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JPH091067

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DESCRIPTION JPH091067
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
bolted vibrator used in an ultrasonic processing machine, ultrasonic cleaning machine or the like
utilizing ultrasonic vibration.
[0002]
2. Description of the Related Art As shown in FIG. 5, a conventional bolted vibrator comprises a
backing plate 22, a front plate 26, a nut 21, a bolt 25, an electrode plate 24 and a piezoelectric
ceramic 23. For the backing plate 22 and the front plate 26, a metal or metal alloy material such
as aluminum, stainless steel, titanium or the like is used, and in particular, aluminum is used in
consideration of processing easiness, cost and the like. Also, in order to maintain the continuity
and stability of vibration, a lapping process was performed on the surfaces to be joined of the
parts, and the assembly was finished and joined with a surface roughness of about 1 μm to 2
μm.
[0003]
When manufacturing a conventional bolted vibrator, if the diameter of the vibrator is determined
to be φ10 mm to φ50 mm, the resonance frequency that can be manufactured is in the range of
30 kHz to 150 kHz. When the vibration direction exceeds the range, the vibration direction
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appears not only in the longitudinal direction but also in the radial direction, that is, in the lateral
direction, and when it is used in an ultrasonic cleaning machine or the like, the occurrence of
erosion is promoted. In addition, when it is used in a processing machine or the like, problems
such as processing defects occur due to a decrease in amplitude in the vertical direction, so that
there is a drawback that it can not be used practically.
[0004]
The object of the present invention is to increase the resonance frequency over the conventional
product with the same overall length as the conventional product by using aluminum nitride
having a large sound wave propagation speed for both the backing plate and the front plate, or
one side. An object of the present invention is to provide a bolted vibrator capable of expanding a
frequency range which can be manufactured when using piezoelectric ceramics to a high
frequency side.
[0005]
The present invention relates to a bolted vibrator comprising a backing plate, a front plate, a bolt
and a nut, a pair of piezoelectric ceramics and an electrode plate, wherein the backing plate or
the front plate is made of aluminum nitride. By using a material, a bolted oscillator having a high
frequency resonance frequency can be obtained.
[0006]
That is, the present invention is characterized by using an aluminum nitride material for the
backing plate or the front plate, in a bolted vibrator composed of a backing plate, a front plate, a
bolt and a nut, a pair of piezoelectric ceramics and an electrode plate. Bolted oscillator.
[0007]
[Function] About 10, without using metal or metal alloy material such as aluminum with sound
wave propagation velocity of about 5070 m / s, stainless steel of about 4950 m / s, titanium of
about 4875 m / s for the backing plate or front plate By using aluminum nitride as large as 000
m / s, the resonance frequency can be increased 1.5 times with the same overall length
compared to conventional aluminum, and with the same diameter, the manufacturable frequency
range is also on the high frequency side A bolted oscillator is obtained which can be expanded to
[0008]
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Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a front view showing the configuration of a bolted vibrator according to an embodiment
of the present invention.
As shown in FIG. 1, the bolted vibrator according to the present invention comprises an
aluminum nitride backing plate 2, an aluminum nitride front plate 6, a bolt 3, a nut 1 and a pair
of piezoelectric ceramics 4, and an electrode plate 5. It is configured.
All parts except for the bolt 3 are assembled in a configuration by surface bonding stacked in the
vertical direction, whereby vertical vibration is obtained at both end faces of the bolted vibrator.
[0009]
In the bolted vibrator according to the present invention, the surface of the surface of each of the
backing plate 2 and the front plate 6 to be joined to the piezoelectric ceramic 4 (in this example,
the front plate 6) is any surface Machining is performed with an accuracy that the average
surface roughness at 10 locations is 1 to 2 μm.
Further, as a comparative example, as shown in FIG. 5, a conventional bolted vibrator was
manufactured using a backing plate 22 and a front plate 26 made of aluminum processed with
an accuracy of about 1 μm to 2 μm.
