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BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view of an embodiment of the
present invention, and FIG. 2 is an enlarged sectional view of a vibrating membrane. d ultra-thin
film, 2 c. .・ L 珀) Selfie 2 〃 2a-55 1
[Detailed description of the invention] This device is oxidized! The present invention relates to a
microphone in which a vibrating membrane made of a quartered piezoelectric thin film is used as
a diaphragm. The object of the present invention is to use a vibrating film of zinc oxide
piezoelectric thin film formed by a spacer as a diaphragm, to provide a wide-range microphone in
a band, which is simple and lightweight, and lightweight. An embodiment of the present
invention will be described below with reference to the drawings. In FIG. 1, 1 is a frame of a
microphone, and its upper end is formed in the shape of an edge l &. In the part of the edge lIL of
this frame l (1), shake 111! ! I! A clamp 112 holds the tension 112 as a diaphragm. The
vibration film 2 is formed by expanding a single-electrode thin film 2bt by vapor deposition or
sputtering on the polymer film 2a, and expanding the new film in 1111 g in FIG. The η
electroconductive film 20 is formed by sputtering, and the other electrode thin film 2 at- on the
zinc oxide piezoelectric thin film 20 is made of an imitation formed by vapor deposition or
sputtering. Therefore, the voltage proportional to the sound pressure in FIG. It takes out from l
[2m) or its terminal 2b 'and the other electrode thin film 2d or its terminal 2d'. As described
above, since the diaphragm of the oxide crimped electrode formed by sputtering is used as the
diamond, the structure is simplified, and the weight is large, and the film is wide in the band.
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