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DESCRIPTION TITLE OF THE INVENTION Laminated High Elastic Vibrating Plate 1, A laminated
high elastic vibrating plate characterized in that a film of high elastic material is formed on both
sides of one side t + of a plastic film.
2, the scope of claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a diaphragm for
audio equipment. The diaphragm for audio equipment is light in weight from the viewpoint of
characteristics, high in elasticity, provided with an appropriate mechanical internal loss property,
and in view of machinability, it is important that it can be easily formed into a predetermined
shape. As the diaphragm corresponding to the increase in the sound velocity of the diaphragm
material, as shown in FIGS. There is one in which a film 2 of a highly elastic metal such as Be, B,
BH or a compound thereof is formed by vapor deposition. These diaphragms characteristically
increase the residual stress in the metal foil when the thickness of the metal foil to be the
substrate is reduced, and the metal foil substrate 1 is formed into a predetermined shape and
deposited on the molded product The practical use limit of the thickness of the metal foil is
suppressed to 10 to 20 μm because the deformation after forming the film is large. Here, in
order to largely express the effect of the good deposition film formed on the substrate 1, making
the film thickness larger than the thickness of the substrate, and keeping the density of the
deposition film smaller than the density of the deposition film as well. It will be necessary.
However, increasing the thickness of the vapor deposition film formed on the substrate should be
avoided because it is a fatal defect for the diaphragm as the mass of the diaphragm increases. し
たがって。 According to the conventional method, there is an upper limit to the increase in
sound velocity of the diaphragm. An object of the present invention is to provide a diaphragm
embodying the characteristics of the diaphragm material close to the characteristics of a high
elastic metal film formed on a substrate, except for the above-mentioned drawbacks of the prior
art. The present invention uses a low density, extremely thin plastic film as a substrate to
increase the sound velocity of the diaphragm material, and forms a high elasticity material film
on the substrate, thereby occupying the base of the diaphragm material characteristics. The
effect of the plate material EndPage: 1 fee is reduced, and the effect of the high elasticity metal
formed on the substrate is intended to be enhanced. 3 and 4 are partial cross-sectional views of a
diaphragm according to the present invention. The substrate 3 has a thickness of 9 μm to 50
μmt. A commercially available two-ring stretched polyethylene terephthalate film (hereinafter
referred to as a PIT film) is used. Here, the thickness of the% PBT film can be selected to an
appropriate thickness according to the purpose depending on the size of the diaphragm and the
required characteristics. Next, an aluminum film 4 is formed on one side or both sides of the
original PIT film by chemical vapor deposition or vacuum evaporation in a thickness range of 15
μm to 5 μm.
Here, the aluminum film 4 contributes little to the diaphragm material characteristics. In the
subsequent ion-plating of a titanium nitride or titanium carbide / high carbon material / the like
film formed on a PE1T film, the role of protection against wear of the PIT film due to
temperature rise is fourfold. Then PE which formed aluminum film on 1 surface? The film is
placed in a pair of male and female molds having a predetermined shape 9 dimensions, heated,
pressurized and molded under the conditions of a temperature of 150 ° C. to 200 ° C. and a
pressure of 10 kg / ara 'to 20 kg / cm'. By holding in this state for 20 seconds, a work material 1
for a diaphragm made of a PIT film-aluminum laminated material having a predetermined shape
and 9 dimensions, for example, a dome-like work material shown in FIG. Next, a highly elastic
material film such as titanium nitride or titanium carbide is formed by high frequency excitation
ion plating or the like on one side or both sides of the work material obtained above. In ion
plating, with the temperature rise of the workpiece, deformation of the workpiece occurs in the
heating and cooling process. Therefore, in order to suppress the deformation that causes a
practical problem, as shown in FIG. 5, the force 9 acting in the concave direction of the work
material at the time of contraction and the concave side shape for fixing the work material are
combined. The work material 6 is fixed between the jig 7 and the ring-shaped jig 80 having a
