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JPH1099805

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DESCRIPTION JPH1099805
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic vibration apparatus for applying ultrasonic vibration to a cleaning solution for
cleaning an object to be cleaned, and an ultrasonic cleaning apparatus using the same.
[0002]
2. Description of the Related Art For example, in a liquid crystal manufacturing apparatus and a
semiconductor manufacturing apparatus, there is a process in which it is required to clean a
liquid crystal glass substrate or a semiconductor wafer as an object to be cleaned with high
cleanliness. As methods for cleaning such objects to be cleaned, there are a dip method in which
a plurality of substrates to be cleaned are immersed in the cleaning liquid, and a sheet-fed
method in which the cleaning liquid is sprayed toward the objects to be cleaned to clean them
one by one. In recent years, a high degree of cleanliness can be obtained, and a cost-effective
single wafer system is often adopted.
[0003]
As one of the single-wafer methods, a cleaning method has been put into practical use in which
ultrasonic vibration is applied to the cleaning liquid to be sprayed to the object to be cleaned and
the fine particles are efficiently removed from the object to be cleaned by its oscillating action.
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[0004]
Conventionally, in the cleaning method for applying ultrasonic vibration to the cleaning liquid,
ultrasonic waves of about 20 to 50 kHz have been used, but recently, ultrasonic cleaning devices
using acoustic waves in the ultrasonic band of about 600 to 2000 kHz have been developed. ing.
[0005]
When the cleaning fluid to which the ultrasonic vibration is applied is sprayed to the object to be
cleaned, the bonding force of the fine particles attached to the object to be cleaned is reduced by
the action of the ultrasonic vibration, so the cleaning effect is better than when the ultrasonic
vibration is not applied Can be improved.
[0006]
The conventional ultrasonic cleaning apparatus has an elongated apparatus body 1 as shown in
FIG.
A space 2 penetrates in the thickness direction of the main body 1 and is formed along the
longitudinal direction.
The space portion 2 is formed in a tapered shape which narrows as it goes from the upper end
side to the lower end side, and the lower end is a nozzle port 3 opened in the lower surface of the
apparatus main body 1.
[0007]
The upper end opening of the space 2 is closed by a diaphragm 5 made of a metal plate such as
tantalum via a seal material 4.
On the upper surface of the diaphragm 5, a plurality of elongated rectangular vibrators 6 (only
one is shown) are attached at predetermined intervals along a portion corresponding to the
upper end opening of the space portion 2. The vibrator 6 is driven by an ultrasonic oscillator (not
shown). Since the vibrator 6 is ultrasonically vibrated by the ultrasonic oscillator, the vibration
plate 5 is also vibrated by the ultrasonic vibration. That is, an ultrasonic vibration apparatus is
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configured by the diaphragm 5, the vibrator 6, and the ultrasonic oscillator.
[0008]
Supply paths 8 are formed in the longitudinal direction on both sides of the space 2 of the
apparatus body 1. The pair of supply paths 8 is connected to a cleaning liquid supply pipe (not
shown) at both ends thereof, and the cleaning liquid is supplied by these supply pipes.
[0009]
Furthermore, in the device body 1, a plurality of jet passages 9 having one end communicated
with the supply passage 8 and the other end communicated with the space portion 2 are formed
at predetermined intervals along the longitudinal direction of the device body 1. There is. That is,
the other end of the jet passage 9 is opened opposite to the diaphragm 5. The inside diameter
size of the jet passage 9 is set sufficiently smaller than that of the supply passage 8.
[0010]
The cleaning solution supplied to the supply passage 8 is split approximately equally into the
plurality of ejection passages 9 and ejected toward the lower surface of the diaphragm 5 from
the other end opening, and the ultrasonic transducer via the diaphragm 5 Ultrasonic vibration is
applied by 6. The cleaning liquid to which the ultrasonic vibration has been applied is jetted from
the nozzle port 3 of the space 2 toward the object to be cleaned (not shown). Thus, the object to
be cleaned can be cleaned with a cleaning solution to which ultrasonic vibration has been
applied.
