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JPS56169699

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DESCRIPTION JPS56169699
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front sectional view of a conventional
ultrasonic ceramic microphone, and FIG. 2 is a front sectional view of an ultrasonic ceramic
microphone in one embodiment of the present invention. FIGS. 3a and 3b are explanatory views
of vibration modes of the bimorph oscillator in the prior art and the embodiment of the present
invention, and FIGS. 4a and 4b are impedance characteristic diagrams in the prior art and the
embodiment of the present invention. 8 · · · · · Metal diaphragm 1.9 · · · · · · · · · · Piezoelectric
ceramic vibrator, · · · · · · · · · · bimorph vibrator, · · · · · · · · · · conical resonator, 12 · · ·
························································································· Case.
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic
ceramic microphone provided with a bimorph vibrator comprising a piezoelectric ceramic
vibrator and a metal diaphragm attached to each other. An ultrasonic ceramic microphone having
a pregnancy characteristic is provided. As shown in FIG. 1, a conventional ultrasonic ceramic
microphone of this type uses a flat metal diaphragm 1 made of Al 4/2 Miniram, Yohei as a metal
material, and a piezoelectric ceramic vibrator 2. The bimorph oscillator 3 is configured by
bonding to the central portion of the lower surface of the diaphragm 1. A conical resonator 4 is
an elastic adhesive for supporting the bimorph moving member 3, a terminal plate 6 is a case,
and a case 7 is a case. In the conventional ultrasonic ceramic microphone of the above
configuration, qL, :: h, punching addition F in the mWIL; Paris is generated at the time of
insertion A, and K, a bonding portion with the piezoelectric ceramic vibrator 2 and metal The
vibration damping was large because the high-order resonance was likely to occur at the time of
occurrence of the imaging movement because of the separation into only the portion made of the
diaphragm 1 and the leakage to the radial vibration of the piezoelectric ceramic vibrator 2 was
large. The present invention provides an ultrasonic ceramic microphone in which the vibration
efficiency is improved by taking account of the processability of a metal diaphragm-eliminating
the influence of Paris during punching and manufacturing. Hereinafter, one embodiment of the
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present invention will be described in detail with reference to FIG. In the figure, reference
numeral 8 is a metal diaphragm in which the outer edge portion is folded up, and a piezoelectric
ceramic vibrator 9 whose center coincides with the center of the metal diaphragm 8 is attached
to the lower surface of the metal diaphragm 8 A bimorph oscillator 10 is formed. Reference
numerals 10a and 10b are leat lines. These are connected to the electrode surface 8a on the back
side of the piezoelectric ceramic vibrator 9 and the bent edge of the metal diaphragm 8 which
are not bonded to each other. Be done. A conical resonator 11 made of metal or resin is fixed to
the central portion of the upper surface of the one bimorph oscillator 10. Reference numeral 12
denotes a terminal board, to which the bimorph oscillator 10 is bonded via an elastic adhesive
13. 14 is a case, and this case 14 is a bimorph oscillator 10. The conical resonator 11 and the
terminal plate 12 are accommodated. Reference numerals 14a and 14b denote terminals
connected to the lead wires 10a and 10b for outputting a human signal of an electric signal. The
characteristic of the above embodiment is that the outer periphery of the metal diaphragm 8 is
bent inward to make double and the thickness of the outer periphery of the metal diaphragm S is
increased-the mass of the outer peripheral portion is increased to increase the vibration
amplitude. It is that you are.
Figures 3 and b are the number of bimorph oscillators in the conventional and the present
example, respectively. lM, t '% (91, TW-, 夛 4 The large mass indicates that the amplitude is large
and the oscillation is effective. Further, FIGS. 4a and 4b show the relationship between the
frequency and the admittance in the ultrasonic ceramic microphone provided with the bimorph
vibrator of the prior art and the present embodiment, respectively. It can be seen from this figure
that only the fundamental wave 16a of the flexural vibration remains in the bimorph oscillator
1o of the present invention, and the harmonic components 15b and 15c of the flexural vibration
are much smaller than in the conventional case. This is because the harmonic component of the
flexural vibration generated by Paris is removed by bending the outer edge portion of the metal
diaphragm 8. Also, in the present invention, the radial vibration resonance 16 is also significantly
smaller than in the prior art. As described above, the ultrasonic ceramic microphone of the
present invention can improve the imaging efficiency-and the thickness of the piezoelectric
ceramic vibrator without changing the outer diameter and the outer diameter of the gold-made
diaphragm and the broken V By adjusting the bending dimension, it is possible to control 6 the
frequency of the bimorph actuator. With regard to Paris and distortion generated during
processing of the metal diaphragm, the influence of the bend 9 can be suppressed, and the highorder resonance of the impedance characteristic can be reduced. Further, as a result of improving
the vibration efficiency as described above, the resonance of the radial vibration can be reduced
to approximate the resonance characteristics of a bimorph vibrator in which two piezoelectric
ceramic moving motions are bonded, with high sensitivity, An ultrasonic ceramic microphone
exhibiting stable resonance characteristics could be turned. Further, according to the present
invention, since the oscillation distortion of the current generated when incorporated in the oneshot withdrawal circuit is significantly attenuated, the requirement of the stable excavation
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apparatus can be sufficiently satisfied. As described above, the present invention is a simple
configuration and a practical value dog.
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