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The acoustic probe according to the present invention includes an acoustic wave probe 1 and an
acoustic wave lens formed at an end of an acoustic wave propagation medium, wherein the
propagation medium has electrical conductivity.
DETAILED DESCRIPTION OF THE INVENTION The present invention relates generally to
microscopes, and more particularly to high frequency sonic energy. In recent years, since it has
become possible to generate and detect high-frequency sound waves extending to IGH2, about 1
micron of a sound wave wavelength in water was obtained, and so sound wave energy was used.
A microscope has come to be considered. In such a device, it is important how to create a narrow
focused sound beam, and it is strongly desired to improve the performance of the sound probe. A
conventional example will be described with reference to FIG. That is, the cylindrical crystal 100
of sapphire, quartz glass or the like has a plane which is optically polished at one end face, and a
concave sphere is formed at the other end face. The lower electrode 30 of titanium, gold,
chromium, aluminum or the like is attached by vapor deposition to the flat plate surface, the
piezoelectric thin film 20 of zinc oxide or the like is provided thereon by sputtering or the like,
and the upper electrode 10 is attached thereon There is. An RF electrical signal is applied
between the upper and lower electrodes, and a plane wave RF sound and wave are emitted into
the crystal 100. This plane acoustic wave is focused at a predetermined focal point F by a
positive lens constituted by the interface 60 of the crystal 100 formed in the spherical hole and
the medium (generally water) 40 as indicated by a broken line 50. Since this focused sound wave
is subjected to disturbances such as reflection, scattering and transmission attenuation by the
sample placed near the focal point, it is possible to obtain information reflecting the elastic
property of the sample by detecting and analyzing this disturbance sound energy. It is possible
translation. The above-mentioned crystal system may be used for detection of sound wave
energy, or similar crystal systems may be made to face each other. EndPage: In such a
configuration, the RF @ applied between the upper and lower electrodes 10-30 leaks through the
crystal 100, and the opposed probe is also picked up, resulting in an unnecessary spurious
response. Even if the whole was shielded, only 60 parts of the sound radiating part had to be
exposed to water, and it was difficult to prevent leakage completely. In addition, there has been a
shortcoming that it takes three deposition or sputtering steps to form a probe as described
above. The present invention has been made in view of the above points, and if the crystal itself
has electrical conductivity, it uses it as a lower electrode and exerts a perfect shielding effect
while reducing the number of deposition steps while using acoustic waves. It makes the industrial
production of the probe easy. FIG. 2 is a view showing an embodiment of the present invention.
One end face of the electrically conductive crystal 110 is optically polished, and a spherical
concave hole 60 is formed on the other end face to perform a lens function. A piezoelectric thin
film 20 such as zinc oxide is directly sputtered on the flat plate surface, and the upper electrode
10t is vapor-deposited thereon.
Here, the crystal 110 acts as a lower electrode and at the same time is held in place by making
contact with the case, and also plays a role of an electrostatic shield. In this way, there is also an
effect that the receiving probe and the ground potential become equipotential via the water of
the medium 40. The ground wire G may be drawn out as shown instead of using the case earth.
Here, metals can be considered as the electrically conductive crystals, but this is not preferable
because the sound wave propagation loss in the metals is large. The present inventors were able
to realize the present invention as a result of using glassy carbon as a material having a
propagation loss as small as quartz glass and having electric conductivity. Glassy carbon is
carbonized by heat curing of a material, and its property is different from that of ordinary
graphite, but rather a carbon material similar to glass and has a feature that shows no anisotropy
at all. . It has been found that it is effective to use furfural (CsHaO *) and bi-pyl (C4HIN) as the
organic substance. When 4 parts of furfural and 6 parts of vinyl alcohol were selected, it was
found that they had a suitable viscosity and that the carbon yield was good also in the calcination
and carbonization step described later. Hydrochloric acid (diluted 3.6%) diluted by 4 to 5 @ r as a
polymerization catalyst is added to 1 to 3% of the above organic matter, and stirring is carried
out while heating to 50 to 80C, polymerizing in 2 to 8 minutes, viscosity It becomes a liquid with
It can be precured by raising the temperature from room temperature to 80C at a rate of 0.5 C /
min or less in air, and then heating in vacuum at 4500 t 'to carry out a curing treatment. When
this is heated to 13001: 'to 25001 Z' in vacuum, carbonized organic matter can be obtained. The
glassy carbon thus produced has an electrical conductivity of ˜10 −1 Ω · m, and its mechanical
properties are similar to that of glass, with a Young's modulus ˜3 × 10 ′ ′ N / m ′ ′, a
density of 1.5 × It was confirmed to have the same performance as 1 o Kg / m , sound
velocity ˜4600 m / s and bi ′ ′ glass. Then, a cylindrical shape is cut out from this glassy
carbon mass as shown in FIG. 2, and a spherical hole is formed to constitute a probe. Although
such glassy carbon is used in the present embodiment, the same effect can be obtained by using
other glassy carbons, for example, trade name "Glatsy carbon" or trade name "cellulose / carbon".
A second embodiment of the present invention will be described with reference to FIG. In FIG. 3,
one end face of the glassy carbon crystal 120 is a flat plate 7Q optically polished and the other
end is a convex spherical portion 65.
The piezoelectric thin film 20 such as zinc oxide is formed on the convex portion 65 by
sputtering, and the upper electrode 10 is formed thereon by vapor deposition. The electrically
conductive crystal 120 also serves as a lower ground electrode, and a focusing effect 5102 or the
like of noise due to spherical curvature is formed by sputtering. As described above, by using an
electrically conductive crystal as a propagation medium, it is possible to use the ground lower
electrode as a main crystal, and ■ electrostatic shielding etc. can be performed completely and
RF signal leakage is possible. It has the great advantage that it can be prevented, and the lower
electrode preparation process can be omitted, and it becomes large in the preparation of
equipment using high-frequency focusing sound waves, ie liquid storage microscope, micro
nondestructive inspection, ultrasonic spectroscopy etc. You can wait for the effect EndPage: 2.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining the structure of a
conventional acoustic wave probe, FIG. 2 is a view for showing the configuration of one
embodiment of the present invention, and FIG. 3 is another example of the present invention It is
a figure showing composition of an example. Agent Patent Attorney Toshiyuki Utada / Figure y!
[2] EndPage: 3
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