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JPS56103594

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Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JPS56103594
Loudspeaker diaphragm 1 Plastic film or a film of which aluminum is vapor-deposited on one
side or both sides One or both of carbides or nitrides of titanium or nitrides of aluminum is
subjected to reactive high-frequency excitation A diaphragm formed by ion plating.
Claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a diaphragm for a
speaker in which a high hardness and high elasticity high melting point metal compound film is
formed on one side or both sides of a plastic film as a base material. In order to expand the
playback zone of the speaker, if the diaphragm with the same sound velocity is used, the
diameter is reduced or if the same aperture is maintained, the material with high sound velocity
vibrates. It is necessary to make a board. Here, reducing the aperture promotes multiple output
reduction with a small drive area required for transmission of imaging motion. In addition,
materials with high sound velocity, that is, materials with high elasticity and low density include
compounds such as aluminum and titanium, or single materials having applicability to the
diaphragm include beryllium, boron, etc. These materials generally have high melting points and
high hardness, and it is difficult to find a practical method of forming a thin film outside physical
vapor deposition or chemical vapor deposition. Looking at the conventional physical vapor
deposition and chemical vapor deposition, in this joint method, high temperatures are required
by any method, and the temperature is higher than the heat resistance limit that causes
deformation of the plastic substrate. It is necessary to maintain Therefore, in the prior art, as a
substrate of high elasticity and low density film formation, a titanium foil is mainly used, and an
aluminum foil EndPage: 1 is used in part, and one using plastic for the substrate has not been
found. According to the present invention, a substrate having an aluminum thin film formed on
the surface of a plastic or a silatic is used as a substrate by a method capable of suppressing an
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increase in substrate temperature, and a jig for attaching the substrate is grooved to deform the
substrate. A tension of a suitable magnitude is applied for the purpose of suppression, and a
metal of high elasticity and low density is formed thereon. Hereinafter, a speaker diaphragm
according to the present invention will be described with reference to an embodiment shown in
the drawings. As a substrate, a plastic having a high heat-resistant temperature higher than
polyester film, for example, a film of polycarbonate, polycide or the like or a film in which an
aluminum thin film is formed on one side or both sides of these plastic films is dome-shaped as
shown in FIG. Alternatively, it is formed into a diaphragm portion 10 having a predetermined size
and shape such as a cone shape and the flange portion 11 around it, and this is unniered at a
predetermined temperature determined by the used material to obtain residual stress inside the
molded article Use the one released. Here, the release of the residual stress is applied to minimize
the deformation of the substrate which occurs when a thin film of high hardness and low density
is formed on the substrate.
In the case of a polyester film molded article, it may be left in air at a temperature of 120 to 150
° C. for 1 to 2 hours. Subsequently, as shown in FIG. 2, the deposition attachment is loaded on
the frames 2 and 3 as shown in FIG. At this time, the substrate 1 is tightly fastened between the
frame 2 and the frame 5 on the lower side and the upper side so that a recess 13 is formed in the
flange portion 11 of the substrate 1. That is, in the lower mounting, the semicircular groove 14
of the frame 2 and the upper mounting, the flange portion 11 of the substrate 1 is tightly
tightened by the semicircular projections 15 of the frame 3 and tension is applied. It is concluded
in 3. Here, in the mounting, the frames 2 and 6 are fixed by the screw 4, but if the tension
applied to the substrate 1 is small, the substrate 1 is deformed in the process of forming a film of
the next high hardness metal compound. It will occur. Depending on the material of the substrate
1 and the shape 2 dimensions, the attachment is made by the grooves 14 of the frame 2. The
mounting determines the shape 2 dimensions of the projection 15 of the frame 3. Here, the
magnitude of the applied tension is appropriately adjusted depending on the shape and size, but
is 0.1 to 1 with a diameter e5DIII11. Next, the high hardness metal compound film is synthesized
and formed on the diaphragm surface 10 of the substrate 1 fastened to the frames 2 and 3. The
method adopted here is reactive high frequency excitation ion plating suitable for synthesis of a
high hardness metal compound and suppression of temperature rise of the substrate. In normal
vacuum deposition titanium and nitrogen or carbon. It is difficult to form a good synthetic film of
aluminum and nitrogen, and therefore metal compounds are deposited, but the adhesion between
the substrate and the synthetic film is poor, so the low heat resistance plastic film can not
maintain that temperature. So it can not be applied to the diaphragm. In sputtering, a high
hardness metal compound film formed on a substrate tends to form a columnar structure with
just a frost pillar, and it is not suitable for use as a vibrating plate for propagating vertical waves.
