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This OIi Aluminium is related to a nine-array m * acoustic-tactile Oml structure using a polymer
piezoelectric material laminated on an ultrasonic transducer. Conventionally, in the array 臘 触 子
触 圧 電 using a polymeric piezoelectric material, as in the ilH, the piezoelectric film 10 both
images, Mu? A metal such as metal is divided into nine ultrasonic waves 1IIli and an electric
charge 1i2 is provided, and it has an integral structure with a copper see metal work or an
acoustic body 3 having a thickness φ. However, considering the point of zero impedance
matching with a pulsar, a single polymeric piezoelectric film is too large, so a method of multilayered and low impedance has been adopted. In that case, it is very difficult to join divided
electrodes formed on a piezoelectric film on another piezoelectric film and to be combined with
nine divided electrodes in multiple layers, which contributes to a low yield. The An object of the
present invention is to provide an easy-to-use array method for producing an ultrasonic bare
tactile element in the case of using a laminated and high-polymer piezoelectric material as an
ultrasonic transducer. According to the present invention, an array-type ultrasonic probe, in
which polymer piezoelectric materials having divided electrodes are laminated in the prior art
and used as an ultrasonic transducer, can be manufactured with high volume IK and high yield
by using a laser beam. It is a thing. Hereinafter, the present invention will be described in detail
with reference to the drawings. FIG. 2 is a view showing an embodiment of the present invention.
The piezoelectric film 21 having the ultrasonic excitation electrode 24 attached to both sides is
laminated using an adhesive. A laser beam 22 focused on the laminated nine piezoelectric films is
irradiated to melt and cut the electrode, thereby forming a divided electrode. In this case, the
split electrode can be easily heated by using a focused laser beam through the piezoelectric film
also with respect to the portion of the surface of the surface that is pinched by the adhesive 23.
Thereafter, the divided electrodes are formed, and the nine piezoelectric members are formed on
the acoustic absorber 25, and the signal lead 26 is attached, and the array member ultrasound
probe is I! あがる。 As described above, according to the present invention, it is possible to form
a split electrode after making a laminated sheet and making alignment unnecessary when
bonding the piezoelectric film having the split electrodes. As a result, displacement of the divided
electrodes at the time of bonding of the piezoelectric film, or insufficient pressure at the time of
bonding due to the alignment of the electrodes causes the thickness of the bonding layer to
become large. It will not cause deterioration of the characteristics. Therefore, when
manufacturing the array wedge probe, the step of aligning the divisional electrodes is eliminated,
the whole pseudo fabrication process is simplified, and the yield can be improved. Further, even
when the shape of the probe is, for example, a convex or concave shape, it is possible to process
it into a tool by using the present invention, which was difficult in the case of the conventional
Brief description of the drawings
FIG. 1 is a structural view of a conventional array eyelid ultrasound probe, and FIG. 2 is a crosssectional view of an embodiment of the present invention.
21: Piezoelectric film 24: Divided electrode 25: Sound absorber 26: Electrode lead wire
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