[0011]
By the way, in the ultrasonic cleaning apparatus having such a configuration, the diaphragm 5 is
usually formed of a metal such as tantalum, titanium or the like or an alloy thereof, and when the
ultrasonic vibrator 6 oscillates, the vibrator 5 It vibrates in resonance with the vibration of 6.
However, if the thickness of the diaphragm 5 exceeds 1.5 mm, the resonance efficiency with the
vibrator 6 may be lowered, so that the thickness of the diaphragm 5 is 0.1 to 1.5 mm.
01-05-2019
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[0012]
However, if the thickness of the diaphragm 5 is made extremely thin, its strength is greatly
reduced. Therefore, repeated vibration may cause damage at an early stage, or the vibrator 6
attached to the diaphragm 5 may be peeled off, which is not practical. In practice, the diaphragm
5 having a thickness of 0.1 mm or more, which can withstand long-term use, has been used even
if the resonance efficiency decreases.
[0013]
As described above, since the thickness of the diaphragm has conventionally been set to 0.1 mm
or more, the resonance efficiency is reduced even if the strength that can not be damaged early is
obtained. , There was a thing that vibration damps.
[0014]
An object of the present invention is to provide an ultrasonic vibration apparatus and an
ultrasonic cleaning apparatus using the same, in which the resonance efficiency of the diaphragm
is improved by setting the thickness of the diaphragm to less than 0.1 mm. It is in.
[0015]
Further, an object of the present invention is to provide an ultrasonic vibration apparatus in
which the strength does not decrease even if the thickness of the diaphragm is 0.1 mm or less,
and an ultrasonic cleaning apparatus using the same. is there.
[0016]
According to the invention of claim 1, there is provided an ultrasonic vibration apparatus in
which a vibrator is attached to a vibrating plate and the vibrator is driven by an ultrasonic
oscillator, the vibrating plate has a thickness of It is characterized by being less than 0.1 mm.
[0017]
The invention according to claim 2 is an ultrasonic vibration apparatus in which a vibrator is
attached to a vibrating plate and the vibrator is driven by an ultrasonic oscillator, wherein the
vibrating plate has a thickness of less than 0.1 mm, and It is characterized in that the portion
separated from the vibrator is a structure reinforced by a reinforcing member.
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[0018]
The invention according to claim 3 is an ultrasonic cleaning apparatus provided with an
ultrasonic vibration apparatus for applying ultrasonic vibration to a cleaning liquid for cleaning
an object to be cleaned, the ultrasonic vibration apparatus according to claim 1 or 2 It is
characterized by having a configuration described in the above.
[0019]
According to the first aspect of the present invention, by setting the thickness of the diaphragm
to less than 0.1 mm, the resonance efficiency with the vibrator can be improved, and the
vibration of the diaphragm can be strengthened.
According to the invention of claim 2, the diaphragm is made extremely thin to improve the
resonance efficiency, and even if the vibration of the diaphragm is strong, it is prevented from
being damaged early by being reinforced by the reinforcing member. Be done.
[0020]
According to the invention of claim 3, by using the ultrasonic vibration device according to claim
11 or claim 2 for the ultrasonic cleaning device, strong ultrasonic vibration is surely given to the
cleaning liquid through the diaphragm by vibration. The ultrasonic cleaning device can be used
for a long time without the need for maintenance.
[0021]
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present
invention will be described below with reference to FIGS.
The ultrasonic cleaning apparatus of the present invention shown in FIG.
The apparatus main body 11 is joined and fixed to the upper member 13 in which a recess 12
whose upper surface is open is formed along its longitudinal direction and the lower surface of
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the upper member 13 through a first seal member 14 in a fluid tight manner. The lower member
15 is formed into an elongated prismatic shape.
[0022]
A fitting hole 16 is bored in the lower wall of the upper member 13 along the longitudinal
direction, and a convex portion 17 fitting to the fitting hole 16 is provided at the center of the
upper surface of the lower member 15 in the width direction. It is formed.