Furthermore, in order to maintain the adhesion between the substrate and the film, the substrate
temperature is exposed to a high temperature above the temperature that induces deformation of
the plastic film molded product, and there is a rise in the substrate temperature due to
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sputtering. It can not be used because it can not be held. In ion plating, a method combining
resistance heating and direct current two-pole discharge has been developed, and then a high
frequency method and a cluster ion beam method have been developed. In the present invention,
since the substrate is plastic and the temperature which induces the deformation is low, the high
frequency excitation method is selected as a method which does not cause an increase in the
basic temperature. Since the substrate temperature is about 100 ° C. even in high frequency
excitation ion plating, the frame is attached as shown in Fig. 2 in consideration of the direction in
which tension application and deformation are likely to occur on the substrate as described
above. When the substrate 1 has a dome shape as shown in FIG. 1, it is necessary to form a high
hardness metal compound film from the dome surface.
Also, it is desirable to cool down after the formation of the film to suppress the generation of
residual stress at the interface between the substrate and the film. When forming the high
hardness metal compound film EndPage: 2 on both sides of the dome, loosen the fastening of the
substrate shown in FIG. 2 and remove the mounting of the substrate 1 by the frames 2 and 3.
The lower mounting is done by fastening the frame 5 and the upper mounting with the frame 6
and entering the ion plating as the second operation. In this case, the dome convex surface and
the dome concave surface order ion plating the substrate Important for suppressing deformation
of In the mounting shown in FIG. 6, the frames 5 and 6 are respectively provided with the
projection 16 on the lower side of the frame 5 and the groove 17 on the upper side of the frame
6 in the lower side. The details will be shown by examples. The outline of the implementation of
the present invention has been described above. Here, only specific examples are shown.
Example 1 A polyester film having a thickness of 20 μm, which was thermally fixed after
stretching, was formed into a predetermined shape by the mattide die method, to obtain the
dome-shaped substrate 1 shown in FIG. Here, the molding temperature is 150 to 200 ° C., and
in this example, it is molded at 180 ° C. Then, in the air as described above, 120-15. 1 hour
Anne at a temperature of On! Then, remove the residual stress that causes deformation in the
next process. In this example, annealing is performed at 150 ° C. for 2 hours. Subsequently, the
mounting shown in FIG. 2 of the substrate 1 is fastened to the frames 2 and 3 to form a high
hardness metal compound on the dome convex surface. In this example, the tension applied to
the substrate 1 when fastened to the frames 2 and 3 is 0.5 to 9 for a circumferential length of 10
cm. The applied tension is adjusted by the dimensions of the semicircular sleeve 14 and the
projection 15 provided on the frames 2 and 3. Subsequently, the substrate 1 is loaded into a high
frequency excitation ion plating apparatus and ion plating is performed under predetermined
conditions. In this example, the evaporation metal is titanium, to which nitrogen gas is added,
titanium nitride is synthesized under high frequency excitation of argon gas, and deposited on
the substrate surface. It is formed. The cross section of the substrate 1 obtained here is a
laminated structure of the substrate 1 and the titanium nitride film 7 formed as shown in FIG. In
addition, the formation of titanium nitride on the concave surface of the dome removes the
substrate 1 from the frames 2 and 3 and the attachment shown in FIG. The cross section of the
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substrate 1 obtained here has a three-layer structure in which titanium nitride films 7 and 7 'are
formed on both surfaces of the substrate 10 as shown in FIG. Even if a titanium nitride film is
applied to one side or both sides of the dome substrate as a diaphragm, its characteristics hardly
change.
The high-side resonance frequency of a speaker using a diaphragm in which a titanium nitride
film of 8 μm in thickness was formed on a 20 μm-thick, 20 μm effective diameter, of a
polynisal dome substrate was 3 sKH 2. In addition, the surface is golden and has sufficient
design. Example 2 0.05 to 01 μm of aluminum was vapor deposited by chemical vapor
deposition (CVD) on one side of a 20 μ7 thick polyester film heat-set after stretching, and this
was mattide die-formed in the same manner as in Example 1 I got a dome shaped substrate.
