porcelain-titanium alloy. In the
figure, 8 is a fundamental wave vibration mode, 9 is a node characteristic corresponding to a 3rd
harmonic vibration mode, and 11 Nc = 0.2 am and R = 6.5 am. FIG. 4 shows an example of nodal
characteristics of a Langevin type ultrasonic transducer in the case of titanium alloy-delcon-lead
titanate-based porcelain-naval brass. In the figure, 10 is a fundamental wave vibration mode, 11
is a node characteristic corresponding to a 3rd harmonic vibration mode, and QNQ: 5.63. F13 =
0.75 am. FIG. 5 shows an example of nodal characteristics of a Langevin type ultrasonic
transducer in the case of Naval brass-delcon-lead titanate-based porcelain-titanium alloy. In the
figure, 12 is a fundamental wave vibration mode, 13 is a node characteristic corresponding to a
3rd harmonic vibration mode, and ff1Nc = 1.15 cs, 113 = 5.75 cm. Embodiment FIG. 6 shows an
embodiment of a Langevin type ultrasonic transducer according to the present invention. The
figure shows an example of a sensor for ultrasonic viscometers, in which 14 is a front element,
and 15 is Delcon-lead titanate based porcelain. 16 is a back element, 17 is a common part
surface fixing flange, 18 is a 14.15.16 joint screw, and 19 is an electrode plate. Although two
Delcon-lead titanate-based ceramics 15 are mechanically cascaded, the polarity of one (for
example, positive electrode side) matches the electrode 19, and the other (negative electrode
side) is a high strength aluminum alloy round bar 14, It is short-circuited by 16 and the coupling
screw 18, and electrically connected in parallel. 6 is an application example of FIG. 2 using high
strength aluminum alloy for front and back elements. QNa = 3.3 am% Qs = 1.03, Q 3 = 3.4> have
the same dimensions. Although FIG. 6 has QHc and Q3 of FIG. 2, the influence of the coupling
screw 18 and the electrode plate 19 has not become a problem in this case. However, in general,
equation (9) should be used to give a rough idea of the big brother, and the presence of the bolt.
It is necessary to accurately determine the position of the cylindrical surface by experiment in
consideration of radial vibration, dispersion of the speed of sound of the material itself, and the
like. [Effects of the Invention] As described above in detail, according to the present invention, it
is possible to realize a Langevin-type ultrasonic transducer capable of fixing a fundamental
vibration mode and a triple frequency vibration mode with a single flange by an extremely simple
configuration. It becomes possible. When the present invention is applied to an ultrasonic
cleaner, the horn is immersed in a cleaning solution and the electrostrictive element is driven by
an ultrasonic oscillator to perform strong (rough) cleaning (fundamental wave) with a single
vibrator. Vibration) and precision cleaning (three-frequency vibration).
In the case where the present invention is applied to an ultrasonic viscometer, the increase in the
mechanical resistance R1, R3 to R, = S of the fundamental wave when the horn is immersed in
the liquid to be measured and the third-order frequency vibration is obtained.欝 欝 + TiZ 、 、 、
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Ti 10 10 10 10 10 3 j 10 + 10 10 10 10 10 10 10 10 Ti 10 10 Ti Ti Ti Ti Ti Ti Ti Ti Ti 10 10 10
10 10 (10) R3 = s3 j vt vt + T3 ZX The viscosity viscosity X to be obtained is calculated as
follows. Where Z: acoustic impedance S of the liquid to be measured, S3: fundamental wave,
proportional constant T of viscous resistance corresponding to third frequency, T3: fundamental
wave, proportional constant of radiation resistance corresponding to third frequency
conventional In the method, it is necessary to match the characteristics of the two types of
ultrasonic transducers and the electrostrictive element used for the surface transducer
corresponding to both the equations (10) and (11). Can be solved to provide an ultrasonic
transducer capable of measuring viscosity with a single transducer.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is an explanatory view of the present invention.
FIG. 2 shows an example of nodal characteristics of a Langevin type ultrasonic transducer in the
case of high carbon aluminum alloy-zircon / lead titanate-based porcelain-high strength
aluminum alloy. FIG. 3 shows an example of nodal characteristics of a Langevin-type ultrasonic
transducer in the case of high carbon aluminum alloy-zircon-lead titanate-based porcelaintitanium alloy. FIG. 4 shows an example of nodal characteristics of a Langevin type ultrasonic
transducer in the case of titanium alloy-zircon-lead titanate-based porcelain-naval brass. FIG. 5
shows an example of nodal characteristics in the case of Naval brass-zircon-lead titanate-based
porcelain-titanium alloy. FIG. 6 shows an embodiment of a Langevin type ultrasonic transducer
according to the present invention 5. 1 'I 13 (cm),% S 2 Figure 6 U j U
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