[0023]
A space 18 having one end opened at the upper surface and the other end opened at the lower
surface is formed along the longitudinal direction at the center in the width direction where the
convex portion 17 of the lower member 15 is formed.
The cross-sectional shape of the space 18 is in the shape of a taper whose width dimension
decreases from one end (upper end) to the other end (lower end), and the lower end opening is a
narrow nozzle opening 19 .
[0024]
The open upper end of the space 18 is closed in a fluid-tight manner by a rectangular diaphragm
21.
That is, the diaphragm 21 is joined to the inner bottom surface of the recess 12 of the upper
member 13 via a frame-shaped second seal member 22 having a lower surface peripheral
portion having a predetermined thickness.
[0025]
A frame-like holding plate 23 is similarly joined to the upper surface of the diaphragm 21 and
fixed to the upper member 13 by a bolt 33.
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Thereby, the upper end opening of the space 18 is airtightly closed.
[0026]
As shown in FIG. 1, in the widthwise center portion of the upper surface of the diaphragm 21,
that is, the portion corresponding to the space portion 18, the side faces adjacent to each other
with a plurality of vibrators 24 are adhered in the longitudinal direction. doing.
Electrodes 24a and 24b made of a metal film such as Ag are formed on the upper and lower
surfaces of the vibrator 24, respectively.
[0027]
The vibrating plate 21 is made of high tension metal such as tantalum, titanium or an alloy
thereof, and the thickness dimension T thereof is set to less than 0.1 mm 2 where the reduction
of the resonance phenomenon with the vibrator 24 is small.
[0028]
As shown in FIG. 2, the vibrator 24 is joined to a substantially central portion of the upper
surface of the diaphragm 21, and the upper reinforcing plate 41 a and the lower reinforcement
are held on both sides of the vibrator 24 with the diaphragm 21 interposed therebetween. The
plate 41 b is bonded or bonded via a seal material, and is integrally coupled to the diaphragm 21
by a screw 42.
Thereby, the thickness of less than 0.1 mm at which the resonance efficiency with the vibrator
24 is high is maintained at the portion where the vibrator 24 of the diaphragm 21 is provided,
and the other portions are reinforced by the upper and lower reinforcing plates 41a and 41b.
Thickness is difficult to damage.
The thickness of each of the reinforcing plates 41 a and 41 b is set sufficiently thicker than the
diaphragm 21. The diaphragm 21 is joined to the inner bottom surface of the recess 12 of the
upper member 13 via the reinforcing members 41a and 41b, and is fixed to the upper member
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13 by a bolt 33 via a pressing plate 23.
[0029]
As shown in FIG. 3, a feed plate 25 is attached to the pressing plate 23 via a holding member 26
above the vibrating plate 21. The feed plate 25 is provided with a contact 27 resiliently
contacting the electrode 24 a on the upper surface side of the vibrator 24. A coil 28 is provided
on the feed plate 25, and power is supplied from the coil 28 to the vibrator 24 through the feed
plate 25 and the contact 27. As a result, the vibrator 24 ultrasonically vibrates, and the
diaphragm 21 interlocks with the ultrasonic vibration.
[0030]
In the lower member 15 of the apparatus main body 11, a pair of supply paths 31 positioned on
both sides in the width direction of the space 18 are formed penetrating in the longitudinal
direction. A supply source (not shown) is connected to both ends of the supply path 31 through a
tube (not shown) as well to supply a cleaning liquid such as pure water or a chemical solution.
[0031]
A plurality of ejection channels 32 are provided in communication with one end of each of the
pair of supply channels 31. That is, the ejection path 32 is formed at the joining portion between
the upper member 13 and the lower member 15 of the device main body 11, and the other end
is covered by the diaphragm 21 on the inner bottom surface of the recess 12 of the upper
member 13. It is opened so as to communicate with the other part, that is, the upper end side of
the space 18.