window for forming a vapor deposition film to form a highly elastic material film on the convex
surface side of the work material 6 Further, in the case of forming the work material 6, the work
material 6 is attached between the jig and the ring-like jig to carry out deposition by fitting the
work material 6 on the convex side. In this way, deformation of the work piece 6 can be
prevented. The royal conditions used here for ion plating are the following. That is, the excitation
method and strength are 100 to 500 W for high frequency excitation of 1456 M anal, and the
type of atmosphere gas is nitrogen in the case of titanium nitride. In the case of titanium carbide
with acetylene or methane. The pressure is IX10-'Torr to 5 x 10-Torr. The present invention will
be described in detail by way of examples. EXAMPLE 1 Aluminum was deposited on a surface of
a 22 .mu.m thick 22 .mu.m thick biaxially stretched PI tefilm having a vertical / horizontal
expansion rate of & 5/50 and a thickness of .alpha.5 .mu.m by chemical vapor deposition. Pii of
obtained aluminum laminates? The areal density of the film was 5 8 mg / am '. Subsequently, the
aluminum laminated PIT film is placed in a pair of male and female molds, heated at a
temperature of 180 ° C. and a pressure of 15 kg / Cm ′ ′, pressurized and held in that state
for 10 seconds to form a dome or cone shape. The molded article of
Here, the high-pass resonant frequency of the dome-shaped molded article having a diameter of
55 mm was 15 1 [1 m. Subsequently, the dome-shaped molded product obtained above was
attached to a jig shown in FIG. 5, and a titanium nitride film was formed on the convex side of the
silicon dome by a high frequency excitation method to obtain a predetermined diaphragm. . At
this time, the high frequency electric field strength applied was 1556 KH fix 40 ON, the type of
the atmosphere gas was nitrogen, the gas pressure was 2 × 10 − 'torr, and the film thickness of
the formed titanium nitride film was 15 μm. The diaphragm obtained here was not deformed.
tた。 The high region resonance frequency was 42.8 KHI. Example 2 In the same manner as in
Example 1, an aluminum-laminated biaxially stretched [stretched PIT film was obtained. Here, the
thickness of the two-ring stretched pm'r film was 22 μm, and the aluminum film was formed on
both sides of the film to a thickness of α5 μm. This was molded into a dome shape in the same
manner as in Example 1 to obtain a dome-shaped molded article. The high EndPage: 2 band
resonance frequency of this molded article was 14.1 KHz. Subsequently, titanium nitride films
were formed to a thickness of 10 μm on both sides of the molded product obtained above by the
same method as described above, to obtain a predetermined diaphragm. This diaphragm also did
not deform, and its high-pass resonant frequency was 54.5 KHg. In the same way as Example &
Example 1, 16 μm thick two-wheel stretched PK? An aluminum film having a thickness of 1 μm
was formed on one side of the film, which was then heated, pressed and molded to obtain a
dome-shaped molded article. The area density of this molded product was A4 mg / cm ', and the
high-resonance frequency thereof was 14.6 KH2. Subsequently, under the same conditions as in
Example 1, a titanium nitride film was formed to a thickness of 15 μm on the aluminum film of
the molded product to obtain a predetermined diaphragm. The high resonance frequency of this
diaphragm is 3 & 6 KH! であった。 As described above, the manufacturing procedure of the
diaphragm of the present invention is referred to as metallization processing of a plastic film, and
mattide die molding of a plastic film. It can be easily and inexpensively manufactured by a very
versatile method. In addition, it has an effect on the amount of sound velocity, such as the density
can be made lower and thinner compared to a diaphragm on which a conventional low density
metal foil is formed and a high elastic material film is formed thereon.
4. Brief description of the drawings. FIG. 1 and FIG. 2 show the cross-sectional structure of the
conventional diaphragm, FIG. 3 shows the cross-sectional structure of the diaphragm of the
present invention, and FIG. It is a figure which shows the state attached to the jig ¦ tool in order
to prevent the deformation ¦ transformation by vapor deposition film formation for the molded
article which shape ¦ molded the aluminum laminated plastic film in the shape of a dome-shaped
diaphragm. In the figure. 3 Niblast film substrate 4; aluminum protective film 5: high elastic
material film 6 'aluminum product plastic molded product 7.8: mounting is a jig agent patent
attorney thin 1) Toshiyuki) X / r: A-1-3 Figure EndPage: 3
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