[0010]
In the bolted vibrator, the resonance frequency is determined by the equation shown below from
the sound wave propagation velocity which is one of the constants of these materials.
[0011]
fr = v / 2 · · · · · · · (1) l: total length of the bolted oscillator, v: sound wave propagation velocity, fr:
resonant frequency
[0012]
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1 and 5, when D / l <0.6 and D = 20φ mm, the resonance when the total length l mm of each of
the present invention and the conventional product is changed to 40 mm, 50 mm, 80 mm, 90
mm, 100 mm The results of the change in frequency are shown in Table 1.
[0013]
Table 1 is shown graphically in FIG.
In FIG. 2, A is the product of the present invention, and B is the conventional product.
The sound wave propagation velocity is about 5070 m / s for the conventional aluminum, while
it is 10,000 m / s for the aluminum nitride of the present invention.
As described above, as shown in A, the resonance frequency can be increased 1.5 times with the
same total length as that of the conventional product by using about twice the material
aluminum nitride.
[0014]
By the way, the above-mentioned bolted vibrator has good resonance frequency characteristics if
it is only longitudinal vibration. However, if the ratio D / l becomes large, radial transverse
vibration enters the longitudinal vibration to deteriorate the frequency characteristics. Therefore,
the radial direction component / longitudinal direction component × 100% is M, and the value
of M is determined by the ratio D / l. For example, in the case of D / l = 0.4, M = 5%, but in the
case of D / l = 0.7, M = about 15%, and radial vibration occurs. As described above, when the
value of M is obtained and graphed with respect to the value of the ratio D / l, it is as shown in
FIG.
[0015]
From FIG. 4, M indicates a straight line at D / l <0.6, but if it is more than that, it becomes a curve
and rapidly increases. Therefore, it can be understood that the deterioration is increased at D / l>
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0.6, and therefore, application is possible only at D / l <0.6 or less. Therefore, it is difficult to
increase the resonance frequency without changing the diameter D.
[0016]
Moreover, in FIG. 1 and FIG. 5, when D / l <0.6, change of resonance frequency when diameter
Dφ mm of each of the present invention and conventional product is changed to 10 mm, 20 mm,
30 mm, 40 mm, 50 mm. Table 2 shows the results of the determination. In addition, in () in Table
2, the value of largest full length lmax = D / 0.6 was shown.
[0017]
Table 2 is shown graphically in FIG. In FIG. 3, C is the product of the present invention and E is
the conventional product. When ceramic of the same diameter is used, it can be seen that in the
product of the present invention, the frequency range that can be manufactured also expands to
the high frequency side as compared with the conventional product.
[0018]
As described above, according to the product of the present invention, by using aluminum nitride
having a sound propagation velocity of about twice or more than 10,000 m / s as compared with
aluminum and stainless steel (SUS), A bolted oscillator that can increase the resonance frequency
by 1.5 times with the same overall length as a conventional product, and can also be
manufactured when a ceramic of the same diameter is used, and the frequency range can also be
expanded to the high frequency side Can provide
[0019]
Brief description of the drawings
[0020]
1 is a front view showing a bolted oscillator of an embodiment of the present invention.
[0021]
2 is a diagram showing the relationship of the resonance frequency to the total length of the
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present invention and the conventional bolted oscillator.
[0022]
3 is a diagram showing the relationship between the resonant frequency of the present invention
and the diameter of the bolted vibrator of the prior art.
[0023]
4 is a diagram showing the relationship of radial component / longitudinal component to D / l of
the bolted oscillator of the present invention.
[0024]
5 is a front view of a conventional bolted oscillator.
[0025]
Explanation of sign
[0026]
1, 21 Nut 2, 22 Backing Plate 3, 25 Bolt 4, 23 Piezoelectric Ceramics 5, 24 Electrode Plate 6, 26
Front Plate A, C Inventive Product B, E Conventional Product D Diameter 1 Length
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