[0032]
A plurality of jet channels 32 are formed at predetermined intervals along the longitudinal
direction of the apparatus main body 11 on one side and the other side in the width direction of
the space portion 18. Below, the effect ¦ action of the ultrasonic cleaning apparatus of the said
structure is demonstrated.
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[0033]
The cleaning liquid is supplied to the pair of supply paths 31, and the vibrator 24 is driven by an
ultrasonic oscillator to ultrasonically vibrate the diaphragm 21. The cleaning liquid supplied to
the supply path 31 is divided into a plurality of ejection paths 32 and ejected from the other end
opening of the ejection path 32 toward the diaphragm 21.
[0034]
When the cleaning liquid ejected from each ejection channel 32 collides with the lower surface of
the vibrating plate 21 that is subjected to ultrasonic vibration, ultrasonic vibration is propagated
to the cleaning liquid. The cleaning liquid to which the ultrasonic vibration is propagated, that is,
the cleaning liquid that ultrasonically vibrates flows in the space 18 as shown by the arrow in
FIG. 2 and spouts from the nozzle port 19 at the lower end thereof. Therefore, when the object to
be cleaned is disposed opposite to the lower side of the nozzle port 19, the object to be cleaned
can be cleaned by the cleaning liquid to which the ultrasonic vibration is applied.
[0035]
By the way, the thickness dimension T of the diaphragm 21 is set to a thickness less than 0.1 mm
at which the resonance efficiency with the vibrator 24 is high. The vibrating plate 21 resonates
with the vibrator 24 to reduce the damping of the vibration, so that strong ultrasonic vibration
can be imparted to the cleaning liquid.
[0036]
FIG. 4 shows the sound pressure of the cleaning liquid jetted from the nozzle port 19 and the
ultrasonic wave for driving the vibrator 24 when the diaphragm 21 having a thickness dimension
T of 0.05 mm, 0.085 mm and 0.1 mm is used. It is a graph which measured a relation with an
output of an ultrasonic oscillator which drives vibrator 24. As can be seen from this figure, by
setting the thickness T of the diaphragm 21 to less than 0.1 mm, a high sound pressure can be
obtained, and the thinner the thickness T, the higher the sound pressure. .
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[0037]
When the thickness of the diaphragm 21 is 0.05 mm, both side portions of the diaphragm 21 to
which the vibrator 24 is joined are reinforced by the upper reinforcement plate 41a and the
lower reinforcement plate 41b. Therefore, the portion where the vibrator 24 is provided is
maintained at a thickness of less than 0.1 mm, where the resonance efficiency with this vibrator
24 is high, but the other portions are reinforced by the reinforcing plates 41a and 41b. Thus,
even if the portion where the vibrator 24 is provided resonates with the vibrator 24 and vibrates
strongly, the diaphragm 21 is prevented from being damaged prematurely by the vibration.
[0038]
Further, a part of the reinforcing plate 41b as shown in FIG. 2 may be applied to both sides of the
portion of the diaphragm 21 where the vibrator 24 is provided. With such a configuration, the
diaphragm 21 (portion of dimension c) in the portion in contact with the cleaning liquid is
substantially reinforced by the upper and lower reinforcing plates 41 a and 41 b and the vibrator
24.
[0039]
In this case, if the width a of the upper electrode 24a is slightly smaller than the width b of the
vibrator 24 and the width c of the portion of the diaphragm 21 not reinforced by the upper and
lower reinforcing plates 41a and 41b is the same as the width c. As the portion a vibrates, the
four corners of the vibration 24 attached to the diaphragm 21 become difficult to peel off.
[0040]
Furthermore, by making the end of each side of the upper electrode 24 a smaller by about 0.5
mm than the end of each side of the vibrator 24, the plurality of vibrators 24 are closely attached
in the longitudinal direction of the diaphragm 21 and attached. Even in this case, the distance
between the ends of one side of each electrode 24 is about 1 mm, and a sufficient insulation
distance can be provided between each electrode.