Subsequently, the mounting was fastened to the frame in the same manner as in Example 1, and
a titanium nitride film was formed to a thickness of 10 μm on the convex surface of the domeshaped substrate. The cross section of the substrate 1 obtained here has a three-layer structure
of a polyester film substrate 1, aluminum 8 and a titanium nitride film 7 as shown in FIG. Here,
as shown in Example 1, in the case where the titanium nitride film is also formed on the concave
surface of the dome substrate, an example in which the titanium nitride film is formed directly on
the substrate as shown in FIG. As shown in FIG. 8, there is an example in which a chemical vapor
deposition film 8 'of aluminum is formed on the concave surface of the substrate, and a titanium
boride film 7' is formed on this aluminum film. Incidentally, aluminum was formed to a thickness
of 008 μm by chemical vapor deposition on one side of a polyester film having a thickness of 20
μm, and this was molded so that the surface on which aluminum was formed by the same
method as in Example 1 would be a convex surface of the dome. The high-resonance frequency
of the speaker using the diaphragm having an effective diameter of 20 mm and having a
thickness of 10 μm and titanium nitride formed on the convex surface of the dome-shaped
substrate obtained was 34 KH 2. EXAMPLE 3 On the convex surface of a plastic dome-shaped
substrate obtained by the same method as in Example 1, a carbonized EndPage: 3 titanium film
was sequentially formed by 8 μm1 by a method similar to Example 1, and then a titanium
nitride film was formed by 1 μm in order. . Here, the evaporation metal of titanium carbide is
titanium as in Example 1, and the gas forming a compound therewith is methane. The obtained
diaphragm was in the same golden color as in Example 1. Further, the high frequency resonance
point of the speaker using the diaphragm having the effective diameter 201101 was 38 KHz,
which is about 10 inches higher than that of the titanium nitride film-formed product. Here, FIG.
9 shows a spectral image by X-ray diffraction of the gold film deposited on the polyester film
obtained in Example 1. The spectrum of a typical titanium nitride is shown, and the strength at
the 111-axis is sharp, indicating good crystallinity. This result is common to the films obtained in
Example 2 and Example 3. A diaphragm of plastic-titanium nitride and plastic-titanium carbidetitanium nitride composite type having a titanium nitride film formed on the surface was
obtained.
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In this case, in the process of forming titanium nitride and titanium carbide, to cope with the
distortion of the substrate due to expansion and contraction of the plastic substrate, the
occurrence of deformation such as warpage, and the melting or breakage of the plastic substrate
due to the temperature rise of the substrate. In the point of this invention, high melting point
metal compound film can be formed on low heat resistant plastic. As a result, a high resonance
point has a value about 15 times higher than that of a speaker using a titanium dome-shaped
diaphragm of the same diameter, and-the surface has a golden color to obtain a diaphragm with
good designability. It was possible.
4. Brief description of the drawings FIG. 1 is a cross-sectional view of a plastic dome-shaped
substrate of a speaker diaphragm according to the present invention, and FIG. 2 shows an
attachment for forming a titanium nitride film on the convex surface of the dome-shaped
substrate. 3 is a cross-sectional view of the frame when the titanium nitride film is formed on the
concave surface of the dome-shaped substrate, and FIGS. 4 and 5 are diaphragms in which the
titanium nitride film is formed on the substrate. Some of the cross sectional views 1. 6, 7 and 8
are cross-sectional views of a portion of a diaphragm in which an aluminum film-9 titanium
nitride film is formed on a plastic film, and FIG. 9 is a cross sectional view of the titanium nitride
film of the speaker diaphragm of the present invention. It is the characteristic view which showed
the line diffraction result. 1 · · · Substrates 2, 3 · · · Attached frame 7 · · · Titanium nitride film 8 · · ·
Aluminum film agent patent attorney thin 1) 5 7 7 Figure / / 7 EndPage: 4 years 2 3 years O 4Figure 5m one P P · · medical go! 1 '= 7 Figure' t 'A = 6 Figure EndPage: 5
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