[0041]
In addition, since ultrasonic vibration propagates from the top to the bottom of the cleaning
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solution when the vibrator 24 and the diaphragm 21 are arranged at the upper part, for example,
the cleaning solution spouted to the portion directly in contact with the object to be cleaned is
uniform. Sound wave vibration will be applied.
[0042]
That is, according to the diaphragm 21 having the above-described structure, it has high
resonance efficiency with the vibrator 24 and can be provided with strength that will not be
damaged prematurely, so it is supplied to the supply portion 8 of the device main body 11 Strong
vibration can be reliably applied to the cleaning solution over a long period of time.
[0043]
In addition, although the said embodiment demonstrated by the upper reinforcement board 41a
and the lower reinforcement board 41b, either one may be sufficient.
FIG. 5 shows another embodiment of the present invention.
In this embodiment, a step 51 is formed on one widthwise end of an upper reinforcing plate 41 a
provided on the upper surface side of the diaphragm 21, and the widthwise end of the vibrator
24 is pressed and held by the step 51.
The upper reinforcing plate 41 a is coupled to the lower reinforcing plate 41 b by a screw 42.
[0044]
Further, one electrode 24a provided on the vibrator 24 is provided at a central portion in the
width direction of the upper surface of the diaphragm 21 as indicated by the dimension e, and
the other electrode 24b is in the width direction of the lower surface and the upper surface of the
vibrator 24 It is provided over both sides.
Therefore, the step 51 of the upper reinforcing plate 41a contacts only the other electrode 24b
and does not contact one of the electrodes 24a. The dimension e is set to be substantially the
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same as the distance f between the pair of lower reinforcing plates 41b.
[0045]
That is, according to such a configuration, even if the upper reinforcing plate 41a is made of
resin, the other electrode 24b extends around the side of the vibrator 24 and reaches the upper
surface, so the ultrasonic oscillator can be easily made. It can be connected.
[0046]
Furthermore, according to the present invention, not only the single wafer type ultrasonic
cleaning apparatus that sprays the cleaning liquid to the object to be cleaned but also a plurality
of objects to be cleaned are immersed in the cleaning tank storing the cleaning liquid, and the
bottom portion of the cleaning tank It is possible to apply ultrasonic vibration to the cleaning
solution by an ultrasonic vibration device disposed at the same time, and apply it to a dip type
ultrasonic cleaning device that cleans an object to be cleaned.
[0047]
According to the invention of claim 1, since the thickness of the vibration plate to which the
vibration transducer is attached is less than 0.1 mm, the thickness of the vibration plate is
sufficiently reduced to Resonance efficiency can be enhanced.
[0048]
According to the second aspect of the present invention, the thickness of the diaphragm to which
the vibrator is attached is set to less than 0.1 mm, and the portion of the diaphragm out of the
vibrator is reinforced by the reinforcing member.
[0049]
Therefore, the thickness of the diaphragm can be made sufficiently thin to increase the
resonance efficiency with the vibrator, and at the same time, the strength is reinforced by the
reinforcing member, so early damage can be prevented.
[0050]
According to the invention of claim 3, by using the ultrasonic vibration device according to claim
1 or 2 for the ultrasonic cleaning device, strong ultrasonic vibration can be reliably applied to the
cleaning liquid, and maintenance for a long period of time It can be used without the need for
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[0051]
Brief description of the drawings
[0052]
1 is an enlarged plan view of a vibrator attachment structure showing an embodiment of the
present invention.
[0053]
2 is a cross-sectional view taken along the line AA of FIG.
[0054]
Similarly FIG. 3 is a longitudinal sectional view of the ultrasonic cleaning apparatus.
[0055]
4 is a graph showing the relationship between the sound pressure and the output of the
ultrasonic oscillator when the thickness of the diaphragm is changed.
[0056]
5 is an enlarged cross-sectional view of the mounting structure of the ultrasonic transducer
showing another embodiment of the present invention.
[0057]
6 is a longitudinal sectional view of a conventional ultrasonic cleaning apparatus.
[0058]
Explanation of sign
[0059]
21 ... diaphragm 24 ... vibrators 41a, 41b ... reinforcement member
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